GB1411428A - Ion sources - Google Patents

Ion sources

Info

Publication number
GB1411428A
GB1411428A GB4708572A GB4708572A GB1411428A GB 1411428 A GB1411428 A GB 1411428A GB 4708572 A GB4708572 A GB 4708572A GB 4708572 A GB4708572 A GB 4708572A GB 1411428 A GB1411428 A GB 1411428A
Authority
GB
United Kingdom
Prior art keywords
electrode
anode
arc
produced
orifice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4708572A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Publication of GB1411428A publication Critical patent/GB1411428A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
GB4708572A 1971-10-13 1972-10-12 Ion sources Expired GB1411428A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7136701A FR2156978A5 (fr) 1971-10-13 1971-10-13

Publications (1)

Publication Number Publication Date
GB1411428A true GB1411428A (en) 1975-10-22

Family

ID=9084273

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4708572A Expired GB1411428A (en) 1971-10-13 1972-10-12 Ion sources

Country Status (5)

Country Link
US (1) US3890535A (fr)
DE (1) DE2249999A1 (fr)
FR (1) FR2156978A5 (fr)
GB (1) GB1411428A (fr)
NL (1) NL7213791A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2146836A (en) * 1983-08-12 1985-04-24 Centre Nat Rech Scient A source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4045677A (en) * 1976-06-11 1977-08-30 Cornell Research Foundation, Inc. Intense ion beam generator
US4301391A (en) * 1979-04-26 1981-11-17 Hughes Aircraft Company Dual discharge plasma device
USRE34806E (en) * 1980-11-25 1994-12-13 Celestech, Inc. Magnetoplasmadynamic processor, applications thereof and methods
JPS58225537A (ja) * 1982-06-25 1983-12-27 Hitachi Ltd イオン源装置
US4529571A (en) * 1982-10-27 1985-07-16 The United States Of America As Represented By The United States Department Of Energy Single-ring magnetic cusp low gas pressure ion source
US4587430A (en) * 1983-02-10 1986-05-06 Mission Research Corporation Ion implantation source and device
US4620095A (en) * 1984-01-18 1986-10-28 Miziolek Andrzej W Ion neutralization resonance emission elemental detector
US5838012A (en) * 1997-03-19 1998-11-17 Genus, Inc. Charge exchange cell
US7838850B2 (en) * 1999-12-13 2010-11-23 Semequip, Inc. External cathode ion source

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285354A (fr) * 1961-12-11
US3238414A (en) * 1965-07-28 1966-03-01 George G Kelley High output duoplasmatron-type ion source
FR1585902A (fr) * 1968-04-09 1970-02-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2146836A (en) * 1983-08-12 1985-04-24 Centre Nat Rech Scient A source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams

Also Published As

Publication number Publication date
FR2156978A5 (fr) 1973-06-01
DE2249999A1 (de) 1973-04-19
US3890535A (en) 1975-06-17
NL7213791A (fr) 1973-04-17

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee