GB1502812A - High intensity ionic bombardment reactor for thermochemical treatment processes - Google Patents
High intensity ionic bombardment reactor for thermochemical treatment processesInfo
- Publication number
- GB1502812A GB1502812A GB10698/75A GB1069875A GB1502812A GB 1502812 A GB1502812 A GB 1502812A GB 10698/75 A GB10698/75 A GB 10698/75A GB 1069875 A GB1069875 A GB 1069875A GB 1502812 A GB1502812 A GB 1502812A
- Authority
- GB
- United Kingdom
- Prior art keywords
- conductor
- reactor
- high intensity
- treatment processes
- thermochemical treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 abstract 6
- 239000011810 insulating material Substances 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 238000010849 ion bombardment Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Gas-Filled Discharge Tubes (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7409227A FR2264891B1 (OSRAM) | 1974-03-19 | 1974-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1502812A true GB1502812A (en) | 1978-03-01 |
Family
ID=9136510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB10698/75A Expired GB1502812A (en) | 1974-03-19 | 1975-03-14 | High intensity ionic bombardment reactor for thermochemical treatment processes |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4019064A (OSRAM) |
| DE (1) | DE2511539C2 (OSRAM) |
| FR (1) | FR2264891B1 (OSRAM) |
| GB (1) | GB1502812A (OSRAM) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0287063U (OSRAM) * | 1988-12-22 | 1990-07-10 | ||
| DE58902306D1 (de) * | 1989-11-24 | 1992-10-22 | Ipsen Ind Int Gmbh | Industrievakuumofen. |
| US5372674A (en) * | 1993-05-14 | 1994-12-13 | Hughes Aircraft Company | Electrode for use in a plasma assisted chemical etching process |
| FR2725015B1 (fr) * | 1994-09-23 | 1996-12-20 | Innovatique Sa | Four utilisable pour la nitruration a basse pression d'une piece metallique |
| DE69515588T2 (de) * | 1994-04-22 | 2000-09-07 | Innovatique S.A., Chassieu | Procede pour la nitruration a basse pression d'une piece metallique et four pour la mise en oeuvre dudit procede |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1022360A (en) * | 1961-12-13 | 1966-03-09 | Berghaus Elektrophysik Anst | Method of and apparatus for coating an article |
| DE1301303B (de) * | 1964-10-01 | 1969-08-21 | Ppg Industries Inc | Verfahren zur Herstellung von feinverteilten Metalloxyd-Pigmenten |
| US3503711A (en) * | 1965-12-23 | 1970-03-31 | Gen Electric | Ammonia detection apparatus and method |
| US3536602A (en) * | 1967-01-27 | 1970-10-27 | Gen Electric | Glow inhibiting method for glow discharge apparatus |
| DE1281771B (de) * | 1968-04-18 | 1968-10-31 | Berghaus Elektrophysik Anst | Verfahren und Vorrichtung zum Ionitrierhaerten von Rohren aus Eisen und Stahl mittels elektrischer Glimmentladung |
| CH519588A (de) * | 1970-02-13 | 1972-02-29 | Berghaus Elektrophysik Anst | Verfahren zur Bearbeitung eines Werkstückes mittels einer Glimmentladung und Apparatur zur Durchführung des Verfahrens |
| US3840750A (en) * | 1972-11-06 | 1974-10-08 | Plasmachem | Plasma apparatus for carrying out high temperature chemical reactions |
-
1974
- 1974-03-19 FR FR7409227A patent/FR2264891B1/fr not_active Expired
-
1975
- 1975-03-14 GB GB10698/75A patent/GB1502812A/en not_active Expired
- 1975-03-17 DE DE2511539A patent/DE2511539C2/de not_active Expired
- 1975-03-17 US US05/558,896 patent/US4019064A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE2511539C2 (de) | 1982-07-29 |
| DE2511539A1 (de) | 1976-02-19 |
| US4019064A (en) | 1977-04-19 |
| FR2264891A1 (OSRAM) | 1975-10-17 |
| FR2264891B1 (OSRAM) | 1977-10-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |