SE386770B - PROCEDURE AND DEVICE FOR IMAGING A COMPARATIVELY SMALL PART OF A SAMPLE IN AN IMAGE PLAN - Google Patents

PROCEDURE AND DEVICE FOR IMAGING A COMPARATIVELY SMALL PART OF A SAMPLE IN AN IMAGE PLAN

Info

Publication number
SE386770B
SE386770B SE7304969A SE7304969A SE386770B SE 386770 B SE386770 B SE 386770B SE 7304969 A SE7304969 A SE 7304969A SE 7304969 A SE7304969 A SE 7304969A SE 386770 B SE386770 B SE 386770B
Authority
SE
Sweden
Prior art keywords
imaging
sample
procedure
small part
comparatively small
Prior art date
Application number
SE7304969A
Other languages
Swedish (sv)
Inventor
Oostrum K J Van
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of SE386770B publication Critical patent/SE386770B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
SE7304969A 1972-04-12 1973-04-09 PROCEDURE AND DEVICE FOR IMAGING A COMPARATIVELY SMALL PART OF A SAMPLE IN AN IMAGE PLAN SE386770B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7204859A NL7204859A (en) 1972-04-12 1972-04-12

Publications (1)

Publication Number Publication Date
SE386770B true SE386770B (en) 1976-08-16

Family

ID=19815829

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7304969A SE386770B (en) 1972-04-12 1973-04-09 PROCEDURE AND DEVICE FOR IMAGING A COMPARATIVELY SMALL PART OF A SAMPLE IN AN IMAGE PLAN

Country Status (8)

Country Link
CA (1) CA984524A (en)
CH (1) CH569275A5 (en)
DE (1) DE2315130A1 (en)
FR (1) FR2179978B1 (en)
GB (1) GB1424224A (en)
IT (1) IT983000B (en)
NL (1) NL7204859A (en)
SE (1) SE386770B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
DE3636506A1 (en) * 1986-10-27 1988-04-28 Atomika Tech Physik Gmbh SPIRAL SCAN PROCESS
JPH0233843A (en) * 1988-07-25 1990-02-05 Hitachi Ltd Scanning electronic microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1248201A (en) * 1967-07-03 1971-09-29 Nat Res Dev Electron microscopes
GB1284061A (en) * 1970-01-21 1972-08-02 Cambridge Scientific Instr Ltd Electron beam apparatus

Also Published As

Publication number Publication date
DE2315130A1 (en) 1973-10-18
CA984524A (en) 1976-02-24
IT983000B (en) 1974-10-21
NL7204859A (en) 1973-10-16
GB1424224A (en) 1976-02-11
FR2179978A1 (en) 1973-11-23
FR2179978B1 (en) 1978-02-10
CH569275A5 (en) 1975-11-14

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