JPS5138578B2 - - Google Patents

Info

Publication number
JPS5138578B2
JPS5138578B2 JP47105931A JP10593172A JPS5138578B2 JP S5138578 B2 JPS5138578 B2 JP S5138578B2 JP 47105931 A JP47105931 A JP 47105931A JP 10593172 A JP10593172 A JP 10593172A JP S5138578 B2 JPS5138578 B2 JP S5138578B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47105931A
Other languages
Japanese (ja)
Other versions
JPS4964365A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47105931A priority Critical patent/JPS5138578B2/ja
Priority to DE2302689A priority patent/DE2302689A1/de
Priority to US00327615A priority patent/US3849647A/en
Priority to GB472373A priority patent/GB1422398A/en
Publication of JPS4964365A publication Critical patent/JPS4964365A/ja
Publication of JPS5138578B2 publication Critical patent/JPS5138578B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP47105931A 1972-10-23 1972-10-23 Expired JPS5138578B2 (enrdf_load_stackoverflow)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP47105931A JPS5138578B2 (enrdf_load_stackoverflow) 1972-10-23 1972-10-23
DE2302689A DE2302689A1 (de) 1972-10-23 1973-01-19 Elektronenmikroskop
US00327615A US3849647A (en) 1972-10-23 1973-01-22 Scanning electron microscope
GB472373A GB1422398A (en) 1972-10-23 1973-01-30 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47105931A JPS5138578B2 (enrdf_load_stackoverflow) 1972-10-23 1972-10-23

Publications (2)

Publication Number Publication Date
JPS4964365A JPS4964365A (enrdf_load_stackoverflow) 1974-06-21
JPS5138578B2 true JPS5138578B2 (enrdf_load_stackoverflow) 1976-10-22

Family

ID=14420585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47105931A Expired JPS5138578B2 (enrdf_load_stackoverflow) 1972-10-23 1972-10-23

Country Status (4)

Country Link
US (1) US3849647A (enrdf_load_stackoverflow)
JP (1) JPS5138578B2 (enrdf_load_stackoverflow)
DE (1) DE2302689A1 (enrdf_load_stackoverflow)
GB (1) GB1422398A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2652273C2 (de) * 1976-11-12 1978-11-02 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur bildlichen Darstellung eines Beugungsbildes bei einem Durchstrahlungs-Raster-Korpuskularstrahlmikroskop
NL175245C (nl) * 1977-05-26 1984-10-01 Philips Nv Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor.
US4427886A (en) 1982-08-02 1984-01-24 Wisconsin Alumni Research Foundation Low voltage field emission electron gun
JPS6080655U (ja) * 1983-11-08 1985-06-04 日本電子株式会社 電子顕微鏡のシヤツタ−装置
JP2917697B2 (ja) * 1992-09-17 1999-07-12 株式会社日立製作所 透過電子顕微鏡
EP1665321B1 (en) * 2003-09-02 2009-11-11 Nanomegas SPRL A method for measuring diffraction patterns from a transmission electron microscopy to determine crystal structures and a device therefor
CN103797420A (zh) * 2011-09-12 2014-05-14 迈普尔平版印刷Ip有限公司 具有基底板的真空腔室
EP2899744A1 (en) * 2014-01-24 2015-07-29 Carl Zeiss Microscopy GmbH Method for preparing and analyzing an object as well as particle beam device for performing the method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2438971A (en) * 1946-10-31 1948-04-06 Rca Corp Compound electron objective lens
NL265945A (enrdf_load_stackoverflow) * 1960-06-18
GB990239A (en) * 1961-08-17 1965-04-28 Christopher William Baisley Gr Improvements in measuring systems for electron diffraction patterns
US3225192A (en) * 1962-12-28 1965-12-21 Hitachi Ltd Apparatus for producing electron microscope and diffraction images separately and simultaneously on the image plane
US3370168A (en) * 1964-01-14 1968-02-20 Hitachi Ltd Anode aperture plate for a television camera tube in an electron microscope comprising a stainless steel foil
DE1614126B1 (de) * 1967-02-27 1970-11-19 Max Planck Gesellschaft Korpuskularstrahlmikroskop,insbesondere Elektronenmikroskop,mit einer durch das Vorfeld einer Objektivlinse gebildeten Kondensorlinse und einer Bereichsblende
US3502870A (en) * 1967-07-05 1970-03-24 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device
DE1804199C3 (de) * 1968-03-26 1975-12-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Korpuskularstrahlgerät zur wahlweisen Abbildung eines Präparates oder seines Beugungsdiagrammes
GB1238889A (enrdf_load_stackoverflow) * 1968-11-26 1971-07-14

Also Published As

Publication number Publication date
US3849647A (en) 1974-11-19
DE2302689A1 (de) 1974-05-09
DE2302689B2 (enrdf_load_stackoverflow) 1979-02-08
JPS4964365A (enrdf_load_stackoverflow) 1974-06-21
GB1422398A (en) 1976-01-28

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