GB1586586A - Photoresist materials - Google Patents

Photoresist materials Download PDF

Info

Publication number
GB1586586A
GB1586586A GB30840/77A GB3084077A GB1586586A GB 1586586 A GB1586586 A GB 1586586A GB 30840/77 A GB30840/77 A GB 30840/77A GB 3084077 A GB3084077 A GB 3084077A GB 1586586 A GB1586586 A GB 1586586A
Authority
GB
United Kingdom
Prior art keywords
composition
composition according
photoresist
weight
rosinous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB30840/77A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
Original Assignee
Shipley Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co Inc filed Critical Shipley Co Inc
Publication of GB1586586A publication Critical patent/GB1586586A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Inks, Pencil-Leads, Or Crayons (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
GB30840/77A 1976-07-22 1977-07-22 Photoresist materials Expired GB1586586A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/707,672 US4148654A (en) 1976-07-22 1976-07-22 Positive acting photoresist comprising diazide ester, novolak resin and rosin

Publications (1)

Publication Number Publication Date
GB1586586A true GB1586586A (en) 1981-03-18

Family

ID=24842661

Family Applications (1)

Application Number Title Priority Date Filing Date
GB30840/77A Expired GB1586586A (en) 1976-07-22 1977-07-22 Photoresist materials

Country Status (7)

Country Link
US (1) US4148654A (de)
JP (1) JPS6012621B2 (de)
CA (1) CA1115586A (de)
DE (1) DE2733267C2 (de)
FR (1) FR2359437A1 (de)
GB (1) GB1586586A (de)
NL (1) NL7708170A (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5532086A (en) * 1978-08-30 1980-03-06 Fuji Photo Film Co Ltd Photosensitive printing plate
US4247616A (en) * 1979-07-27 1981-01-27 Minnesota Mining And Manufacturing Company Positive-acting photoresist composition
DE3023201A1 (de) * 1980-06-21 1982-01-07 Hoechst Ag, 6000 Frankfurt Positiv arbeitendes strahlungsempfindliches gemisch
US4350753A (en) * 1981-06-15 1982-09-21 Polychrome Corporation Positive acting composition yielding pre-development high visibility image after radiation exposure comprising radiation sensitive diazo oxide and haloalkyl-s-triazine with novolak and dyestuff
US4348471A (en) * 1981-06-15 1982-09-07 Polychrome Corporation Positive acting composition yielding pre-development high visibility image after radiation exposure comprising acid free novolak, diazo oxide and acid sensitive dyestuff
EP0087262A1 (de) * 1982-02-22 1983-08-31 Minnesota Mining And Manufacturing Company Positiv arbeitende, lichtempfindliche Zusammensetzungen
JPS58187926A (ja) * 1982-04-28 1983-11-02 Toyo Soda Mfg Co Ltd 放射線ネガ型レジストの現像方法
JPS59160139A (ja) * 1983-03-04 1984-09-10 Hitachi Ltd 感光性重合体組成物
US5300380A (en) * 1986-08-06 1994-04-05 Ciba-Geigy Corporation Process for the production of relief structures using a negative photoresist based on polyphenols and epoxy compounds or vinyl ethers
EP0255989B1 (de) * 1986-08-06 1990-11-22 Ciba-Geigy Ag Negativ-Photoresist auf Basis von Polyphenolen und Epoxidverbindungen oder Vinylethern
EP0288533A4 (de) * 1986-10-20 1989-02-06 Macdermid Inc Bildumkehrsystem und -verfahren.
EP0280197A3 (de) * 1987-02-23 1990-05-23 Oki Electric Industry Company, Limited Verfahren zur Herstellung einer Photolackstruktur
US5272026A (en) * 1987-12-18 1993-12-21 Ucb S.A. Negative image process utilizing photosensitive compositions containing aromatic fused polycyclic sulfonic acid and partial ester or phenolic resin with diazoquinone sulfonic acid or diazoquinone carboxylic acid, and associated imaged article
GB8729510D0 (en) * 1987-12-18 1988-02-03 Ucb Sa Photosensitive compositions containing phenolic resins & diazoquinone compounds
JPH01278585A (ja) * 1988-04-30 1989-11-08 Somar Corp 紫外線硬化性レジストインキ
JPH0615587B2 (ja) * 1988-11-16 1994-03-02 ソマール株式会社 活性エネルギー線硬化型樹脂組成物
US5210000A (en) * 1989-05-22 1993-05-11 Shipley Company Inc. Photoresist and method for forming a relief image utilizing composition with copolymer binder having a major proportion of phenolic units and a minor proportion of non-aromatic cyclic alcoholic units
US5128232A (en) * 1989-05-22 1992-07-07 Shiply Company Inc. Photoresist composition with copolymer binder having a major proportion of phenolic units and a minor proportion of non-aromatic cyclic alcoholic units
TW200739265A (en) * 2005-12-06 2007-10-16 Tokyo Ohka Kogyo Co Ltd Positive photoresist composition and method of forming photoresist pattern using the same
US9583669B2 (en) * 2012-08-16 2017-02-28 Sun Chemical Corporation Inkjet printable etch resist
WO2019163286A1 (ja) * 2018-02-23 2019-08-29 富士フイルム株式会社 ポジ型平版印刷版原版、及び、平版印刷版の作製方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE907739C (de) * 1949-07-23 1954-02-18 Kalle & Co Ag Verfahren zur Herstellung von Kopien, besonders Druckformen, mit Hilfe von Diazoverbindungen und dafuer verwendbares lichtempfindliches Material
NL101499C (de) * 1951-08-20
US3025162A (en) * 1958-05-28 1962-03-13 Francis C Gilbert Dimension stabilized fixed photographic type emulsion and a method for producing same
CA774047A (en) * 1963-12-09 1967-12-19 Shipley Company Light-sensitive material and process for the development thereof
US3634082A (en) * 1967-07-07 1972-01-11 Shipley Co Light-sensitive naphthoquinone diazide composition containing a polyvinyl ether
US3650754A (en) * 1969-07-31 1972-03-21 Keuffel & Esser Co Photoresist compositions containing limed rosin and photoactinator
US3713831A (en) * 1969-08-22 1973-01-30 Staley Mfg Co A E Coating composition comprising photoactivator and film-forming organic material for powder development
DE2622799A1 (de) * 1976-05-21 1977-12-08 Hoechst Ag Vorsensibilisierte flachdruckplatte

Also Published As

Publication number Publication date
FR2359437B1 (de) 1980-07-11
DE2733267C2 (de) 1982-06-24
DE2733267A1 (de) 1978-01-26
JPS5340517A (en) 1978-04-13
US4148654A (en) 1979-04-10
JPS6012621B2 (ja) 1985-04-02
FR2359437A1 (fr) 1978-02-17
NL7708170A (nl) 1978-01-24
CA1115586A (en) 1982-01-05

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee