GB1422398A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
GB1422398A
GB1422398A GB472373A GB472373A GB1422398A GB 1422398 A GB1422398 A GB 1422398A GB 472373 A GB472373 A GB 472373A GB 472373 A GB472373 A GB 472373A GB 1422398 A GB1422398 A GB 1422398A
Authority
GB
United Kingdom
Prior art keywords
detector
lens
coil
deflection
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB472373A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1422398A publication Critical patent/GB1422398A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB472373A 1972-10-23 1973-01-30 Scanning electron microscope Expired GB1422398A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47105931A JPS5138578B2 (enrdf_load_stackoverflow) 1972-10-23 1972-10-23

Publications (1)

Publication Number Publication Date
GB1422398A true GB1422398A (en) 1976-01-28

Family

ID=14420585

Family Applications (1)

Application Number Title Priority Date Filing Date
GB472373A Expired GB1422398A (en) 1972-10-23 1973-01-30 Scanning electron microscope

Country Status (4)

Country Link
US (1) US3849647A (enrdf_load_stackoverflow)
JP (1) JPS5138578B2 (enrdf_load_stackoverflow)
DE (1) DE2302689A1 (enrdf_load_stackoverflow)
GB (1) GB1422398A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2652273C2 (de) * 1976-11-12 1978-11-02 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur bildlichen Darstellung eines Beugungsbildes bei einem Durchstrahlungs-Raster-Korpuskularstrahlmikroskop
NL175245C (nl) * 1977-05-26 1984-10-01 Philips Nv Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor.
US4427886A (en) 1982-08-02 1984-01-24 Wisconsin Alumni Research Foundation Low voltage field emission electron gun
JPS6080655U (ja) * 1983-11-08 1985-06-04 日本電子株式会社 電子顕微鏡のシヤツタ−装置
JP2917697B2 (ja) * 1992-09-17 1999-07-12 株式会社日立製作所 透過電子顕微鏡
EP1665321B1 (en) * 2003-09-02 2009-11-11 Nanomegas SPRL A method for measuring diffraction patterns from a transmission electron microscopy to determine crystal structures and a device therefor
CN103797420A (zh) * 2011-09-12 2014-05-14 迈普尔平版印刷Ip有限公司 具有基底板的真空腔室
EP2899744A1 (en) * 2014-01-24 2015-07-29 Carl Zeiss Microscopy GmbH Method for preparing and analyzing an object as well as particle beam device for performing the method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2438971A (en) * 1946-10-31 1948-04-06 Rca Corp Compound electron objective lens
NL265945A (enrdf_load_stackoverflow) * 1960-06-18
GB990239A (en) * 1961-08-17 1965-04-28 Christopher William Baisley Gr Improvements in measuring systems for electron diffraction patterns
US3225192A (en) * 1962-12-28 1965-12-21 Hitachi Ltd Apparatus for producing electron microscope and diffraction images separately and simultaneously on the image plane
US3370168A (en) * 1964-01-14 1968-02-20 Hitachi Ltd Anode aperture plate for a television camera tube in an electron microscope comprising a stainless steel foil
DE1614126B1 (de) * 1967-02-27 1970-11-19 Max Planck Gesellschaft Korpuskularstrahlmikroskop,insbesondere Elektronenmikroskop,mit einer durch das Vorfeld einer Objektivlinse gebildeten Kondensorlinse und einer Bereichsblende
US3502870A (en) * 1967-07-05 1970-03-24 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device
DE1804199C3 (de) * 1968-03-26 1975-12-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Korpuskularstrahlgerät zur wahlweisen Abbildung eines Präparates oder seines Beugungsdiagrammes
GB1238889A (enrdf_load_stackoverflow) * 1968-11-26 1971-07-14

Also Published As

Publication number Publication date
US3849647A (en) 1974-11-19
DE2302689A1 (de) 1974-05-09
DE2302689B2 (enrdf_load_stackoverflow) 1979-02-08
JPS5138578B2 (enrdf_load_stackoverflow) 1976-10-22
JPS4964365A (enrdf_load_stackoverflow) 1974-06-21

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years

Effective date: 19930128