AT317313B - Process for generating color images of surfaces using the scanning electron microscope - Google Patents

Process for generating color images of surfaces using the scanning electron microscope

Info

Publication number
AT317313B
AT317313B AT967472A AT967472A AT317313B AT 317313 B AT317313 B AT 317313B AT 967472 A AT967472 A AT 967472A AT 967472 A AT967472 A AT 967472A AT 317313 B AT317313 B AT 317313B
Authority
AT
Austria
Prior art keywords
electron microscope
scanning electron
color images
generating color
generating
Prior art date
Application number
AT967472A
Other languages
German (de)
Inventor
Erwin Hoerl Dr
Peter Koss Dr
Heinz Maerkl Ing
Original Assignee
Oesterr Studien Atomenergie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterr Studien Atomenergie filed Critical Oesterr Studien Atomenergie
Priority to AT967472A priority Critical patent/AT317313B/en
Priority to DE19732356425 priority patent/DE2356425C3/en
Priority to GB5285073A priority patent/GB1402700A/en
Priority to JP12815173A priority patent/JPS5063876A/ja
Application granted granted Critical
Publication of AT317313B publication Critical patent/AT317313B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2808—Cathodoluminescence
AT967472A 1972-11-14 1972-11-14 Process for generating color images of surfaces using the scanning electron microscope AT317313B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AT967472A AT317313B (en) 1972-11-14 1972-11-14 Process for generating color images of surfaces using the scanning electron microscope
DE19732356425 DE2356425C3 (en) 1972-11-14 1973-11-12 Process for generating color images of surfaces of solid bodies using the scanning electron microscope
GB5285073A GB1402700A (en) 1972-11-14 1973-11-14 Method of and apparatus for producing a colour display of the surface of a solid body
JP12815173A JPS5063876A (en) 1972-11-14 1973-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT967472A AT317313B (en) 1972-11-14 1972-11-14 Process for generating color images of surfaces using the scanning electron microscope

Publications (1)

Publication Number Publication Date
AT317313B true AT317313B (en) 1974-08-26

Family

ID=3616273

Family Applications (1)

Application Number Title Priority Date Filing Date
AT967472A AT317313B (en) 1972-11-14 1972-11-14 Process for generating color images of surfaces using the scanning electron microscope

Country Status (4)

Country Link
JP (1) JPS5063876A (en)
AT (1) AT317313B (en)
DE (1) DE2356425C3 (en)
GB (1) GB1402700A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4560872A (en) * 1981-09-01 1985-12-24 Commonwealth Scientific And Industrial Research Organization Method and apparatus for image formation
JP2832987B2 (en) * 1989-02-27 1998-12-09 株式会社島津製作所 Color display of measurement results

Also Published As

Publication number Publication date
DE2356425C3 (en) 1975-12-04
DE2356425A1 (en) 1974-05-30
JPS5063876A (en) 1975-05-30
GB1402700A (en) 1975-08-13
DE2356425B2 (en) 1975-04-17

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Legal Events

Date Code Title Description
EFA Change in the company name
ELJ Ceased due to non-payment of the annual fee