GB1427733A - Apertured phosphosilicate glass coatings - Google Patents

Apertured phosphosilicate glass coatings

Info

Publication number
GB1427733A
GB1427733A GB2076072A GB2076072A GB1427733A GB 1427733 A GB1427733 A GB 1427733A GB 2076072 A GB2076072 A GB 2076072A GB 2076072 A GB2076072 A GB 2076072A GB 1427733 A GB1427733 A GB 1427733A
Authority
GB
United Kingdom
Prior art keywords
layer
substrate
phosphosilicate glass
apertured
mixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2076072A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MULLAR Ltd
Original Assignee
MULLAR Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MULLAR Ltd filed Critical MULLAR Ltd
Priority to GB2076072A priority Critical patent/GB1427733A/en
Priority to US324394A priority patent/US3877980A/en
Priority to IT67071/73A priority patent/IT977622B/en
Priority to DE2302148A priority patent/DE2302148C2/en
Priority to JP826173A priority patent/JPS5718340B2/ja
Priority to FR7301693A priority patent/FR2173949B1/fr
Publication of GB1427733A publication Critical patent/GB1427733A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Silicon Polymers (AREA)

Abstract

1427733 Phosphosilicate glass coatings MULLARD Ltd 18 July 1973 [4 May 1972] 20760/72 Heading C1M An apertured phosphosilicate glass layer on a substrate is formed by forming a layer 2 comprising a siloxane mixture (defined below) on a substrate 1 (e.g. a silicon slice), irradiating the layer, using an electron beam, in a pattern corresponding to the apertures required (e.g. using a mask 3), washing the layer with a solvent to remove unirradiated areas of the layer, reacting the irradiated portions remaining with phosphorus halide or phosphorus oxyhalide until a phosphosilicate glass layer 4 is formed which contains 1-15 atoms of P per 100 atoms of Si, then heating the glass-coated substrate in wet oxygen at 600-700‹ C., and then in an atmosphere (e.g. dry N 2 ) inert to silicon at 700-850‹ C., and then at 1000-1100‹ C. The siloxane mixture is a mixture of the compounds and some of the units of the latter being replaced by units of the form In the formula* n is 1-6 and R is methyl, ethyl or vinyl. The phosphorus oxyhalide is preferably POCl 3 . The reaction with the phosphorus oxyhalide may be carried out in dry N 2 at 50-150‹ C. An apertured silica layer may be initially provided on the substrate. The electron beam irradiation may be carried out in an O 2 -containing atmosphere, at an electron energy of 3-25 kV., with a charge density of 75-1200 ÁC./cm.<SP>2</SP>. Unirradiated siloxane mixture may be washed off using acetone. The silicon slice may be initially prepared by oxidizing the slice, immersing in hydrofluoric acid and then in a solution comprising concentrated sulphuric acid and hydrogen peroxide, washing with water and drying.
GB2076072A 1972-01-18 1972-05-04 Apertured phosphosilicate glass coatings Expired GB1427733A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB2076072A GB1427733A (en) 1972-05-04 1972-05-04 Apertured phosphosilicate glass coatings
US324394A US3877980A (en) 1972-01-18 1973-01-17 Methods of producing phosphosilicate glass patterns
IT67071/73A IT977622B (en) 1972-01-18 1973-01-17 PROCEDURE FOR PRODUCING A PHOSPHOLIC GLASS DESIGN LAYER ON A SUBSTRATE, PARTICULARLY IN APPLICATION TO SEMI-CONDUCTIVE DEVICES
DE2302148A DE2302148C2 (en) 1972-01-18 1973-01-17 Method of making a phosphosilicate glass sheet pattern
JP826173A JPS5718340B2 (en) 1972-01-18 1973-01-18
FR7301693A FR2173949B1 (en) 1972-01-18 1973-01-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2076072A GB1427733A (en) 1972-05-04 1972-05-04 Apertured phosphosilicate glass coatings

Publications (1)

Publication Number Publication Date
GB1427733A true GB1427733A (en) 1976-03-10

Family

ID=10151203

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2076072A Expired GB1427733A (en) 1972-01-18 1972-05-04 Apertured phosphosilicate glass coatings

Country Status (1)

Country Link
GB (1) GB1427733A (en)

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee