GB1459281A - Electron microscopes - Google Patents

Electron microscopes

Info

Publication number
GB1459281A
GB1459281A GB598874A GB598874A GB1459281A GB 1459281 A GB1459281 A GB 1459281A GB 598874 A GB598874 A GB 598874A GB 598874 A GB598874 A GB 598874A GB 1459281 A GB1459281 A GB 1459281A
Authority
GB
United Kingdom
Prior art keywords
tube
lens
superconductive
lenses
ferromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB598874A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1459281A publication Critical patent/GB1459281A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H01J37/1416—Electromagnetic lenses with superconducting coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1471—Arrangements for directing or deflecting the discharge along a desired path for centering, aligning or positioning of ray or beam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/871—Magnetic lens

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)
  • Electron Beam Exposure (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
GB598874A 1973-02-16 1974-02-08 Electron microscopes Expired GB1459281A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2307822A DE2307822C3 (de) 1973-02-16 1973-02-16 Supraleitendes Linsensystem für Korpuskularstrahlung

Publications (1)

Publication Number Publication Date
GB1459281A true GB1459281A (en) 1976-12-22

Family

ID=5872194

Family Applications (1)

Application Number Title Priority Date Filing Date
GB598874A Expired GB1459281A (en) 1973-02-16 1974-02-08 Electron microscopes

Country Status (6)

Country Link
US (1) US3916201A (enrdf_load_stackoverflow)
JP (1) JPS49115264A (enrdf_load_stackoverflow)
DE (1) DE2307822C3 (enrdf_load_stackoverflow)
FR (1) FR2218651B1 (enrdf_load_stackoverflow)
GB (1) GB1459281A (enrdf_load_stackoverflow)
NL (1) NL179247C (enrdf_load_stackoverflow)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541915A1 (de) * 1975-09-19 1977-03-31 Max Planck Gesellschaft Korpuskularstrahlenmikroskop mit ringzonensegmentabbildung
DE2726195C3 (de) * 1977-06-10 1980-02-21 Siemens Ag, 1000 Berlin Und 8000 Muenchen Magnetische Objektivlinse für unter Vakuum arbeitende Korpuskularstrahlgeräte, insbesondere Objektivlinse für Elektronenmikroskope
JPS5748274Y2 (enrdf_load_stackoverflow) * 1977-07-11 1982-10-22
JPS6338523Y2 (enrdf_load_stackoverflow) * 1981-06-15 1988-10-11
JPH0537397Y2 (enrdf_load_stackoverflow) * 1985-12-10 1993-09-21
JP2611995B2 (ja) * 1987-07-29 1997-05-21 秀典 松沢 荷電粒子収束用超電導体レンズ
NL8800344A (nl) * 1988-02-12 1989-09-01 Philips Nv Geladen deeltjes bundel apparaat.
JPH0760661B2 (ja) * 1988-07-22 1995-06-28 株式会社日立製作所 電子顕微鏡
US5012104A (en) * 1990-05-17 1991-04-30 Etec Systems, Inc. Thermally stable magnetic deflection assembly and method of making same
US5264706A (en) * 1991-04-26 1993-11-23 Fujitsu Limited Electron beam exposure system having an electromagnetic deflector configured for efficient cooling
DE69227442T2 (de) * 1991-08-30 1999-07-01 Hitachi, Ltd., Tokio/Tokyo Magnetische elektronenlinse und Elektronenmikroskop unter Verwendung derselbe.
US5376792A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Scanning electron microscope
US5563415A (en) * 1995-06-07 1996-10-08 Arch Development Corporation Magnetic lens apparatus for a low-voltage high-resolution electron microscope
US6051839A (en) * 1996-06-07 2000-04-18 Arch Development Corporation Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes
US6046457A (en) * 1998-01-09 2000-04-04 International Business Machines Corporation Charged particle beam apparatus having anticontamination means
US7345287B2 (en) * 2005-09-30 2008-03-18 Applied Materials, Inc. Cooling module for charged particle beam column elements
CN105874560B (zh) * 2013-11-14 2018-07-20 迈普尔平版印刷Ip有限公司 电极堆栈布置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB615257A (en) * 1946-05-13 1949-01-04 Gerhard Liebmann Improvements in or relating to electron microscopes and other electronic apparatus employing electron lenses
US3008044A (en) * 1960-02-25 1961-11-07 Gen Electric Application of superconductivity in guiding charged particles
DE1209224B (de) * 1963-08-16 1966-01-20 Siemens Ag Magnetische Linsenanordnung fuer an der Pumpe arbeitende Korpuskularstrahlgeraete
DE1564714C3 (de) * 1966-09-21 1975-04-24 Siemens Ag, 1000 Berlin Und 8000 Muenchen Magnetische Linsenanordnung für unter Vakuum arbeitende Korpuskularstrahlgeräte, insbesondere Objektivlinsenanordnung für Elektronenmikroskope
GB1234509A (enrdf_load_stackoverflow) * 1968-05-31 1971-06-03

Also Published As

Publication number Publication date
NL179247B (nl) 1986-03-03
NL7401645A (enrdf_load_stackoverflow) 1974-08-20
DE2307822C3 (de) 1982-03-18
DE2307822B2 (de) 1981-07-02
US3916201A (en) 1975-10-28
NL179247C (nl) 1986-08-01
FR2218651B1 (enrdf_load_stackoverflow) 1977-03-04
FR2218651A1 (enrdf_load_stackoverflow) 1974-09-13
JPS49115264A (enrdf_load_stackoverflow) 1974-11-02
DE2307822A1 (de) 1974-08-22

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee