AT317313B - Process for generating color images of surfaces using the scanning electron microscope - Google Patents

Process for generating color images of surfaces using the scanning electron microscope

Info

Publication number
AT317313B
AT317313B AT967472A AT967472A AT317313B AT 317313 B AT317313 B AT 317313B AT 967472 A AT967472 A AT 967472A AT 967472 A AT967472 A AT 967472A AT 317313 B AT317313 B AT 317313B
Authority
AT
Austria
Prior art keywords
electron microscope
scanning electron
color images
generating color
generating
Prior art date
Application number
AT967472A
Other languages
German (de)
Inventor
Erwin Hoerl Dr
Peter Koss Dr
Heinz Maerkl Ing
Original Assignee
Oesterr Studien Atomenergie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterr Studien Atomenergie filed Critical Oesterr Studien Atomenergie
Priority to AT967472A priority Critical patent/AT317313B/en
Priority to DE19732356425 priority patent/DE2356425C3/en
Priority to JP12815173A priority patent/JPS5063876A/ja
Priority to GB5285073A priority patent/GB1402700A/en
Application granted granted Critical
Publication of AT317313B publication Critical patent/AT317313B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2808—Cathodoluminescence

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Video Image Reproduction Devices For Color Tv Systems (AREA)
AT967472A 1972-11-14 1972-11-14 Process for generating color images of surfaces using the scanning electron microscope AT317313B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AT967472A AT317313B (en) 1972-11-14 1972-11-14 Process for generating color images of surfaces using the scanning electron microscope
DE19732356425 DE2356425C3 (en) 1972-11-14 1973-11-12 Process for generating color images of surfaces of solid bodies using the scanning electron microscope
JP12815173A JPS5063876A (en) 1972-11-14 1973-11-14
GB5285073A GB1402700A (en) 1972-11-14 1973-11-14 Method of and apparatus for producing a colour display of the surface of a solid body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT967472A AT317313B (en) 1972-11-14 1972-11-14 Process for generating color images of surfaces using the scanning electron microscope

Publications (1)

Publication Number Publication Date
AT317313B true AT317313B (en) 1974-08-26

Family

ID=3616273

Family Applications (1)

Application Number Title Priority Date Filing Date
AT967472A AT317313B (en) 1972-11-14 1972-11-14 Process for generating color images of surfaces using the scanning electron microscope

Country Status (4)

Country Link
JP (1) JPS5063876A (en)
AT (1) AT317313B (en)
DE (1) DE2356425C3 (en)
GB (1) GB1402700A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8220304A (en) * 1981-09-01 1983-07-01 Commw Scient Ind Res Org METHOD AND DEVICE FOR IMAGING.
JP2832987B2 (en) * 1989-02-27 1998-12-09 株式会社島津製作所 Color display of measurement results

Also Published As

Publication number Publication date
DE2356425A1 (en) 1974-05-30
DE2356425C3 (en) 1975-12-04
DE2356425B2 (en) 1975-04-17
GB1402700A (en) 1975-08-13
JPS5063876A (en) 1975-05-30

Similar Documents

Publication Publication Date Title
AT321109B (en) Process for producing color images and treatment solutions for carrying out this process
AT341504B (en) PROCESS FOR PRODUCING ALFA-ARYLPROPIONIC ACIDS
CH558351A (en) PROCESS FOR PRODUCING DIBENZYLAMINOFLUORANE COMPOUNDS AND USING THE SAME FOR THE PRODUCTION OF COLOR COPY PAPERS.
CH524112A (en) Process for generating air ions
AT320144B (en) Process for the preparation of 7-amino-3-methyl-3-cephem-4-carboxylic acids
AT300833B (en) Process for the preparation of aminoalkylenephosphonic acids
AT297484B (en) Process for producing colored raster or line images
AT327080B (en) PROCESS FOR PRODUCING REFRACTORY COMPOSITE BODIES
AT317313B (en) Process for generating color images of surfaces using the scanning electron microscope
AT275316B (en) Process for the production of deformation images
AT341065B (en) METHOD FOR PRODUCING FLEECE MATERIALS
AT321891B (en) PROCESS FOR THE PREPARATION OF 2-ALKOXY-5-ALKYL-SULFONYLBENZOIC ACIDS
CH480667A (en) Process for generating color images
AT322732B (en) PROCESS FOR THE PREPARATION OF 7-AMINOCEPHALOSPORIC ACIDS
ATA848772A (en) METHOD FOR PRODUCING PRINTING FORMS
CH556043A (en) PROCESS FOR PRODUCING NEGATIVE HALFTONE IMAGES.
CH512087A (en) Process for the production of color photographic images
AT344655B (en) Process for the production of pile fleece
CH506620A (en) Process for the production of amino acids
AT329536B (en) PROCESS FOR THE PREPARATION OF 2-ALKOXY-5-ALKYLSULFONYLBENZOIC ACIDS
CH531218A (en) Process for the optical recognition of characters
CH518955A (en) Process for the production of optical brighteners
CH517784A (en) Process for the production of phosphonic acids
CH541015A (en) Process for the manufacture of pile fabric
ATA933774A (en) METHOD FOR PRODUCING LARGE SURFACE MOLYBDANE

Legal Events

Date Code Title Description
EFA Change in the company name
ELJ Ceased due to non-payment of the annual fee