GB1512029A - Formation of thin layer patterns on a substrate - Google Patents
Formation of thin layer patterns on a substrateInfo
- Publication number
- GB1512029A GB1512029A GB3118575A GB3118575A GB1512029A GB 1512029 A GB1512029 A GB 1512029A GB 3118575 A GB3118575 A GB 3118575A GB 3118575 A GB3118575 A GB 3118575A GB 1512029 A GB1512029 A GB 1512029A
- Authority
- GB
- United Kingdom
- Prior art keywords
- thin layer
- layer
- photolacquer
- substrate
- areas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/04—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
- H05K3/046—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by selective transfer or selective detachment of a conductive layer
- H05K3/048—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by selective transfer or selective detachment of a conductive layer using a lift-off resist pattern or a release layer pattern
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/428—Stripping or agents therefor using ultrasonic means only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Magnetic Heads (AREA)
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Abstract
1512029 Forming thin layer patterns PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 25 July 1975 [30 July 1974] 31185/75 Heading B2E In a method for forming a thin layer pattern on a substrate e.g. for making integrated electronic circuits, in which a substrate is provided with a layer of supporting material, a photolacquer layer masking selected areas and a layer of the thin layer material then photolacquer and overlying areas of thin layer material are removed to leave the desired pattern, the supporting material is a material is such that after heating it has poor adhesion with the photolacquer layer, and the layered structure is subjected to a heating step to effect such poor adhesion prior to the step of removing the photolacquere. Suitable supporting layers are of aluminium applied by vapour deposition or cathode sputtering, or silica provided on a silicon substrate by surface oxidation. The photolacquer layer is provided by a conventional photolithographic method. The thin layer material may be a metal e.g. aluminium titanium, an oxide or nitride of silicon, a magnetic material such as nickel-iron or an alloy, and may be applied by cathode sputtering. Removal of the photolacquer and overlying thin layer areas is effected with a solvent optionally assisted by ultrasonic treatment. The heating step is suitably from 100- 200‹C for 30 minutes. The method can be used to form further layers e.g. of silica, aluminium and nickel-iron in selected areas.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19742436568 DE2436568C3 (en) | 1974-07-30 | Process for structuring thin layers |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1512029A true GB1512029A (en) | 1978-05-24 |
Family
ID=5921886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3118575A Expired GB1512029A (en) | 1974-07-30 | 1975-07-25 | Formation of thin layer patterns on a substrate |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5140770A (en) |
CA (1) | CA1046648A (en) |
FR (1) | FR2280717A1 (en) |
GB (1) | GB1512029A (en) |
NL (1) | NL7508955A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52107199U (en) * | 1977-02-17 | 1977-08-15 | ||
JPH0459523A (en) * | 1990-06-29 | 1992-02-26 | Toa Tsushin Kogyo Kk | Vertical feeding conduit for lamination piece |
DE102004034418B4 (en) * | 2004-07-15 | 2009-06-25 | Schott Ag | Process for producing structured optical filter layers on substrates |
-
1975
- 1975-07-24 CA CA232,152A patent/CA1046648A/en not_active Expired
- 1975-07-25 GB GB3118575A patent/GB1512029A/en not_active Expired
- 1975-07-26 JP JP9072875A patent/JPS5140770A/en active Pending
- 1975-07-28 NL NL7508955A patent/NL7508955A/en not_active Application Discontinuation
- 1975-07-29 FR FR7523629A patent/FR2280717A1/en active Granted
Also Published As
Publication number | Publication date |
---|---|
DE2436568A1 (en) | 1976-02-12 |
FR2280717A1 (en) | 1976-02-27 |
CA1046648A (en) | 1979-01-16 |
FR2280717B1 (en) | 1980-06-27 |
JPS5140770A (en) | 1976-04-05 |
NL7508955A (en) | 1976-02-03 |
DE2436568B2 (en) | 1977-07-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |