JPS49115264A - - Google Patents
Info
- Publication number
- JPS49115264A JPS49115264A JP49017732A JP1773274A JPS49115264A JP S49115264 A JPS49115264 A JP S49115264A JP 49017732 A JP49017732 A JP 49017732A JP 1773274 A JP1773274 A JP 1773274A JP S49115264 A JPS49115264 A JP S49115264A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
- H01J37/1416—Electromagnetic lenses with superconducting coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1471—Arrangements for directing or deflecting the discharge along a desired path for centering, aligning or positioning of ray or beam
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/825—Apparatus per se, device per se, or process of making or operating same
- Y10S505/871—Magnetic lens
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Resonance Imaging Apparatus (AREA)
- Electron Beam Exposure (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2307822A DE2307822C3 (de) | 1973-02-16 | 1973-02-16 | Supraleitendes Linsensystem für Korpuskularstrahlung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49115264A true JPS49115264A (ja) | 1974-11-02 |
Family
ID=5872194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49017732A Pending JPS49115264A (ja) | 1973-02-16 | 1974-02-15 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3916201A (ja) |
| JP (1) | JPS49115264A (ja) |
| DE (1) | DE2307822C3 (ja) |
| FR (1) | FR2218651B1 (ja) |
| GB (1) | GB1459281A (ja) |
| NL (1) | NL179247C (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57199945U (ja) * | 1981-06-15 | 1982-12-18 | ||
| JPS6298147U (ja) * | 1985-12-10 | 1987-06-23 | ||
| JPS6433836A (en) * | 1987-07-29 | 1989-02-03 | Shusuke Matsuzawa | Superconductor lens for focusing charged particle |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2541915A1 (de) * | 1975-09-19 | 1977-03-31 | Max Planck Gesellschaft | Korpuskularstrahlenmikroskop mit ringzonensegmentabbildung |
| DE2726195C3 (de) * | 1977-06-10 | 1980-02-21 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Magnetische Objektivlinse für unter Vakuum arbeitende Korpuskularstrahlgeräte, insbesondere Objektivlinse für Elektronenmikroskope |
| JPS5748274Y2 (ja) * | 1977-07-11 | 1982-10-22 | ||
| NL8800344A (nl) * | 1988-02-12 | 1989-09-01 | Philips Nv | Geladen deeltjes bundel apparaat. |
| JPH0760661B2 (ja) * | 1988-07-22 | 1995-06-28 | 株式会社日立製作所 | 電子顕微鏡 |
| US5012104A (en) * | 1990-05-17 | 1991-04-30 | Etec Systems, Inc. | Thermally stable magnetic deflection assembly and method of making same |
| US5264706A (en) * | 1991-04-26 | 1993-11-23 | Fujitsu Limited | Electron beam exposure system having an electromagnetic deflector configured for efficient cooling |
| WO1993005529A1 (en) * | 1991-08-30 | 1993-03-18 | Hitachi, Ltd. | Magnetic electron lens and electron microscope using same |
| US5376792A (en) * | 1993-04-26 | 1994-12-27 | Rj Lee Group, Inc. | Scanning electron microscope |
| US5563415A (en) * | 1995-06-07 | 1996-10-08 | Arch Development Corporation | Magnetic lens apparatus for a low-voltage high-resolution electron microscope |
| US6051839A (en) | 1996-06-07 | 2000-04-18 | Arch Development Corporation | Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes |
| US6046457A (en) * | 1998-01-09 | 2000-04-04 | International Business Machines Corporation | Charged particle beam apparatus having anticontamination means |
| US7345287B2 (en) * | 2005-09-30 | 2008-03-18 | Applied Materials, Inc. | Cooling module for charged particle beam column elements |
| NL2013817C2 (en) * | 2013-11-14 | 2015-07-21 | Mapper Lithography Ip Bv | Multi-electrode electron optics. |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB615257A (en) * | 1946-05-13 | 1949-01-04 | Gerhard Liebmann | Improvements in or relating to electron microscopes and other electronic apparatus employing electron lenses |
| US3008044A (en) * | 1960-02-25 | 1961-11-07 | Gen Electric | Application of superconductivity in guiding charged particles |
| DE1209224B (de) * | 1963-08-16 | 1966-01-20 | Siemens Ag | Magnetische Linsenanordnung fuer an der Pumpe arbeitende Korpuskularstrahlgeraete |
| DE1564714C3 (de) * | 1966-09-21 | 1975-04-24 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Magnetische Linsenanordnung für unter Vakuum arbeitende Korpuskularstrahlgeräte, insbesondere Objektivlinsenanordnung für Elektronenmikroskope |
| GB1234509A (ja) * | 1968-05-31 | 1971-06-03 |
-
1973
- 1973-02-16 DE DE2307822A patent/DE2307822C3/de not_active Expired
- 1973-12-26 FR FR7346251A patent/FR2218651B1/fr not_active Expired
-
1974
- 1974-02-06 NL NLAANVRAGE7401645,A patent/NL179247C/xx not_active IP Right Cessation
- 1974-02-07 US US440332A patent/US3916201A/en not_active Expired - Lifetime
- 1974-02-08 GB GB598874A patent/GB1459281A/en not_active Expired
- 1974-02-15 JP JP49017732A patent/JPS49115264A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57199945U (ja) * | 1981-06-15 | 1982-12-18 | ||
| JPS6338523Y2 (ja) * | 1981-06-15 | 1988-10-11 | ||
| JPS6298147U (ja) * | 1985-12-10 | 1987-06-23 | ||
| JPH0537397Y2 (ja) * | 1985-12-10 | 1993-09-21 | ||
| JPS6433836A (en) * | 1987-07-29 | 1989-02-03 | Shusuke Matsuzawa | Superconductor lens for focusing charged particle |
Also Published As
| Publication number | Publication date |
|---|---|
| NL179247B (nl) | 1986-03-03 |
| FR2218651A1 (ja) | 1974-09-13 |
| NL7401645A (ja) | 1974-08-20 |
| NL179247C (nl) | 1986-08-01 |
| GB1459281A (en) | 1976-12-22 |
| DE2307822B2 (de) | 1981-07-02 |
| FR2218651B1 (ja) | 1977-03-04 |
| DE2307822C3 (de) | 1982-03-18 |
| US3916201A (en) | 1975-10-28 |
| DE2307822A1 (de) | 1974-08-22 |