DE2356425A1 - METHOD OF GENERATING COLOR IMAGES OF SURFACES USING THE SCANNING ELECTRON MICROSCOPE - Google Patents
METHOD OF GENERATING COLOR IMAGES OF SURFACES USING THE SCANNING ELECTRON MICROSCOPEInfo
- Publication number
- DE2356425A1 DE2356425A1 DE19732356425 DE2356425A DE2356425A1 DE 2356425 A1 DE2356425 A1 DE 2356425A1 DE 19732356425 DE19732356425 DE 19732356425 DE 2356425 A DE2356425 A DE 2356425A DE 2356425 A1 DE2356425 A1 DE 2356425A1
- Authority
- DE
- Germany
- Prior art keywords
- color images
- electron microscope
- scanning electron
- picture tube
- generating color
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2808—Cathodoluminescence
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Video Image Reproduction Devices For Color Tv Systems (AREA)
Description
österreichische Studiengesellschaft ...Austrian Study Society ...
O 17 10. Hoveaber 1973O 17 10. Hoveaber 1973
Verfahren zur Erzeugung von Farbbildern von Oberflächen unter Verwendung des BasterelektronenaikroslcopesProcess for generating color images of surfaces using the baster electron microscope
Die Erfindung betrifft ein Verfahren zur Herstellung von Farbbildern von Oberflächen fester Stoffe bei Verwendung des Rasterelektronenmikroskop·«. The invention relates to a method for producing color images of surfaces of solid substances when using the scanning electron microscope · «.
Bisher wurden Oberflächen von Materialien, die beim Auftreffen von Elektronen elektromagnetische Strahlung emittieren, mit Hilfe dieser Strahlung nur in der Weise mit de« Basterelektronenmikroskop untersucht, daß.die Intensität der gesamten Strahlung oder die Intensität der in einem einzigen herausgegriffenen Wellenlängenbereich existierenden Strahlung zur Modulation dea Elektronenstrahls der Bildröhre herangezogen wurde.So far, surfaces were made of materials when they hit Electromagnetic radiation emitted by electrons is examined with the aid of this radiation only in such a way that the intensity of the entire radiation is examined with the master electron microscope or the intensity of being singled out in a single Radiation existing in the range of wavelengths was used to modulate the electron beam of the picture tube.
Erfindung»gemäß wird vorgeschlagen, daß aus dem bei Elektronenbeschuß emittierten elektromagnetischen Spektrum die Intensität der Strahlung in drei begrenzten Vellenlängenbereichen gleichzeitig erfaßiyiind die diesen Intensitäten korrespondierendenAccording to the invention, it is proposed that from the electron bombardment emitted electromagnetic spectrum the intensity of radiation in three limited wavelength ranges at the same time record the corresponding intensities
409822/0787409822/0787
elektrischen Signale zur Modulation der drei Elektronenstrahlen einer Dreistrahl-Farbbildröhre bzw. zur Steuerung der Gitter einer Einstrahl-Farbbildröhre verwendet werden. Die drei W'ellenlängenbereiche werden für den Fall, daß es sich um eine Emission im sichtbaren Spektralgebiet handelt;, beispielsweise so gewählt, daß sie den drei Spektralbereichen einer handelsüblichen Farbbildröhre entsprechen. Auf diese Weise ist es möglich,.auf einem Farbbildschina ein vergrößertes Farbbild der zum Leuchten angeregten Oberfläch· der zu .untersuchenden Probe zu erhalten. Dieses vergrößerte Bild hat eine gewisse Ähnlichkeit mit dem Bild, das mitteile eines Lichtmikroskopes zu bekennen wäre, unterscheidet sich jedoch ganz wesentlich von diesem durch 1. die UiB mehr al· eine Größenordnung bessere Auflösung von Objektdetails (ca. 200 51 Punktauflösung bei den gegenwärtig handelsüblichen Rastermikroskopen) undelectrical signals can be used to modulate the three electron beams of a three-beam color picture tube or to control the grating of a single-beam color picture tube. In the event that the emission is in the visible spectral region, the three wavelength ranges are selected, for example, so that they correspond to the three spectral ranges of a commercially available color picture tube. In this way it is possible to obtain an enlarged color image of the surface of the sample to be examined which is excited to shine on a color image screen. This enlarged image bears a certain similarity to the image that would be reported by a light microscope, but differs from this very significantly in that 1. the UiB more than one order of magnitude better resolution of object details (approx. 200 51 point resolution with the currently commercially available Scanning microscopes) and
2v durch/ebenfalls um etwa zwei Größenordnungen bessere Schärfentiefe. 2v by / also about two orders of magnitude better depth of field.
