GB1399588A - Instrument for secondary ion mass spectrometry - Google Patents

Instrument for secondary ion mass spectrometry

Info

Publication number
GB1399588A
GB1399588A GB5199473A GB5199473A GB1399588A GB 1399588 A GB1399588 A GB 1399588A GB 5199473 A GB5199473 A GB 5199473A GB 5199473 A GB5199473 A GB 5199473A GB 1399588 A GB1399588 A GB 1399588A
Authority
GB
United Kingdom
Prior art keywords
instrument
mask
analyser
secondary ion
mass spectrometry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5199473A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of GB1399588A publication Critical patent/GB1399588A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0431—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples
    • H01J49/044—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples with means for preventing droplets from entering the analyzer; Desolvation of droplets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
GB5199473A 1972-11-11 1973-11-08 Instrument for secondary ion mass spectrometry Expired GB1399588A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2255302A DE2255302C3 (de) 1972-11-11 1972-11-11 Einrichtung für die Sekundär-Ionen-Massenspektroskopie

Publications (1)

Publication Number Publication Date
GB1399588A true GB1399588A (en) 1975-07-02

Family

ID=5861444

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5199473A Expired GB1399588A (en) 1972-11-11 1973-11-08 Instrument for secondary ion mass spectrometry

Country Status (5)

Country Link
US (1) US3859226A (enrdf_load_html_response)
CH (1) CH557598A (enrdf_load_html_response)
DE (1) DE2255302C3 (enrdf_load_html_response)
FR (1) FR2206579B1 (enrdf_load_html_response)
GB (1) GB1399588A (enrdf_load_html_response)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH583460A5 (enrdf_load_html_response) * 1974-09-30 1976-12-31 Balzers Patent Beteilig Ag
US3939344A (en) * 1974-12-23 1976-02-17 Minnesota Mining And Manufacturing Company Prefilter-ionizer apparatus for use with quadrupole type secondary-ion mass spectrometers
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
DE2534665C2 (de) * 1975-08-02 1985-09-05 Leybold-Heraeus GmbH, 5000 Köln Massenspektroskopische Einrichtung
DE2540505A1 (de) * 1975-09-11 1977-03-24 Leybold Heraeus Gmbh & Co Kg Flugzeit-massenspektrometer fuer ionen mit unterschiedlichen energien
DE2556291C3 (de) * 1975-12-13 1980-11-27 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Raster-Ionenmikroskop
US4075479A (en) * 1976-03-04 1978-02-21 Finnigan Corporation Focusing ion lens system for mass spectrometer for separating charged and neutral particles
DE2753412C2 (de) * 1977-11-30 1983-06-23 Max Planck Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Rotationssymmetrischer Ionen-Elektronen-Konverter
DE2947542A1 (de) * 1979-11-26 1981-06-04 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur ueberwachung und/oder steuerung von plasmaprozessen
DE3048392A1 (de) * 1980-12-22 1982-07-22 Leybold-Heraeus GmbH, 5000 Köln Linsensystem fuer analysatoren
US4442354A (en) * 1982-01-22 1984-04-10 Atom Sciences, Inc. Sputter initiated resonance ionization spectrometry
US4556794A (en) * 1985-01-30 1985-12-03 Hughes Aircraft Company Secondary ion collection and transport system for ion microprobe
CA1245778A (en) * 1985-10-24 1988-11-29 John B. French Mass analyzer system with reduced drift
GB9204524D0 (en) * 1992-03-03 1992-04-15 Fisons Plc Mass spectrometer
GB9219457D0 (en) * 1992-09-15 1992-10-28 Fisons Plc Reducing interferences in plasma source mass spectrometers
AU2012225760A1 (en) 2011-03-04 2013-09-19 Perkinelmer Health Sciences, Inc. Electrostatic lenses and systems including the same
US8461524B2 (en) * 2011-03-28 2013-06-11 Thermo Finnigan Llc Ion guide with improved gas dynamics and combined noise reduction device
DE102012200211A1 (de) * 2012-01-09 2013-07-11 Carl Zeiss Nts Gmbh Vorrichtung und Verfahren zur Oberflächenbearbeitung eines Substrates
CA2932371A1 (en) * 2013-12-31 2015-07-09 Dh Technologies Development Pte. Ltd. Ion guide for mass spectrometry

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3501630A (en) * 1969-03-17 1970-03-17 Bell & Howell Co Mass filter with removable auxiliary electrode

Also Published As

Publication number Publication date
DE2255302C3 (de) 1980-09-11
CH557598A (de) 1974-12-31
DE2255302B2 (de) 1980-01-17
FR2206579B1 (enrdf_load_html_response) 1978-03-10
US3859226A (en) 1975-01-07
FR2206579A1 (enrdf_load_html_response) 1974-06-07
DE2255302A1 (de) 1974-05-22

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee