CA953823A - Ion beam control apparatus - Google Patents

Ion beam control apparatus

Info

Publication number
CA953823A
CA953823A CA139,929A CA139929A CA953823A CA 953823 A CA953823 A CA 953823A CA 139929 A CA139929 A CA 139929A CA 953823 A CA953823 A CA 953823A
Authority
CA
Canada
Prior art keywords
control apparatus
ion beam
beam control
ion
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA139,929A
Other languages
English (en)
Other versions
CA139929S (en
Inventor
Alfred U. Macrae
Robert A. Moline
Kenneth A. Pickar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA953823A publication Critical patent/CA953823A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA139,929A 1971-08-24 1972-04-18 Ion beam control apparatus Expired CA953823A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17446371A 1971-08-24 1971-08-24

Publications (1)

Publication Number Publication Date
CA953823A true CA953823A (en) 1974-08-27

Family

ID=22636242

Family Applications (1)

Application Number Title Priority Date Filing Date
CA139,929A Expired CA953823A (en) 1971-08-24 1972-04-18 Ion beam control apparatus

Country Status (8)

Country Link
JP (1) JPS4830000A (enExample)
BE (1) BE787829A (enExample)
CA (1) CA953823A (enExample)
DE (1) DE2239284A1 (enExample)
FR (1) FR2151361A5 (enExample)
GB (1) GB1378667A (enExample)
IT (1) IT965998B (enExample)
NL (1) NL7211326A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106823A (ja) * 1981-12-18 1983-06-25 Toshiba Corp イオン注入方法
JPS6110025A (ja) * 1984-06-23 1986-01-17 Toagosei Chem Ind Co Ltd 水溶液の精製法
US4859343A (en) * 1987-12-02 1989-08-22 Lithium Corporation Of America Sodium removal from brines
US4929588A (en) * 1987-12-02 1990-05-29 Lithium Corporation Of America Sodium removal, from brines
US5449916A (en) * 1994-09-09 1995-09-12 Atomic Energy Of Canada Limited Electron radiation dose tailoring by variable beam pulse generation

Also Published As

Publication number Publication date
BE787829A (fr) 1972-12-18
GB1378667A (en) 1974-12-27
JPS4830000A (enExample) 1973-04-20
NL7211326A (enExample) 1973-02-27
IT965998B (it) 1974-02-11
FR2151361A5 (enExample) 1973-04-13
DE2239284A1 (de) 1973-03-08

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