GB1402700A - Method of and apparatus for producing a colour display of the surface of a solid body - Google Patents
Method of and apparatus for producing a colour display of the surface of a solid bodyInfo
- Publication number
- GB1402700A GB1402700A GB5285073A GB5285073A GB1402700A GB 1402700 A GB1402700 A GB 1402700A GB 5285073 A GB5285073 A GB 5285073A GB 5285073 A GB5285073 A GB 5285073A GB 1402700 A GB1402700 A GB 1402700A
- Authority
- GB
- United Kingdom
- Prior art keywords
- radiation
- emitted
- ray tube
- cathode
- nov
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2808—Cathodoluminescence
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Video Image Reproduction Devices For Color Tv Systems (AREA)
Abstract
1402700 Electron microscopes OSTERREICHISCHE STUDIENGESELLSCHAFT FUR ATOMENERGIE GmbH 14 Nov 1973 [14 Nov 1972] 52850/73 Heading H1D [Also in Division H4] Radiation emitted by an object bombarded by electrons in a scanning electron microscope is passed via a light pipe 1 to three filters 2a, 2b, 2c, which pass separate wavelength ranges of the emitted radiation to respective photomultipliers 3a, 3b, 3c, the outputs from which are passed to a colour cathode-ray tube to produce a coloured image of the radiation emitted by the object. The emitted radiation may be visible or ultraviolet radiation. The colour cathode-ray tube may be a three beam cathoderay tube; alternatively it may be a cathode-ray tube having one beam, the controlling signals being fed to a grid thereof.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT967472A AT317313B (en) | 1972-11-14 | 1972-11-14 | Process for generating color images of surfaces using the scanning electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1402700A true GB1402700A (en) | 1975-08-13 |
Family
ID=3616273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5285073A Expired GB1402700A (en) | 1972-11-14 | 1973-11-14 | Method of and apparatus for producing a colour display of the surface of a solid body |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5063876A (en) |
AT (1) | AT317313B (en) |
DE (1) | DE2356425C3 (en) |
GB (1) | GB1402700A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1983000921A1 (en) * | 1981-09-01 | 1983-03-17 | Antonovsky, Ariel, David | Method and apparatus for image formation |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2832987B2 (en) * | 1989-02-27 | 1998-12-09 | 株式会社島津製作所 | Color display of measurement results |
-
1972
- 1972-11-14 AT AT967472A patent/AT317313B/en not_active IP Right Cessation
-
1973
- 1973-11-12 DE DE19732356425 patent/DE2356425C3/en not_active Expired
- 1973-11-14 JP JP12815173A patent/JPS5063876A/ja active Pending
- 1973-11-14 GB GB5285073A patent/GB1402700A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1983000921A1 (en) * | 1981-09-01 | 1983-03-17 | Antonovsky, Ariel, David | Method and apparatus for image formation |
Also Published As
Publication number | Publication date |
---|---|
DE2356425B2 (en) | 1975-04-17 |
JPS5063876A (en) | 1975-05-30 |
AT317313B (en) | 1974-08-26 |
DE2356425A1 (en) | 1974-05-30 |
DE2356425C3 (en) | 1975-12-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |