JPS54584A - Method of etching to form microminiature structure - Google Patents
Method of etching to form microminiature structureInfo
- Publication number
- JPS54584A JPS54584A JP4643478A JP4643478A JPS54584A JP S54584 A JPS54584 A JP S54584A JP 4643478 A JP4643478 A JP 4643478A JP 4643478 A JP4643478 A JP 4643478A JP S54584 A JPS54584 A JP S54584A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- microminiature structure
- form microminiature
- microminiature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
- Sampling And Sample Adjustment (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19772717400 DE2717400C2 (de) | 1977-04-20 | 1977-04-20 | Ätzverfahren zur Herstellung von Strukturen unterschiedlicher Höhe |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54584A true JPS54584A (en) | 1979-01-05 |
Family
ID=6006737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4643478A Pending JPS54584A (en) | 1977-04-20 | 1978-04-19 | Method of etching to form microminiature structure |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS54584A (ja) |
DE (1) | DE2717400C2 (ja) |
FR (1) | FR2388057A1 (ja) |
GB (1) | GB1594800A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS601778U (ja) * | 1983-06-17 | 1985-01-08 | フジテツク株式会社 | エレベ−タ用つり合ロ−プの張り車 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5656636A (en) * | 1979-10-13 | 1981-05-18 | Mitsubishi Electric Corp | Processing method of fine pattern |
DE2951287C2 (de) * | 1979-12-20 | 1987-01-02 | Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt | Verfahren zur Herstellung von mit einer Vielzahl von feinsten Spitzen versehenen Oberflächen |
DE2951376C2 (de) * | 1979-12-20 | 1983-09-15 | Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt | Verfahren zur Erzeugung einer Kernspur oder einer Vielzahl von Kernspuren von schweren Ionen und von aus den Kernspuren durch Ätzung gebildeten Mikrolöchern, sowie Vorrichtung zur Durchführung des Verfahrens |
DE3337227A1 (de) * | 1983-10-13 | 1985-04-25 | Gesellschaft für Schwerionenforschung mbH Darmstadt, 6100 Darmstadt | Verfahren zum bestimmen des durchmessers von mikroloechern |
WO2002077387A1 (en) * | 2001-03-23 | 2002-10-03 | Voon Kwong Tien | A floor surface and a method of treatment thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4979470A (ja) * | 1972-12-04 | 1974-07-31 | ||
JPS5037370A (ja) * | 1973-08-06 | 1975-04-08 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2458370C2 (de) * | 1974-12-10 | 1984-05-10 | Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel | Energiestrahl-Gravierverfahren und Einrichtung zu seiner Durchführung |
-
1977
- 1977-04-20 DE DE19772717400 patent/DE2717400C2/de not_active Expired
-
1978
- 1978-04-17 GB GB1498778A patent/GB1594800A/en not_active Expired
- 1978-04-18 FR FR7811324A patent/FR2388057A1/fr not_active Withdrawn
- 1978-04-19 JP JP4643478A patent/JPS54584A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4979470A (ja) * | 1972-12-04 | 1974-07-31 | ||
JPS5037370A (ja) * | 1973-08-06 | 1975-04-08 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS601778U (ja) * | 1983-06-17 | 1985-01-08 | フジテツク株式会社 | エレベ−タ用つり合ロ−プの張り車 |
Also Published As
Publication number | Publication date |
---|---|
GB1594800A (en) | 1981-08-05 |
FR2388057A1 (fr) | 1978-11-17 |
DE2717400B1 (de) | 1978-10-26 |
DE2717400C2 (de) | 1979-06-21 |
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