Falls eine Emission in einem nicht sichtbaren Spektralgebiet auftritt, w&re ebenfalls durch geeignete Wahl von drei Wellenlängenbereichen die Abbildung in Form eines Farbbildes möglich, Jedoch würden die auftretenden Farben dann eben unsichtbaren Wellenlängen entsprechen.If an emission occurs in an invisible spectral region, this would also be possible through a suitable choice of three wavelength ranges the illustration in the form of a color picture is possible, however the occurring colors would then be invisible Correspond to wavelengths.
Geeignete Vorrichtungen für die Sammlung, Leitung, spektrale Aufspaltung und Intensität»messung der von der zu untersuchenden Probe emittierten elektromagnetischen Strahlung sind bekannt. Suitable devices for collection, conduction, spectral Splitting and intensity measurement of the one to be examined Electromagnetic radiation emitted by samples are known.
In der Zeichnung ist ·enematleoh ein Beispiel für das erfindungsgetB&a» Verfahren geseigt, und «war wenn ea «ich bei der emittierten elektromagnetischen Strahlung um Licht im sichtbaren und ultravioletten Spektralbereich handelt.In the drawing · enematleoh is an example of the invention. Proceedings prevailed, and when I was there I was at the emitted electromagnetic radiation is light in the visible and ultraviolet spectral range.
Über einen Lichtleiter 1 wird das von der Probe emittierte Licht zu den drei Detektoren 3at~ 3° und 3c gebracht. Diese Detektoren können z.B. Photovervielfacher sein. Vor den Detektoren sind Interferenzfilter 2a, 2b und 2c eingeschoben, die nur schmale Teile dee gesamten Emissionsspektrums durchlassen.The light emitted by the sample is brought to the three detectors 3 a t ~ 3 ° and 3 c via a light guide 1. These detectors can be photomultipliers, for example. Interference filters 2a, 2b and 2c are inserted in front of the detectors and only allow narrow parts of the entire emission spectrum to pass through.
- 2 - BAD ORIGINAL- 2 - ORIGINAL BATHROOM
409822/0787409822/0787
Anstatt einer Farbbildröhre mit drei Elcktronenstrahlen ist es natürlich auch möglich, eine Ein.3trahl-Farbbildröhre zu Verwenden und die den Intensitäten entsprechenden elektrischen Signale zur Steuerung der dann vorhandenen Ablenkgitter zu verwenden. Instead of a color picture tube with three electron beams it is Of course, it is also possible to use a single-beam color picture tube and the electrical ones corresponding to the intensities To use signals to control the deflection grids then present.
ORK3SNAL INSPECTEDORK3SNAL INSPECTED
- ΊΙ -- ΊΙ -
409822/0787409822/0787
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT967472A AT317313B (en) | 1972-11-14 | 1972-11-14 | Process for generating color images of surfaces using the scanning electron microscope |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2356425A1 true DE2356425A1 (en) | 1974-05-30 |
| DE2356425B2 DE2356425B2 (en) | 1975-04-17 |
| DE2356425C3 DE2356425C3 (en) | 1975-12-04 |
Family
ID=3616273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732356425 Expired DE2356425C3 (en) | 1972-11-14 | 1973-11-12 | Process for generating color images of surfaces of solid bodies using the scanning electron microscope |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5063876A (en) |
| AT (1) | AT317313B (en) |
| DE (1) | DE2356425C3 (en) |
| GB (1) | GB1402700A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58501396A (en) * | 1981-09-01 | 1983-08-18 | コモンウエルス サイエンテイフイツク アンド インダストリアル リサ−チ オ−ガニゼ−シヨン | Image forming method and device |
| JP2832987B2 (en) * | 1989-02-27 | 1998-12-09 | 株式会社島津製作所 | Color display of measurement results |
-
1972
- 1972-11-14 AT AT967472A patent/AT317313B/en not_active IP Right Cessation
-
1973
- 1973-11-12 DE DE19732356425 patent/DE2356425C3/en not_active Expired
- 1973-11-14 JP JP12815173A patent/JPS5063876A/ja active Pending
- 1973-11-14 GB GB5285073A patent/GB1402700A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2356425B2 (en) | 1975-04-17 |
| JPS5063876A (en) | 1975-05-30 |
| GB1402700A (en) | 1975-08-13 |
| AT317313B (en) | 1974-08-26 |
| DE2356425C3 (en) | 1975-12-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| E77 | Valid patent as to the heymanns-index 1977 | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: OESTERREICHISCHES FORSCHUNGSZENTRUM SEIBERSDORF GM |
|
| 8328 | Change in the person/name/address of the agent |
Free format text: BOEHMERT, A., DIPL.-ING. HOORMANN, W., DIPL.-ING. DR.-ING. GODDAR, H., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW. STAHLBERG, W. KUNTZE, W., RECHTSANW., 2800 BREMEN |
|
| 8339 | Ceased/non-payment of the annual fee |