IT965998B - Apparato di comando di fascio di ioni - Google Patents

Apparato di comando di fascio di ioni

Info

Publication number
IT965998B
IT965998B IT5225072A IT5225072A IT965998B IT 965998 B IT965998 B IT 965998B IT 5225072 A IT5225072 A IT 5225072A IT 5225072 A IT5225072 A IT 5225072A IT 965998 B IT965998 B IT 965998B
Authority
IT
Italy
Prior art keywords
control apparatus
ion beam
beam control
ion
control
Prior art date
Application number
IT5225072A
Other languages
English (en)
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Application granted granted Critical
Publication of IT965998B publication Critical patent/IT965998B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
IT5225072A 1971-08-24 1972-08-18 Apparato di comando di fascio di ioni IT965998B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17446371A 1971-08-24 1971-08-24

Publications (1)

Publication Number Publication Date
IT965998B true IT965998B (it) 1974-02-11

Family

ID=22636242

Family Applications (1)

Application Number Title Priority Date Filing Date
IT5225072A IT965998B (it) 1971-08-24 1972-08-18 Apparato di comando di fascio di ioni

Country Status (8)

Country Link
JP (1) JPS4830000A (it)
BE (1) BE787829A (it)
CA (1) CA953823A (it)
DE (1) DE2239284A1 (it)
FR (1) FR2151361A5 (it)
GB (1) GB1378667A (it)
IT (1) IT965998B (it)
NL (1) NL7211326A (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106823A (ja) * 1981-12-18 1983-06-25 Toshiba Corp イオン注入方法
JPS6110025A (ja) * 1984-06-23 1986-01-17 Toagosei Chem Ind Co Ltd 水溶液の精製法
US4929588A (en) * 1987-12-02 1990-05-29 Lithium Corporation Of America Sodium removal, from brines
US4859343A (en) * 1987-12-02 1989-08-22 Lithium Corporation Of America Sodium removal from brines
US5449916A (en) * 1994-09-09 1995-09-12 Atomic Energy Of Canada Limited Electron radiation dose tailoring by variable beam pulse generation

Also Published As

Publication number Publication date
GB1378667A (en) 1974-12-27
CA953823A (en) 1974-08-27
FR2151361A5 (it) 1973-04-13
DE2239284A1 (de) 1973-03-08
NL7211326A (it) 1973-02-27
BE787829A (fr) 1972-12-18
JPS4830000A (it) 1973-04-20

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