FR2218651B1 - - Google Patents

Info

Publication number
FR2218651B1
FR2218651B1 FR7346251A FR7346251A FR2218651B1 FR 2218651 B1 FR2218651 B1 FR 2218651B1 FR 7346251 A FR7346251 A FR 7346251A FR 7346251 A FR7346251 A FR 7346251A FR 2218651 B1 FR2218651 B1 FR 2218651B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7346251A
Other versions
FR2218651A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2218651A1 publication Critical patent/FR2218651A1/fr
Application granted granted Critical
Publication of FR2218651B1 publication Critical patent/FR2218651B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H01J37/1416—Electromagnetic lenses with superconducting coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1471—Arrangements for directing or deflecting the discharge along a desired path for centering, aligning or positioning of ray or beam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/871—Magnetic lens

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)
  • Electron Beam Exposure (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
FR7346251A 1973-02-16 1973-12-26 Expired FR2218651B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2307822A DE2307822C3 (de) 1973-02-16 1973-02-16 Supraleitendes Linsensystem für Korpuskularstrahlung

Publications (2)

Publication Number Publication Date
FR2218651A1 FR2218651A1 (fr) 1974-09-13
FR2218651B1 true FR2218651B1 (fr) 1977-03-04

Family

ID=5872194

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7346251A Expired FR2218651B1 (fr) 1973-02-16 1973-12-26

Country Status (6)

Country Link
US (1) US3916201A (fr)
JP (1) JPS49115264A (fr)
DE (1) DE2307822C3 (fr)
FR (1) FR2218651B1 (fr)
GB (1) GB1459281A (fr)
NL (1) NL179247C (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541915A1 (de) * 1975-09-19 1977-03-31 Max Planck Gesellschaft Korpuskularstrahlenmikroskop mit ringzonensegmentabbildung
DE2726195C3 (de) * 1977-06-10 1980-02-21 Siemens Ag, 1000 Berlin Und 8000 Muenchen Magnetische Objektivlinse für unter Vakuum arbeitende Korpuskularstrahlgeräte, insbesondere Objektivlinse für Elektronenmikroskope
JPS5748274Y2 (fr) * 1977-07-11 1982-10-22
JPS6338523Y2 (fr) * 1981-06-15 1988-10-11
JPH0537397Y2 (fr) * 1985-12-10 1993-09-21
JP2611995B2 (ja) * 1987-07-29 1997-05-21 秀典 松沢 荷電粒子収束用超電導体レンズ
NL8800344A (nl) * 1988-02-12 1989-09-01 Philips Nv Geladen deeltjes bundel apparaat.
JPH0760661B2 (ja) * 1988-07-22 1995-06-28 株式会社日立製作所 電子顕微鏡
US5012104A (en) * 1990-05-17 1991-04-30 Etec Systems, Inc. Thermally stable magnetic deflection assembly and method of making same
US5264706A (en) * 1991-04-26 1993-11-23 Fujitsu Limited Electron beam exposure system having an electromagnetic deflector configured for efficient cooling
EP0555492B1 (fr) * 1991-08-30 1998-10-28 Hitachi, Ltd. Lentille electronique magnetique et microscope electronique l'utilisant
US5376792A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Scanning electron microscope
US5563415A (en) * 1995-06-07 1996-10-08 Arch Development Corporation Magnetic lens apparatus for a low-voltage high-resolution electron microscope
US6051839A (en) 1996-06-07 2000-04-18 Arch Development Corporation Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes
US6046457A (en) * 1998-01-09 2000-04-04 International Business Machines Corporation Charged particle beam apparatus having anticontamination means
US7345287B2 (en) * 2005-09-30 2008-03-18 Applied Materials, Inc. Cooling module for charged particle beam column elements
EP3069368B1 (fr) * 2013-11-14 2021-01-06 ASML Netherlands B.V. Agencement de refroidissement d'électrodes

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB615257A (en) * 1946-05-13 1949-01-04 Gerhard Liebmann Improvements in or relating to electron microscopes and other electronic apparatus employing electron lenses
US3008044A (en) * 1960-02-25 1961-11-07 Gen Electric Application of superconductivity in guiding charged particles
DE1209224B (de) * 1963-08-16 1966-01-20 Siemens Ag Magnetische Linsenanordnung fuer an der Pumpe arbeitende Korpuskularstrahlgeraete
DE1564714C3 (de) * 1966-09-21 1975-04-24 Siemens Ag, 1000 Berlin Und 8000 Muenchen Magnetische Linsenanordnung für unter Vakuum arbeitende Korpuskularstrahlgeräte, insbesondere Objektivlinsenanordnung für Elektronenmikroskope
GB1234509A (fr) * 1968-05-31 1971-06-03

Also Published As

Publication number Publication date
NL179247B (nl) 1986-03-03
FR2218651A1 (fr) 1974-09-13
JPS49115264A (fr) 1974-11-02
DE2307822B2 (de) 1981-07-02
GB1459281A (en) 1976-12-22
DE2307822A1 (de) 1974-08-22
DE2307822C3 (de) 1982-03-18
US3916201A (en) 1975-10-28
NL179247C (nl) 1986-08-01
NL7401645A (fr) 1974-08-20

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Legal Events

Date Code Title Description
ST Notification of lapse