GB1424224A - Method and apparatus for the generation and recording of electron diffraction patterns - Google Patents
Method and apparatus for the generation and recording of electron diffraction patternsInfo
- Publication number
- GB1424224A GB1424224A GB1691873A GB1691873A GB1424224A GB 1424224 A GB1424224 A GB 1424224A GB 1691873 A GB1691873 A GB 1691873A GB 1691873 A GB1691873 A GB 1691873A GB 1424224 A GB1424224 A GB 1424224A
- Authority
- GB
- United Kingdom
- Prior art keywords
- specimen
- electron
- incidence
- recording
- diffracted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002524 electron diffraction data Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 230000004075 alteration Effects 0.000 abstract 1
- 239000003086 colorant Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000000835 fiber Substances 0.000 abstract 1
- 238000005286 illumination Methods 0.000 abstract 1
- 230000001360 synchronised effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
- H01J37/2955—Electron or ion diffraction tubes using scanning ray
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
1424224 Cathode-ray tubes PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 9 April 1973 [12 April 1972] 16918/73 Heading H1D Electron diffraction patterns of a selected small part of a specimen are obtained by recording that part of the diffracted beam which is diffracted in a fixed direction, while the direction of incidence on the specimen of the incident electron beam is varied. The beam 12 incident on the specimen P may be rotated through 360 degrees about axis 7 for each of a sequence of angles #; or it may perform a spiral movement; or a normal television frame pattern may be employed, the beam intensity being modulated to produce reduced or zero illumination of the specimen for other than the selected angles of incidence. The diaphragm 15 selects the direction of the diffracted beam for recording, the fact that it coincides with the electron-optical axis of the system minimizing aberration. Suitable electron-optical systems are referred to; known electron microscopes incorporating a deflection system may be employed by suitable adjustment of the lenses. The diffracted beam may be received on a luminescent screen coupled by a fibre optic window to a television camera tube connected to a display tube the scanning of which is synchronized with that of the beam illuminating the specimen. A sequence of scans of the angle of incidence, e.g. 360 degree rotations for different values of #-may be displayed in a corresponding sequence of colours on a colour television display tube.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7204859A NL7204859A (en) | 1972-04-12 | 1972-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1424224A true GB1424224A (en) | 1976-02-11 |
Family
ID=19815829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1691873A Expired GB1424224A (en) | 1972-04-12 | 1973-04-09 | Method and apparatus for the generation and recording of electron diffraction patterns |
Country Status (8)
| Country | Link |
|---|---|
| CA (1) | CA984524A (en) |
| CH (1) | CH569275A5 (en) |
| DE (1) | DE2315130A1 (en) |
| FR (1) | FR2179978B1 (en) |
| GB (1) | GB1424224A (en) |
| IT (1) | IT983000B (en) |
| NL (1) | NL7204859A (en) |
| SE (1) | SE386770B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2198284A (en) * | 1986-10-27 | 1988-06-08 | Atomika Tech Physik Gmbh | Secondary ion masss spectroscopy to determin the composition of a solid body |
| GB2221567A (en) * | 1988-07-25 | 1990-02-07 | Hitachi Ltd | Scanning electron microscope |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4210806A (en) * | 1979-01-18 | 1980-07-01 | International Business Machines Corporation | High brightness electron probe beam and method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1248201A (en) * | 1967-07-03 | 1971-09-29 | Nat Res Dev | Electron microscopes |
| GB1284061A (en) * | 1970-01-21 | 1972-08-02 | Cambridge Scientific Instr Ltd | Electron beam apparatus |
-
1972
- 1972-04-12 NL NL7204859A patent/NL7204859A/xx unknown
-
1973
- 1973-03-27 DE DE19732315130 patent/DE2315130A1/en active Pending
- 1973-04-09 IT IT4930373A patent/IT983000B/en active
- 1973-04-09 GB GB1691873A patent/GB1424224A/en not_active Expired
- 1973-04-09 SE SE7304969A patent/SE386770B/en unknown
- 1973-04-09 CA CA168,263A patent/CA984524A/en not_active Expired
- 1973-04-09 CH CH507173A patent/CH569275A5/xx not_active IP Right Cessation
- 1973-04-11 FR FR7313064A patent/FR2179978B1/fr not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2198284A (en) * | 1986-10-27 | 1988-06-08 | Atomika Tech Physik Gmbh | Secondary ion masss spectroscopy to determin the composition of a solid body |
| GB2198284B (en) * | 1986-10-27 | 1991-03-20 | Atomika Tech Physik Gmbh | Determining the composition of a solid body |
| GB2221567A (en) * | 1988-07-25 | 1990-02-07 | Hitachi Ltd | Scanning electron microscope |
| US4983832A (en) * | 1988-07-25 | 1991-01-08 | Hitachi, Ltd. | Scanning electron microscope |
| GB2221567B (en) * | 1988-07-25 | 1992-11-11 | Hitachi Ltd | Scanning electron microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2179978A1 (en) | 1973-11-23 |
| CH569275A5 (en) | 1975-11-14 |
| IT983000B (en) | 1974-10-21 |
| NL7204859A (en) | 1973-10-16 |
| DE2315130A1 (en) | 1973-10-18 |
| CA984524A (en) | 1976-02-24 |
| FR2179978B1 (en) | 1978-02-10 |
| SE386770B (en) | 1976-08-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |