GB1022360A - Method of and apparatus for coating an article - Google Patents

Method of and apparatus for coating an article

Info

Publication number
GB1022360A
GB1022360A GB46214/62A GB4621462A GB1022360A GB 1022360 A GB1022360 A GB 1022360A GB 46214/62 A GB46214/62 A GB 46214/62A GB 4621462 A GB4621462 A GB 4621462A GB 1022360 A GB1022360 A GB 1022360A
Authority
GB
United Kingdom
Prior art keywords
powder
article
gas
chamber
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB46214/62A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektrophysikalische Anstalt Bernhard Berghaus
Original Assignee
Elektrophysikalische Anstalt Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektrophysikalische Anstalt Bernhard Berghaus filed Critical Elektrophysikalische Anstalt Bernhard Berghaus
Publication of GB1022360A publication Critical patent/GB1022360A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Glanulating (AREA)

Abstract

In coating articles with particulate material by electrical gas discharge, the particles are held on the inner surface of a rotating carrier member, with the article held stationary at the centre, and the voltage applied between the carrier member (cathode) and the article is sufficient to balance the centrifugal force holding at least some of the particulate material on the inner surface. Powder is fed into the bottom 7 of a rotatable jacketed chamber 6 mounted on ball bearings with a fixed enclosed chamber 1. On rapidly rotating, the powder is distributed evenly over the vertical walls to form a coating 8, prevented from leaving the top by a rim 9. Gas enters at an inlet 16 and flows into the interior of the rotating chamber, and passes out through the hollow central axis 18 after flowing over the powder layer 8. Voltage A.C. or preferably D.C. is applied and a glow discharge is generated, the powder being cathodically disintegrated. The article 10 being coated may be heated. The flowing gas carries <PICT:1022360/C6-C7/1> off any vapours generated, and a wire mesh arranged on the exit tube 13 prevents a gas discharge within the tube. Cooling liquid enters at line 29 and flows against the inner wall of the rotating chamber, over an inner wall 19 in the jacket to the outer jacket from which it discharges to a pipe 32. The process may be applied to powder materials difficult to maintain in suspension in a gas.
GB46214/62A 1961-12-13 1962-12-07 Method of and apparatus for coating an article Expired GB1022360A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1439861 1961-12-13

Publications (1)

Publication Number Publication Date
GB1022360A true GB1022360A (en) 1966-03-09

Family

ID=4400496

Family Applications (1)

Application Number Title Priority Date Filing Date
GB46214/62A Expired GB1022360A (en) 1961-12-13 1962-12-07 Method of and apparatus for coating an article

Country Status (3)

Country Link
US (1) US3282814A (en)
DE (1) DE1446153B2 (en)
GB (1) GB1022360A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1054660A (en) * 1963-09-16
US3437784A (en) * 1966-02-16 1969-04-08 Gen Electric Power supply for reducing arcing damage in glow discharge apparatus
US3479269A (en) * 1967-01-04 1969-11-18 Bell Telephone Labor Inc Method for sputter etching using a high frequency negative pulse train
US3494762A (en) * 1967-11-27 1970-02-10 Iwatani & Co Method of manufacturing microfine metal powder
US3514388A (en) * 1968-03-18 1970-05-26 Automatic Fire Control Inc Ion metal plating of multiple parts
FR2264891B1 (en) * 1974-03-19 1977-10-07 Michel Henri
DE3316742C2 (en) * 1983-05-07 1985-05-30 Horst Dipl.-Ing. Linn (FH), 8459 Hirschbach Method and device for treating surfaces and near-surface layers of workpieces, in particular for dental and medical purposes, made of electrically conductive material
DE3700633C2 (en) * 1987-01-12 1997-02-20 Reinar Dr Gruen Method and device for the gentle coating of electrically conductive objects by means of plasma
US5647911A (en) * 1993-12-14 1997-07-15 Sony Corporation Gas diffuser plate assembly and RF electrode
SE9600705D0 (en) * 1996-02-26 1996-02-26 Abb Research Ltd A susceptor for a device for epitaxially growing objects and such a device
EP2440323B1 (en) * 2009-06-09 2019-08-28 Haydale Graphene Industries plc Methods and apparatus for particle processing with plasma
WO2015071658A1 (en) * 2013-11-12 2015-05-21 Perpetuus Research & Development Limited Treating particles

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1116606A (en) * 1914-01-23 1914-11-10 Curtis C Meigs Electrical apparatus for effecting the chemical combination of gases.
US1179927A (en) * 1915-08-28 1916-04-18 James Simpson Island Device for producing oxids of nitrogen.
US2251510A (en) * 1938-04-14 1941-08-05 Berghaus Method of coating metallic articles
US2476592A (en) * 1944-12-13 1949-07-19 Fruth Hal Frederick Cathodic deposition apparatus
GB716869A (en) * 1950-05-08 1954-10-13 Bernhard Berghaus Improvements in or relating to glow discharge chambers
BE547667A (en) * 1955-05-10 1900-01-01
US3005763A (en) * 1958-09-26 1961-10-24 Kollsman Paul Method of and apparatus for separating constituents of a liquid

Also Published As

Publication number Publication date
DE1446153A1 (en) 1969-01-30
DE1446153B2 (en) 1972-06-15
US3282814A (en) 1966-11-01

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