GB1376785A - Method and apparatus for etching copper and copper alloys - Google Patents
Method and apparatus for etching copper and copper alloysInfo
- Publication number
- GB1376785A GB1376785A GB925472A GB925472A GB1376785A GB 1376785 A GB1376785 A GB 1376785A GB 925472 A GB925472 A GB 925472A GB 925472 A GB925472 A GB 925472A GB 1376785 A GB1376785 A GB 1376785A
- Authority
- GB
- United Kingdom
- Prior art keywords
- container
- measurer
- valve
- controls
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 title abstract 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title abstract 2
- 229910000881 Cu alloy Inorganic materials 0.000 title abstract 2
- 239000010949 copper Substances 0.000 title abstract 2
- 229910052802 copper Inorganic materials 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract 4
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 abstract 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 abstract 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract 4
- 239000000908 ammonium hydroxide Substances 0.000 abstract 4
- 239000007788 liquid Substances 0.000 abstract 4
- 230000005484 gravity Effects 0.000 abstract 3
- 235000019270 ammonium chloride Nutrition 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 abstract 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 abstract 1
- VMQMZMRVKUZKQL-UHFFFAOYSA-N Cu+ Chemical compound [Cu+] VMQMZMRVKUZKQL-UHFFFAOYSA-N 0.000 abstract 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- 229910021529 ammonia Inorganic materials 0.000 abstract 1
- 238000013459 approach Methods 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 229910052801 chlorine Inorganic materials 0.000 abstract 1
- 239000000460 chlorine Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- -1 hydrochloric acid) Chemical class 0.000 abstract 1
- 230000001939 inductive effect Effects 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712110950 DE2110950A1 (de) | 1971-03-08 | 1971-03-08 | Verfahren zum AEtzen von Kupfer- und Kupferlegierungen |
| DE19712140215 DE2140215C2 (de) | 1971-08-11 | 1971-08-11 | Verfahren und Anlage zum Regenerieren einer zum Ätzen von Kupfer- und Kupferlegierungen, insbesondere kupferkaschierten Leiterplatten, geeigneten Ätzlösung, sowie Meßeinrichtung dieser Anlage |
| CH102572A CH587923A5 (en) | 1971-03-08 | 1972-01-21 | Etching copper/copper alloys process - using a regenerative soln contg ammonium and chloride ions |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1376785A true GB1376785A (en) | 1974-12-11 |
Family
ID=27172613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB925472A Expired GB1376785A (en) | 1971-03-08 | 1972-02-29 | Method and apparatus for etching copper and copper alloys |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3806393A (enrdf_load_stackoverflow) |
| JP (1) | JPS5549154B1 (enrdf_load_stackoverflow) |
| AT (1) | AT313671B (enrdf_load_stackoverflow) |
| BE (1) | BE780292A (enrdf_load_stackoverflow) |
| CA (1) | CA969843A (enrdf_load_stackoverflow) |
| FR (1) | FR2128796B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1376785A (enrdf_load_stackoverflow) |
| IT (1) | IT952925B (enrdf_load_stackoverflow) |
| NL (1) | NL7202652A (enrdf_load_stackoverflow) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3951711A (en) * | 1974-10-24 | 1976-04-20 | General Dynamics Corporation | System for maintaining uniform copper etching efficiency |
| US3999564A (en) * | 1976-01-09 | 1976-12-28 | Pesek Engineering & Mfg. Co. | Continuous etching and etched material recovery system |
| DE2917597A1 (de) * | 1979-04-30 | 1980-11-13 | Siemens Ag | Verfahren zur regenerierung ammoniakalischer aetzloesungen zum aetzen von metallischem kupfer |
| DE3308849A1 (de) * | 1983-03-12 | 1984-09-13 | Didier Werke Ag | Verfahren zur aufbereitung von metallhaltigen aetzloesungen und zur rueckgewinnung des metalls |
| EP0146732B1 (de) * | 1983-11-08 | 1988-02-03 | Holzer, Walter, Senator h.c. Dr.h.c.Ing. | Arbeitsverfahren und Vorrichtung zur Ausübung des Verfahrens zur Abscheidung von z.B. Kupfer aus flüssigen Elektrolyten, der durch einen mehrzelligen Elektrolysebehälter geführt wird |
| DE3422276A1 (de) * | 1984-06-15 | 1985-12-19 | Walter Holzer | Vorrichtung und arbeitsverfahren zum aetzen von leiterplatten |
| DE3345050A1 (de) * | 1983-12-13 | 1985-06-20 | Walter 7758 Meersburg Holzer | Verfahren zum umweltfreundlichen aetzen von leiterplatten und vorrichtung zur ausuebung des arbeitsverfahrens |
| DE3936363A1 (de) * | 1989-11-02 | 1991-05-08 | Hoellmueller Maschbau H | Verfahren zum aetzen von gegenstaenden sowie aetzanlage |
| US5720813A (en) | 1995-06-07 | 1998-02-24 | Eamon P. McDonald | Thin sheet handling system |
| CN102321908A (zh) * | 2011-09-02 | 2012-01-18 | 广州市天承化工有限公司 | 酸性氯化物蚀刻液的循环再生工艺方法及金属铜回收系统 |
-
1972
- 1972-02-29 GB GB925472A patent/GB1376785A/en not_active Expired
- 1972-02-29 NL NL7202652A patent/NL7202652A/xx not_active Application Discontinuation
- 1972-02-29 AT AT164772A patent/AT313671B/de not_active IP Right Cessation
- 1972-03-01 US US00230871A patent/US3806393A/en not_active Expired - Lifetime
- 1972-03-03 CA CA136,231A patent/CA969843A/en not_active Expired
- 1972-03-06 FR FR7208314A patent/FR2128796B1/fr not_active Expired
- 1972-03-07 BE BE780292A patent/BE780292A/xx not_active IP Right Cessation
- 1972-03-07 JP JP2351172A patent/JPS5549154B1/ja active Pending
- 1972-03-08 IT IT67722/72A patent/IT952925B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| FR2128796B1 (enrdf_load_stackoverflow) | 1976-08-06 |
| BE780292A (fr) | 1972-07-03 |
| FR2128796A1 (enrdf_load_stackoverflow) | 1972-10-20 |
| AT313671B (de) | 1974-02-25 |
| US3806393A (en) | 1974-04-23 |
| NL7202652A (enrdf_load_stackoverflow) | 1972-09-12 |
| IT952925B (it) | 1973-07-30 |
| JPS5549154B1 (enrdf_load_stackoverflow) | 1980-12-10 |
| CA969843A (en) | 1975-06-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |