GB1574677A - Method of coating electrically conductive components - Google Patents

Method of coating electrically conductive components Download PDF

Info

Publication number
GB1574677A
GB1574677A GB18044/78A GB1804478A GB1574677A GB 1574677 A GB1574677 A GB 1574677A GB 18044/78 A GB18044/78 A GB 18044/78A GB 1804478 A GB1804478 A GB 1804478A GB 1574677 A GB1574677 A GB 1574677A
Authority
GB
United Kingdom
Prior art keywords
chamber
component
coating
cathodes
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB18044/78A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB1574677A publication Critical patent/GB1574677A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
GB18044/78A 1977-06-07 1978-05-05 Method of coating electrically conductive components Expired GB1574677A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR777717439A FR2393854A1 (fr) 1977-06-07 1977-06-07 Procede de recouvrement de la surface d'une piece conductrice de l'electricite

Publications (1)

Publication Number Publication Date
GB1574677A true GB1574677A (en) 1980-09-10

Family

ID=9191791

Family Applications (1)

Application Number Title Priority Date Filing Date
GB18044/78A Expired GB1574677A (en) 1977-06-07 1978-05-05 Method of coating electrically conductive components

Country Status (11)

Country Link
JP (1) JPS544246A (xx)
AT (1) AT364217B (xx)
BE (1) BE867913A (xx)
CH (1) CH627791A5 (xx)
DE (1) DE2820183C3 (xx)
FR (1) FR2393854A1 (xx)
GB (1) GB1574677A (xx)
IT (1) IT1109053B (xx)
NL (1) NL7806125A (xx)
SE (1) SE7806503L (xx)
ZA (1) ZA782794B (xx)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2132636A (en) * 1982-10-12 1984-07-11 Secr Defence Glow discharge coating method
GB2187207A (en) * 1986-02-28 1987-09-03 Glyco Metall Werke Process for the production of laminated material or laminated workpieces by vapour deposit of at least one metal material on a metal substrate
US4704339A (en) * 1982-10-12 1987-11-03 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Infra-red transparent optical components

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI85793C (fi) * 1990-05-18 1992-05-25 Plasmapiiri Oy Foerfarande och anordning foer framstaellning av kretskort.
IL115713A0 (en) * 1995-10-22 1996-01-31 Ipmms Dev & Production Ltd Sputter deposit method and apparatus
DE10159907B4 (de) * 2001-12-06 2008-04-24 Interpane Entwicklungs- Und Beratungsgesellschaft Mbh & Co. Beschichtungsverfahren

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2132636A (en) * 1982-10-12 1984-07-11 Secr Defence Glow discharge coating method
US4704339A (en) * 1982-10-12 1987-11-03 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Infra-red transparent optical components
GB2187207A (en) * 1986-02-28 1987-09-03 Glyco Metall Werke Process for the production of laminated material or laminated workpieces by vapour deposit of at least one metal material on a metal substrate

Also Published As

Publication number Publication date
FR2393854B1 (xx) 1980-01-18
DE2820183C3 (de) 1981-09-10
FR2393854A1 (fr) 1979-01-05
CH627791A5 (en) 1982-01-29
IT1109053B (it) 1985-12-16
DE2820183A1 (de) 1978-12-14
DE2820183B2 (de) 1980-11-20
SE7806503L (sv) 1978-12-08
AT364217B (de) 1981-10-12
BE867913A (fr) 1978-12-07
IT7868139A0 (it) 1978-05-18
NL7806125A (nl) 1978-12-11
JPS544246A (en) 1979-01-12
ZA782794B (en) 1979-05-30
JPS5615780B2 (xx) 1981-04-13
ATA413078A (de) 1981-02-15

Similar Documents

Publication Publication Date Title
US4197175A (en) Method and apparatus for evaporating materials in a vacuum coating plant
US4448802A (en) Method and apparatus for evaporating material under vacuum using both an arc discharge and electron beam
US3836451A (en) Arc deposition apparatus
US3625848A (en) Arc deposition process and apparatus
US20020070357A1 (en) Magnetron negative ion sputter source
US4619748A (en) Method and apparatus for the reactive vapor deposition of layers of oxides, nitrides, oxynitrides and carbides on a substrate
US5278861A (en) Method of treating metals by deposition of materials and furnace for implementing said method
JPH0645870B2 (ja) 真空中で材料を蒸発する方法および装置
JPH02285072A (ja) 加工物表面のコーティング方法及びその加工物
US4437962A (en) Diamondlike flake composites
JPS62180069A (ja) 管内面の被覆方法
US3772174A (en) Deposition of alloy films
US10354845B2 (en) Atmospheric pressure pulsed arc plasma source and methods of coating therewith
US4565618A (en) Apparatus for producing diamondlike carbon flakes
GB1574677A (en) Method of coating electrically conductive components
CN103469164A (zh) 一种实现等离子体激活电子束物理气相沉积的装置和方法
JPS6154869B2 (xx)
JP3555033B2 (ja) 負圧又は真空中において材料蒸気によつて基板を被覆する装置
JP2857743B2 (ja) 薄膜形成装置および薄膜形成方法
JPS6352108B2 (xx)
JP3330159B2 (ja) ダイナミックミキシング装置
JP2001143894A (ja) プラズマ発生装置及び薄膜形成装置
JPH01263265A (ja) 真空アーク蒸着法
JPH04191364A (ja) イオンプレーティング方法および装置
JPH03150353A (ja) 反応性イオンプレーティング方法

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950505