DE2356425B2 - Process for generating color images of surfaces of solid bodies using the scanning electron microscope - Google Patents
Process for generating color images of surfaces of solid bodies using the scanning electron microscopeInfo
- Publication number
- DE2356425B2 DE2356425B2 DE19732356425 DE2356425A DE2356425B2 DE 2356425 B2 DE2356425 B2 DE 2356425B2 DE 19732356425 DE19732356425 DE 19732356425 DE 2356425 A DE2356425 A DE 2356425A DE 2356425 B2 DE2356425 B2 DE 2356425B2
- Authority
- DE
- Germany
- Prior art keywords
- electron microscope
- scanning electron
- color images
- solid bodies
- generating color
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2808—Cathodoluminescence
Description
Die Erfindung betrifft ein Verfahren zur Erzeugung von Farbbildern von Oberflächen fester Körper unter Verwendung des Rasterelektronenmikroskops.The invention relates to a method for generating color images of surfaces of solid bodies underneath Using the scanning electron microscope.
Bisher wurden Oberflächen von Materialien, die beim Auftreffen von Elektronen elektromagnetische Strahlung emittieren, mit Hilfe dieser Strahlung in der Weise mit dem Rasterelektronenmikroskop untersucht, daß die Intensität der gesamten Strahlung oder die Intensität der in einem einzigen herausgegriffenen Wellenlängenbereich existierenden Strahlung zur Modulation des Elektronenstahls der Bildröhre herangezogen wurde. Dabei wurden auch mittels mehrerer Detektoren für die elektromagnetische Strahlung mehrere verschiedene Bilder der Oberfläche auf mehreren Bildröhren gleichzeitig erzeugt (US-PS 32 35 727).So far, surfaces of materials that are electromagnetic when they hit electrons Emit radiation, examined with the help of this radiation in the way with the scanning electron microscope, that the intensity of the entire radiation or the intensity of a single selected wavelength range existing radiation is used to modulate the electron beam of the picture tube became. Several different detectors for the electromagnetic radiation were also detected by means of several detectors Images of the surface generated simultaneously on several picture tubes (US-PS 32 35 727).
Der Erfindung liegt die Aufgabe zugrunde, ein Verfahren zum Erzeugen von Farbbildern solcher Oberflächen anzugeben.The invention is based on the object of a method for generating color images of such surfaces to specify.
Diese Aufgabe wird erfindungsgemäß dadurch gelöst, daß aus dem bei Elektronenbeschuß emittierten elektromagnetischen Spektrum die Intensität der Strahlung in drei begrenzten Wellenlängenbereichen getrennt gleichzeitig erfaßt und die diesen Intensitäten korrespondierenden elektrischen Signale zur Modulation der drei Elektronenstrahlen einer Dreistrahl-Farbbildröhre bzw. zur Steuerung der Gitter einer Einstrahl-Farbbildröhre verwendet werden. Die drei Wellenlängenbereiche werden für den Fall, daß es sich um eine Emission im sichtbaren Spektralgebiet handelt, beispielsweise so gewählt, daß sie den drei Spektralbe-According to the invention, this object is achieved in that the emitted upon electron bombardment electromagnetic spectrum the intensity of the radiation in three limited wavelength ranges detected separately at the same time and the electrical signals corresponding to these intensities for modulation the three electron beams of a three-beam color picture tube or to control the grids of a single-beam color picture tube be used. The three wavelength ranges are used in the event that it is an emission in the visible spectral region is involved, for example chosen so that it corresponds to the three spectral regions
reichen einer handelsüblichen Farbbildröhre entsprechen. Auf diese Weise ist es möglich, auf einem Farbbildschirm ein vergrößertes Farbbild der zum Leuchten angeregten Oberfläche der zu untersuchenden Probe zu erhalten. Dieses vergrößerte Bild hat eine gewisserange from a standard color picture tube. In this way it is possible on a color screen an enlarged color image of the excited surface of the sample to be examined to obtain. There is something about this enlarged image
ίο Ähnlichkeit mit dem Bild, das mittels eines Lichtmikroskops zu bekommen wäre, unterscheidet sich jedoch ganz wesentlich von diesem durchίο Similarity to the image taken using a light microscope could be obtained, however, differs quite significantly from this through
1. die um mehr als eine Größenordnung bessere Auflösung von Objektdetails (etwa 200 X Punktauflö-1. the more than an order of magnitude better resolution of object details (approx. 200 X point resolution
sung bei den gegenwärtig handelsüblichen Rastermikroskopen) undsolution with the currently commercially available scanning microscopes) and
2. durch die ebenfalls um etwa zwei Größenordnungen bessere Schärfentiefe.2. due to the depth of field, which is also around two orders of magnitude better.
