GB1530411A - Sputter-ion vacuum pump having replaceable cathodes as part of the vacuum/envelope - Google Patents

Sputter-ion vacuum pump having replaceable cathodes as part of the vacuum/envelope

Info

Publication number
GB1530411A
GB1530411A GB5918/76A GB591876A GB1530411A GB 1530411 A GB1530411 A GB 1530411A GB 5918/76 A GB5918/76 A GB 5918/76A GB 591876 A GB591876 A GB 591876A GB 1530411 A GB1530411 A GB 1530411A
Authority
GB
United Kingdom
Prior art keywords
cathodes
envelope
ferromagnetic
sputter
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5918/76A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB1530411A publication Critical patent/GB1530411A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB5918/76A 1975-02-18 1976-02-16 Sputter-ion vacuum pump having replaceable cathodes as part of the vacuum/envelope Expired GB1530411A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/550,393 US3994625A (en) 1975-02-18 1975-02-18 Sputter-ion pump having improved cooling and improved magnetic circuitry

Publications (1)

Publication Number Publication Date
GB1530411A true GB1530411A (en) 1978-11-01

Family

ID=24196991

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5918/76A Expired GB1530411A (en) 1975-02-18 1976-02-16 Sputter-ion vacuum pump having replaceable cathodes as part of the vacuum/envelope

Country Status (7)

Country Link
US (1) US3994625A (US06589383-20030708-C00041.png)
JP (1) JPS51107510A (US06589383-20030708-C00041.png)
CH (1) CH608652A5 (US06589383-20030708-C00041.png)
DE (1) DE2605339A1 (US06589383-20030708-C00041.png)
FR (1) FR2301711A1 (US06589383-20030708-C00041.png)
GB (1) GB1530411A (US06589383-20030708-C00041.png)
IT (1) IT1055313B (US06589383-20030708-C00041.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9053917B2 (en) 2013-03-29 2015-06-09 Agilent Technologies, Inc. Vacuum fired and brazed ion pump element
CN104952685A (zh) * 2015-01-19 2015-09-30 中国航天员科研训练中心 轻量化大抽速离子泵
GB2627462A (en) * 2023-02-22 2024-08-28 Edwards Vacuum Llc Magnetic assembly for a sputter Ion pump

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2826501B1 (de) * 1978-06-16 1979-11-08 Siemens Ag Evakuierungsvorrichtung zur Erzeugung eines Isoliervakuums um die supraleitende Wicklung eines Rotors
US4460317A (en) * 1981-12-14 1984-07-17 Kernco, Inc. Ion pump
JPS59123152A (ja) * 1982-12-28 1984-07-16 Hajime Ishimaru イオンポンプ
JPS6351037A (ja) * 1986-08-20 1988-03-04 Toshiba Corp 電子ビ−ム装置の陽極室
IT1307236B1 (it) * 1999-04-02 2001-10-30 Varian Spa Pompa ionica.
US6873113B2 (en) * 2000-04-13 2005-03-29 Tokyo Electron Limited Stand alone plasma vacuum pump
US6729850B2 (en) 2001-10-31 2004-05-04 Tokyo Electron Limited Applied plasma duct system
US20040062659A1 (en) * 2002-07-12 2004-04-01 Sinha Mahadeva P. Ion pump with combined housing and cathode
US6835048B2 (en) * 2002-12-18 2004-12-28 Varian, Inc. Ion pump having secondary magnetic field
JP2006066265A (ja) * 2004-08-27 2006-03-09 Canon Inc 画像表示装置
US20070286738A1 (en) * 2006-06-12 2007-12-13 Varian, Inc. Vacuum ion-getter pump with cryogenically cooled cathode
KR101134308B1 (ko) * 2009-06-01 2012-04-16 주식회사 브이엠티 표면처리된 영구자석을 구비한 이온 펌프
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US11508564B2 (en) * 2014-11-19 2022-11-22 Hamilton Sundstrand Corporation Ion pumps and ion pump elements
RU2603348C2 (ru) * 2015-03-26 2016-11-27 Закрытое акционерное общество "Научно - техническое объединение ПРИБОРСЕРВИС" (ЗАО "НТО ПРИБОРСЕРВИС") Магниторазрядный насос
CN113316302B (zh) * 2021-05-24 2024-03-12 中国科学院合肥物质科学研究院 一种级联弧放电等离子体推进器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2169879A (en) * 1939-08-15 Demountable discharge apparatus
GB977431A (en) * 1961-05-22 1964-12-09 Varian Associates Cold cathode ionization gauge
US3159333A (en) * 1961-08-21 1964-12-01 Varian Associates Permanent magnets
US3176906A (en) * 1962-08-23 1965-04-06 Ca Nat Research Council Ion pump
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump
US3239134A (en) * 1964-04-14 1966-03-08 Sigmatron Inc Residual gas removing means for vacuum pumps
GB1095383A (US06589383-20030708-C00041.png) * 1965-02-19
US3379365A (en) * 1966-08-15 1968-04-23 Varian Associates Magnetically confined ion getter pump having combined coupling flange and pole piece structure
US3540812A (en) * 1968-04-12 1970-11-17 Rca Corp Sputter ion pump
FR1587077A (US06589383-20030708-C00041.png) * 1968-08-01 1970-03-13

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9053917B2 (en) 2013-03-29 2015-06-09 Agilent Technologies, Inc. Vacuum fired and brazed ion pump element
CN104952685A (zh) * 2015-01-19 2015-09-30 中国航天员科研训练中心 轻量化大抽速离子泵
CN104952685B (zh) * 2015-01-19 2017-11-21 中国航天员科研训练中心 轻量化大抽速离子泵
GB2627462A (en) * 2023-02-22 2024-08-28 Edwards Vacuum Llc Magnetic assembly for a sputter Ion pump

Also Published As

Publication number Publication date
FR2301711A1 (fr) 1976-09-17
FR2301711B1 (US06589383-20030708-C00041.png) 1983-01-07
CH608652A5 (US06589383-20030708-C00041.png) 1979-01-15
DE2605339A1 (de) 1976-08-26
IT1055313B (it) 1981-12-21
JPS51107510A (US06589383-20030708-C00041.png) 1976-09-24
US3994625A (en) 1976-11-30

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee