JPS5063876A - - Google Patents
Info
- Publication number
- JPS5063876A JPS5063876A JP12815173A JP12815173A JPS5063876A JP S5063876 A JPS5063876 A JP S5063876A JP 12815173 A JP12815173 A JP 12815173A JP 12815173 A JP12815173 A JP 12815173A JP S5063876 A JPS5063876 A JP S5063876A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2808—Cathodoluminescence
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT967472A AT317313B (en) | 1972-11-14 | 1972-11-14 | Process for generating color images of surfaces using the scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5063876A true JPS5063876A (en) | 1975-05-30 |
Family
ID=3616273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12815173A Pending JPS5063876A (en) | 1972-11-14 | 1973-11-14 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5063876A (en) |
| AT (1) | AT317313B (en) |
| DE (1) | DE2356425C3 (en) |
| GB (1) | GB1402700A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58501396A (en) * | 1981-09-01 | 1983-08-18 | コモンウエルス サイエンテイフイツク アンド インダストリアル リサ−チ オ−ガニゼ−シヨン | Image forming method and device |
| JPH02226644A (en) * | 1989-02-27 | 1990-09-10 | Shimadzu Corp | Measured result displaying apparatus |
-
1972
- 1972-11-14 AT AT967472A patent/AT317313B/en not_active IP Right Cessation
-
1973
- 1973-11-12 DE DE19732356425 patent/DE2356425C3/en not_active Expired
- 1973-11-14 JP JP12815173A patent/JPS5063876A/ja active Pending
- 1973-11-14 GB GB5285073A patent/GB1402700A/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58501396A (en) * | 1981-09-01 | 1983-08-18 | コモンウエルス サイエンテイフイツク アンド インダストリアル リサ−チ オ−ガニゼ−シヨン | Image forming method and device |
| JPH02226644A (en) * | 1989-02-27 | 1990-09-10 | Shimadzu Corp | Measured result displaying apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1402700A (en) | 1975-08-13 |
| DE2356425A1 (en) | 1974-05-30 |
| DE2356425B2 (en) | 1975-04-17 |
| AT317313B (en) | 1974-08-26 |
| DE2356425C3 (en) | 1975-12-04 |