Falls eine Emission in einem nicht sichtbaren Spektralgebiet auftritt wäre ebenfalls durch geeignete Wahl von drei Wellenlängenbereichen die Abbildung in Form eines Farbbildes möglich, jedoch würden die auftretenden Farben dann eben unsichtbaren Wellenlängen entsprechen.If an emission occurs in an invisible spectral region, this would also be a suitable choice of three wavelength ranges the image in the form of a color image is possible, but the occurring Colors then correspond to invisible wavelengths.
Geeignete Vorrichtungen für die Sammlung, Leitung, spektrale Aufspaltung und Intensitätsmessung der von
der zu untersuchenden Probe emittierten elektromagnetischen Strahlung sind bekannt.
In der Zeichnung ist schematisch ein Ausführungsbeispiel einer Vorrichtung zur Durchführung des erfindungsgemäßen
Verfahrens gezeigt, und zwar wenn es sich bei der emittierten elektromagnetischen Strahlung
um Licht im sichtbaren und ultravioletten Spektralbereich handelt.Suitable devices for collecting, conducting, spectral splitting and measuring the intensity of the electromagnetic radiation emitted by the sample to be examined are known.
In the drawing, an embodiment of a device for carrying out the method according to the invention is shown schematically, specifically when the emitted electromagnetic radiation is light in the visible and ultraviolet spectral range.
Über einen Lichtleiter 1 wird das von der Probe emitiierte Licht zu den drei Detektoren 3a, Zb und 3c gebracht. Diese Detektoren können z. B. Photovervielfacher sein. Vor den Detektoren sind Interferenzfilter 2a, 2b 'jnd 2c eingeschoben, die nur schmale Teile des gesamten Emissionsspektrums durchlassen.The light emitted by the sample is brought to the three detectors 3a, Zb and 3c via a light guide 1. These detectors can e.g. B. be photomultiplier. Interference filters 2a, 2b 'and 2c are inserted in front of the detectors and only allow narrow parts of the entire emission spectrum to pass through.
Anstatt einer Farbbildröhre mit drei Elektronenstrahlen ist es natürlich auch möglich, eine Einstrahl-Farbbildröhre zu verwenden und die den Intensitäten entsprechenden elektrischen Signale zur Steuerung der dann vorhandenen Ablenkgitter zu verwenden.Instead of a color picture tube with three electron beams, it is of course also possible to use a single-beam color picture tube to use and the electrical signals corresponding to the intensities to control the then use existing deflection grille.
Hierzu 1 Blatt Zeichnungen1 sheet of drawings
Claims (1)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT967472A AT317313B (en) | 1972-11-14 | 1972-11-14 | Process for generating color images of surfaces using the scanning electron microscope |
Publications (3)
Publication Number | Publication Date |
---|---|
DE2356425A1 DE2356425A1 (en) | 1974-05-30 |
DE2356425B2 true DE2356425B2 (en) | 1975-04-17 |
DE2356425C3 DE2356425C3 (en) | 1975-12-04 |
Family
ID=3616273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19732356425 Expired DE2356425C3 (en) | 1972-11-14 | 1973-11-12 | Process for generating color images of surfaces of solid bodies using the scanning electron microscope |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5063876A (en) |
AT (1) | AT317313B (en) |
DE (1) | DE2356425C3 (en) |
GB (1) | GB1402700A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1983000921A1 (en) * | 1981-09-01 | 1983-03-17 | Antonovsky, Ariel, David | Method and apparatus for image formation |
JP2832987B2 (en) * | 1989-02-27 | 1998-12-09 | 株式会社島津製作所 | Color display of measurement results |
-
1972
- 1972-11-14 AT AT967472A patent/AT317313B/en not_active IP Right Cessation
-
1973
- 1973-11-12 DE DE19732356425 patent/DE2356425C3/en not_active Expired
- 1973-11-14 JP JP12815173A patent/JPS5063876A/ja active Pending
- 1973-11-14 GB GB5285073A patent/GB1402700A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB1402700A (en) | 1975-08-13 |
JPS5063876A (en) | 1975-05-30 |
DE2356425A1 (en) | 1974-05-30 |
AT317313B (en) | 1974-08-26 |
DE2356425C3 (en) | 1975-12-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C3 | Grant after two publication steps (3rd publication) | ||
E77 | Valid patent as to the heymanns-index 1977 | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: OESTERREICHISCHES FORSCHUNGSZENTRUM SEIBERSDORF GM |
|
8328 | Change in the person/name/address of the agent |
Free format text: BOEHMERT, A., DIPL.-ING. HOORMANN, W., DIPL.-ING. DR.-ING. GODDAR, H., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW. STAHLBERG, W. KUNTZE, W., RECHTSANW., 2800 BREMEN |
|
8339 | Ceased/non-payment of the annual fee |