BE787829A - Procede pour regler l'exposition d'un echantillon a un faisceaud'ions - Google Patents

Procede pour regler l'exposition d'un echantillon a un faisceaud'ions

Info

Publication number
BE787829A
BE787829A BE787829A BE787829A BE787829A BE 787829 A BE787829 A BE 787829A BE 787829 A BE787829 A BE 787829A BE 787829 A BE787829 A BE 787829A BE 787829 A BE787829 A BE 787829A
Authority
BE
Belgium
Prior art keywords
exposure
sample
adjusting
ion beam
ion
Prior art date
Application number
BE787829A
Other languages
English (en)
French (fr)
Inventor
A U Mac Rae
R A Moline
K A Pickar
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of BE787829A publication Critical patent/BE787829A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
BE787829A 1971-08-24 1972-08-22 Procede pour regler l'exposition d'un echantillon a un faisceaud'ions BE787829A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17446371A 1971-08-24 1971-08-24

Publications (1)

Publication Number Publication Date
BE787829A true BE787829A (fr) 1972-12-18

Family

ID=22636242

Family Applications (1)

Application Number Title Priority Date Filing Date
BE787829A BE787829A (fr) 1971-08-24 1972-08-22 Procede pour regler l'exposition d'un echantillon a un faisceaud'ions

Country Status (8)

Country Link
JP (1) JPS4830000A (xx)
BE (1) BE787829A (xx)
CA (1) CA953823A (xx)
DE (1) DE2239284A1 (xx)
FR (1) FR2151361A5 (xx)
GB (1) GB1378667A (xx)
IT (1) IT965998B (xx)
NL (1) NL7211326A (xx)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106823A (ja) * 1981-12-18 1983-06-25 Toshiba Corp イオン注入方法
JPS6110025A (ja) * 1984-06-23 1986-01-17 Toagosei Chem Ind Co Ltd 水溶液の精製法
US4929588A (en) * 1987-12-02 1990-05-29 Lithium Corporation Of America Sodium removal, from brines
US4859343A (en) * 1987-12-02 1989-08-22 Lithium Corporation Of America Sodium removal from brines
US5449916A (en) * 1994-09-09 1995-09-12 Atomic Energy Of Canada Limited Electron radiation dose tailoring by variable beam pulse generation

Also Published As

Publication number Publication date
IT965998B (it) 1974-02-11
GB1378667A (en) 1974-12-27
DE2239284A1 (de) 1973-03-08
FR2151361A5 (xx) 1973-04-13
NL7211326A (xx) 1973-02-27
CA953823A (en) 1974-08-27
JPS4830000A (xx) 1973-04-20

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