GB1485097A - Coatings on a transparent substrate - Google Patents

Coatings on a transparent substrate

Info

Publication number
GB1485097A
GB1485097A GB52523/75A GB5252375A GB1485097A GB 1485097 A GB1485097 A GB 1485097A GB 52523/75 A GB52523/75 A GB 52523/75A GB 5252375 A GB5252375 A GB 5252375A GB 1485097 A GB1485097 A GB 1485097A
Authority
GB
United Kingdom
Prior art keywords
coating
photo
coatings
resist
applying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB52523/75A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of GB1485097A publication Critical patent/GB1485097A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
GB52523/75A 1975-01-07 1975-12-23 Coatings on a transparent substrate Expired GB1485097A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH17775A CH586118A5 (enrdf_load_stackoverflow) 1975-01-07 1975-01-07

Publications (1)

Publication Number Publication Date
GB1485097A true GB1485097A (en) 1977-09-08

Family

ID=4181012

Family Applications (1)

Application Number Title Priority Date Filing Date
GB52523/75A Expired GB1485097A (en) 1975-01-07 1975-12-23 Coatings on a transparent substrate

Country Status (5)

Country Link
CH (1) CH586118A5 (enrdf_load_stackoverflow)
DE (1) DE2557667B2 (enrdf_load_stackoverflow)
FR (1) FR2297093A1 (enrdf_load_stackoverflow)
GB (1) GB1485097A (enrdf_load_stackoverflow)
NL (1) NL7504118A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3712335A1 (de) * 1987-04-11 1988-10-20 Vdo Schindling Verfahren zur herstellung einer struktur
GB9203595D0 (en) * 1992-02-20 1992-04-08 Philips Electronics Uk Ltd Methods of fabricating thin film structures and display devices produced thereby
JP2500050B2 (ja) * 1992-11-13 1996-05-29 インターナショナル・ビジネス・マシーンズ・コーポレイション リム型の位相シフト・マスクの形成方法
DE102004034417B4 (de) 2004-07-15 2007-09-27 Schott Ag Verfahren zur Herstellung eines beschichteten Substrats mit gewölbter Oberfläche

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH284109A (de) * 1952-02-06 1952-07-15 Ernst Jun Dr Ruest Verfahren zur Herstellung von mit Teilungen, Gittern, Strichzeichnungen, Flächenmarken usw. versehenen Gegenständen.
DE1060717B (de) * 1956-04-13 1959-07-02 Franz Wagner Verfahren zur Herstellung von Rastern, Zeichnungen u. a. auf Filmen, Glaesern und anderen Traegern

Also Published As

Publication number Publication date
FR2297093A1 (fr) 1976-08-06
NL7504118A (nl) 1976-07-09
DE2557667A1 (de) 1976-07-08
CH586118A5 (enrdf_load_stackoverflow) 1977-03-31
DE2557667B2 (de) 1978-08-24

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee