GB1378667A - Ion implantation - Google Patents
Ion implantationInfo
- Publication number
- GB1378667A GB1378667A GB3937872A GB3937872A GB1378667A GB 1378667 A GB1378667 A GB 1378667A GB 3937872 A GB3937872 A GB 3937872A GB 3937872 A GB3937872 A GB 3937872A GB 1378667 A GB1378667 A GB 1378667A
- Authority
- GB
- United Kingdom
- Prior art keywords
- holder
- ion
- sample
- ion implantation
- aug
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005468 ion implantation Methods 0.000 title abstract 3
- 239000003990 capacitor Substances 0.000 abstract 2
- 238000010884 ion-beam technique Methods 0.000 abstract 2
- 230000001133 acceleration Effects 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 abstract 1
- 238000002513 implantation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000001960 triggered effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17446371A | 1971-08-24 | 1971-08-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1378667A true GB1378667A (en) | 1974-12-27 |
Family
ID=22636242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3937872A Expired GB1378667A (en) | 1971-08-24 | 1972-08-24 | Ion implantation |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS4830000A (enExample) |
| BE (1) | BE787829A (enExample) |
| CA (1) | CA953823A (enExample) |
| DE (1) | DE2239284A1 (enExample) |
| FR (1) | FR2151361A5 (enExample) |
| GB (1) | GB1378667A (enExample) |
| IT (1) | IT965998B (enExample) |
| NL (1) | NL7211326A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58106823A (ja) * | 1981-12-18 | 1983-06-25 | Toshiba Corp | イオン注入方法 |
| JPS6110025A (ja) * | 1984-06-23 | 1986-01-17 | Toagosei Chem Ind Co Ltd | 水溶液の精製法 |
| US4859343A (en) * | 1987-12-02 | 1989-08-22 | Lithium Corporation Of America | Sodium removal from brines |
| US4929588A (en) * | 1987-12-02 | 1990-05-29 | Lithium Corporation Of America | Sodium removal, from brines |
| US5449916A (en) * | 1994-09-09 | 1995-09-12 | Atomic Energy Of Canada Limited | Electron radiation dose tailoring by variable beam pulse generation |
-
1972
- 1972-04-18 CA CA139,929A patent/CA953823A/en not_active Expired
- 1972-08-10 DE DE19722239284 patent/DE2239284A1/de active Pending
- 1972-08-18 NL NL7211326A patent/NL7211326A/xx unknown
- 1972-08-18 IT IT5225072A patent/IT965998B/it active
- 1972-08-21 JP JP8286872A patent/JPS4830000A/ja active Pending
- 1972-08-22 BE BE787829A patent/BE787829A/xx unknown
- 1972-08-23 FR FR7230048A patent/FR2151361A5/fr not_active Expired
- 1972-08-24 GB GB3937872A patent/GB1378667A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7211326A (enExample) | 1973-02-27 |
| BE787829A (fr) | 1972-12-18 |
| DE2239284A1 (de) | 1973-03-08 |
| JPS4830000A (enExample) | 1973-04-20 |
| IT965998B (it) | 1974-02-11 |
| FR2151361A5 (enExample) | 1973-04-13 |
| CA953823A (en) | 1974-08-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CSNS | Application of which complete specification have been accepted and published, but patent is not sealed |