GB1402700A - Method of and apparatus for producing a colour display of the surface of a solid body - Google Patents

Method of and apparatus for producing a colour display of the surface of a solid body

Info

Publication number
GB1402700A
GB1402700A GB5285073A GB5285073A GB1402700A GB 1402700 A GB1402700 A GB 1402700A GB 5285073 A GB5285073 A GB 5285073A GB 5285073 A GB5285073 A GB 5285073A GB 1402700 A GB1402700 A GB 1402700A
Authority
GB
United Kingdom
Prior art keywords
radiation
emitted
ray tube
cathode
nov
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5285073A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oesterreichische Studiengesellschaft fuer Atomenergie GmbH
Original Assignee
Oesterreichische Studiengesellschaft fuer Atomenergie GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterreichische Studiengesellschaft fuer Atomenergie GmbH filed Critical Oesterreichische Studiengesellschaft fuer Atomenergie GmbH
Publication of GB1402700A publication Critical patent/GB1402700A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/244Detectors; Associated components or circuits therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/22Optical or photographic arrangements associated with the tube
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/22Optical or photographic arrangements associated with the tube
    • H01J37/226Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244Detection characterized by the detecting means
    • H01J2237/2445Photon detectors for X-rays, light, e.g. photomultipliers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/28Scanning microscopes
    • H01J2237/2803Scanning microscopes characterised by the imaging method
    • H01J2237/2808Cathodoluminescence

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Video Image Reproduction Devices For Color Tv Systems (AREA)

Abstract

1402700 Electron microscopes OSTERREICHISCHE STUDIENGESELLSCHAFT FUR ATOMENERGIE GmbH 14 Nov 1973 [14 Nov 1972] 52850/73 Heading H1D [Also in Division H4] Radiation emitted by an object bombarded by electrons in a scanning electron microscope is passed via a light pipe 1 to three filters 2a, 2b, 2c, which pass separate wavelength ranges of the emitted radiation to respective photomultipliers 3a, 3b, 3c, the outputs from which are passed to a colour cathode-ray tube to produce a coloured image of the radiation emitted by the object. The emitted radiation may be visible or ultraviolet radiation. The colour cathode-ray tube may be a three beam cathoderay tube; alternatively it may be a cathode-ray tube having one beam, the controlling signals being fed to a grid thereof.
GB5285073A 1972-11-14 1973-11-14 Method of and apparatus for producing a colour display of the surface of a solid body Expired GB1402700A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT967472A AT317313B (en) 1972-11-14 1972-11-14 Process for generating color images of surfaces using the scanning electron microscope

Publications (1)

Publication Number Publication Date
GB1402700A true GB1402700A (en) 1975-08-13

Family

ID=3616273

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5285073A Expired GB1402700A (en) 1972-11-14 1973-11-14 Method of and apparatus for producing a colour display of the surface of a solid body

Country Status (4)

Country Link
JP (1) JPS5063876A (en)
AT (1) AT317313B (en)
DE (1) DE2356425C3 (en)
GB (1) GB1402700A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1983000921A1 (en) * 1981-09-01 1983-03-17 Antonovsky, Ariel, David Method and apparatus for image formation

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2832987B2 (en) * 1989-02-27 1998-12-09 株式会社島津製作所 Color display of measurement results

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1983000921A1 (en) * 1981-09-01 1983-03-17 Antonovsky, Ariel, David Method and apparatus for image formation

Also Published As

Publication number Publication date
DE2356425B2 (en) 1975-04-17
JPS5063876A (en) 1975-05-30
AT317313B (en) 1974-08-26
DE2356425A1 (en) 1974-05-30
DE2356425C3 (en) 1975-12-04

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee