GB615257A - Improvements in or relating to electron microscopes and other electronic apparatus employing electron lenses - Google Patents

Improvements in or relating to electron microscopes and other electronic apparatus employing electron lenses

Info

Publication number
GB615257A
GB615257A GB14465/46A GB1446546A GB615257A GB 615257 A GB615257 A GB 615257A GB 14465/46 A GB14465/46 A GB 14465/46A GB 1446546 A GB1446546 A GB 1446546A GB 615257 A GB615257 A GB 615257A
Authority
GB
United Kingdom
Prior art keywords
envelope
polepieces
spacers
tube
iron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB14465/46A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight Analytics Ltd
Original Assignee
Cathodeon Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cathodeon Ltd filed Critical Cathodeon Ltd
Priority to GB14465/46A priority Critical patent/GB615257A/en
Priority to US7445A priority patent/US2468403A/en
Publication of GB615257A publication Critical patent/GB615257A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15External mechanical adjustment of electron or ion optical components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/14Lenses magnetic
    • H01J37/141Electromagnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)

Abstract

615,257. Electron lenses. LIEBMANN, G., and CATHODEON Ltd. May 13, 1946, No. 14465. [Class 39 (i)] An electron microscope, diffraction camera, cathode-ray tube, or X-ray tube comprises a vacuumtight envelope 1, Fig. 1, of non-magnetic material such as brass or nickel-copper alloy, one or more solenoids 4, 13 shrouded in magnetic material 5, 14, such as iron, forming a sliding fit on the external surface of the envelope 1, and each solenoid is provided with iron polepieces 7, 8; 16, 17 registering with air-gaps 6, 15 in the iron shroud or shrouds and spaced apart by non-magnetic spacers 11, 20, preferably of brass and the pairs of polepieces (if more than one pair) are spaced apart by non- magnetic spacers 22 also of brass; the polepieces and spacers form a sliding fit within the envelope 1. The envelope 1 may be a single tube or (as shown) made up of two tubes 1a, 1b, the polepieces and spacers being assembled in the tube 1b and the resulting assembly being inserted as a unit within the tube 1a. Additional spacers 23, 24 are provided, and beam stops may be included in the assembly of polepieces and spacers, which is located as a whole by stops 25, 2G and the tube 1b is supported on a flange 27. Magnetic shielding means (not shown) may be provided to exclude extraneous fields. The joints between the tube 1 and other parts of the apparatus each comprise a socket 28, a rubber gasket 29, a metal washer 31, and a gland ring 30 which screws into the socket 28. A weak transverse magnetic field may be applied to the beam for centring purposes, and is produced by a permanent magnet, a coil or coils mounted on the envelope or an electromagnet, Fig. 2 (not shown), mounted within a housing 32 and having soft iron polepieces 38. Soft iron inserts within the envelope 1 may concentrate and " parallelize " the field. A number of such centring devices may be provided, one between each successive pairs of lenses as well as one before the point of entry of the beam into the first electron lens. The beam finally falls on a fluorescent screen or photographic plate. A prior art arrangement in which the inner walls of iron-shrouded solenoids form part of the vacuum-tight envelope, being joined to the other envelope parts by flexible metal bellows, polepieces being provided inside the envelope to register with annular gaps in the inner walls of the shrouds, and the gaps being closed by brass inserts to complete the vacuum-tight enclosure, is referred to.
GB14465/46A 1946-05-13 1946-05-13 Improvements in or relating to electron microscopes and other electronic apparatus employing electron lenses Expired GB615257A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB14465/46A GB615257A (en) 1946-05-13 1946-05-13 Improvements in or relating to electron microscopes and other electronic apparatus employing electron lenses
US7445A US2468403A (en) 1946-05-13 1948-02-10 Electron microscope and other electronic apparatus employing electron lenses

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB14465/46A GB615257A (en) 1946-05-13 1946-05-13 Improvements in or relating to electron microscopes and other electronic apparatus employing electron lenses

Publications (1)

Publication Number Publication Date
GB615257A true GB615257A (en) 1949-01-04

Family

ID=10041673

Family Applications (1)

Application Number Title Priority Date Filing Date
GB14465/46A Expired GB615257A (en) 1946-05-13 1946-05-13 Improvements in or relating to electron microscopes and other electronic apparatus employing electron lenses

Country Status (2)

Country Link
US (1) US2468403A (en)
GB (1) GB615257A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3345529A (en) * 1966-08-29 1967-10-03 Ibm Electron beam column with demountable flux-generating assembly and beam-forming elements
JPS5015109B1 (en) * 1970-12-24 1975-06-02
DE2307822C3 (en) * 1973-02-16 1982-03-18 Siemens AG, 1000 Berlin und 8000 München Superconducting lens system for corpuscular radiation

Also Published As

Publication number Publication date
US2468403A (en) 1949-04-26

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