GB1430964A - Thermionic emission type electron gun - Google Patents

Thermionic emission type electron gun

Info

Publication number
GB1430964A
GB1430964A GB3093573A GB3093573A GB1430964A GB 1430964 A GB1430964 A GB 1430964A GB 3093573 A GB3093573 A GB 3093573A GB 3093573 A GB3093573 A GB 3093573A GB 1430964 A GB1430964 A GB 1430964A
Authority
GB
United Kingdom
Prior art keywords
electron gun
emission type
type electron
thermionic emission
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3093573A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1430964A publication Critical patent/GB1430964A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB3093573A 1972-08-22 1973-06-28 Thermionic emission type electron gun Expired GB1430964A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47083891A JPS58148B2 (ja) 1972-08-22 1972-08-22 デンシジユウ

Publications (1)

Publication Number Publication Date
GB1430964A true GB1430964A (en) 1976-04-07

Family

ID=13815254

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3093573A Expired GB1430964A (en) 1972-08-22 1973-06-28 Thermionic emission type electron gun

Country Status (4)

Country Link
US (1) US3890533A (enrdf_load_stackoverflow)
JP (1) JPS58148B2 (enrdf_load_stackoverflow)
FR (1) FR2197230B1 (enrdf_load_stackoverflow)
GB (1) GB1430964A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5075765A (enrdf_load_stackoverflow) * 1973-11-06 1975-06-21
JPS576790B2 (enrdf_load_stackoverflow) * 1974-05-13 1982-02-06
JPS57128433A (en) * 1980-12-27 1982-08-10 Denki Kagaku Kogyo Kk High luminance electron gun
US4695773A (en) * 1981-12-18 1987-09-22 The Perkin-Elmer Corporation Field emission gun electrode geometry for improved focus stability
JPS61173443A (ja) * 1985-01-25 1986-08-05 Natl Inst For Res In Inorg Mater 電界放射型電子銃
JPH0648619B2 (ja) * 1989-04-20 1994-06-22 北海道電力株式会社 電子銃装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE434952A (enrdf_load_stackoverflow) * 1938-07-16
US3141993A (en) * 1959-12-24 1964-07-21 Zeiss Jena Veb Carl Very fine beam electron gun
US3185882A (en) * 1961-01-16 1965-05-25 Eitel Mccullough Inc Electron discharge device including cathode-focus electrode assemblies therefor
NL278366A (enrdf_load_stackoverflow) * 1961-05-27
US3383536A (en) * 1964-09-22 1968-05-14 Westinghouse Electric Corp Cathode ray tube generating circular beam by lineal filament critically spaced from circular aperture

Also Published As

Publication number Publication date
DE2336851B2 (de) 1976-08-12
FR2197230B1 (enrdf_load_stackoverflow) 1976-09-17
FR2197230A1 (enrdf_load_stackoverflow) 1974-03-22
US3890533A (en) 1975-06-17
JPS4940475A (enrdf_load_stackoverflow) 1974-04-16
DE2336851A1 (de) 1974-03-21
JPS58148B2 (ja) 1983-01-05

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years

Effective date: 19930627