CA969843A - Method and apparatus for etching copper and copper alloys - Google Patents
Method and apparatus for etching copper and copper alloysInfo
- Publication number
- CA969843A CA969843A CA136,231A CA136231A CA969843A CA 969843 A CA969843 A CA 969843A CA 136231 A CA136231 A CA 136231A CA 969843 A CA969843 A CA 969843A
- Authority
- CA
- Canada
- Prior art keywords
- copper
- etching
- alloys
- copper alloys
- etching copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- 229910000881 Cu alloy Inorganic materials 0.000 title 1
- 229910052802 copper Inorganic materials 0.000 title 1
- 239000010949 copper Substances 0.000 title 1
- 238000005530 etching Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19712110950 DE2110950A1 (de) | 1971-03-08 | 1971-03-08 | Verfahren zum AEtzen von Kupfer- und Kupferlegierungen |
DE19712140215 DE2140215C2 (de) | 1971-08-11 | 1971-08-11 | Verfahren und Anlage zum Regenerieren einer zum Ätzen von Kupfer- und Kupferlegierungen, insbesondere kupferkaschierten Leiterplatten, geeigneten Ätzlösung, sowie Meßeinrichtung dieser Anlage |
CH102572A CH587923A5 (en) | 1971-03-08 | 1972-01-21 | Etching copper/copper alloys process - using a regenerative soln contg ammonium and chloride ions |
Publications (1)
Publication Number | Publication Date |
---|---|
CA969843A true CA969843A (en) | 1975-06-24 |
Family
ID=27172613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA136,231A Expired CA969843A (en) | 1971-03-08 | 1972-03-03 | Method and apparatus for etching copper and copper alloys |
Country Status (9)
Country | Link |
---|---|
US (1) | US3806393A (enrdf_load_stackoverflow) |
JP (1) | JPS5549154B1 (enrdf_load_stackoverflow) |
AT (1) | AT313671B (enrdf_load_stackoverflow) |
BE (1) | BE780292A (enrdf_load_stackoverflow) |
CA (1) | CA969843A (enrdf_load_stackoverflow) |
FR (1) | FR2128796B1 (enrdf_load_stackoverflow) |
GB (1) | GB1376785A (enrdf_load_stackoverflow) |
IT (1) | IT952925B (enrdf_load_stackoverflow) |
NL (1) | NL7202652A (enrdf_load_stackoverflow) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3951711A (en) * | 1974-10-24 | 1976-04-20 | General Dynamics Corporation | System for maintaining uniform copper etching efficiency |
US3999564A (en) * | 1976-01-09 | 1976-12-28 | Pesek Engineering & Mfg. Co. | Continuous etching and etched material recovery system |
DE2917597A1 (de) * | 1979-04-30 | 1980-11-13 | Siemens Ag | Verfahren zur regenerierung ammoniakalischer aetzloesungen zum aetzen von metallischem kupfer |
DE3308849A1 (de) * | 1983-03-12 | 1984-09-13 | Didier Werke Ag | Verfahren zur aufbereitung von metallhaltigen aetzloesungen und zur rueckgewinnung des metalls |
EP0146732B1 (de) * | 1983-11-08 | 1988-02-03 | Holzer, Walter, Senator h.c. Dr.h.c.Ing. | Arbeitsverfahren und Vorrichtung zur Ausübung des Verfahrens zur Abscheidung von z.B. Kupfer aus flüssigen Elektrolyten, der durch einen mehrzelligen Elektrolysebehälter geführt wird |
DE3422276A1 (de) * | 1984-06-15 | 1985-12-19 | Walter Holzer | Vorrichtung und arbeitsverfahren zum aetzen von leiterplatten |
DE3345050A1 (de) * | 1983-12-13 | 1985-06-20 | Walter 7758 Meersburg Holzer | Verfahren zum umweltfreundlichen aetzen von leiterplatten und vorrichtung zur ausuebung des arbeitsverfahrens |
DE3936363A1 (de) * | 1989-11-02 | 1991-05-08 | Hoellmueller Maschbau H | Verfahren zum aetzen von gegenstaenden sowie aetzanlage |
US5720813A (en) | 1995-06-07 | 1998-02-24 | Eamon P. McDonald | Thin sheet handling system |
CN102321908A (zh) * | 2011-09-02 | 2012-01-18 | 广州市天承化工有限公司 | 酸性氯化物蚀刻液的循环再生工艺方法及金属铜回收系统 |
-
1972
- 1972-02-29 GB GB925472A patent/GB1376785A/en not_active Expired
- 1972-02-29 AT AT164772A patent/AT313671B/de not_active IP Right Cessation
- 1972-02-29 NL NL7202652A patent/NL7202652A/xx not_active Application Discontinuation
- 1972-03-01 US US00230871A patent/US3806393A/en not_active Expired - Lifetime
- 1972-03-03 CA CA136,231A patent/CA969843A/en not_active Expired
- 1972-03-06 FR FR7208314A patent/FR2128796B1/fr not_active Expired
- 1972-03-07 JP JP2351172A patent/JPS5549154B1/ja active Pending
- 1972-03-07 BE BE780292A patent/BE780292A/xx not_active IP Right Cessation
- 1972-03-08 IT IT67722/72A patent/IT952925B/it active
Also Published As
Publication number | Publication date |
---|---|
AT313671B (de) | 1974-02-25 |
GB1376785A (en) | 1974-12-11 |
JPS5549154B1 (enrdf_load_stackoverflow) | 1980-12-10 |
US3806393A (en) | 1974-04-23 |
IT952925B (it) | 1973-07-30 |
FR2128796B1 (enrdf_load_stackoverflow) | 1976-08-06 |
NL7202652A (enrdf_load_stackoverflow) | 1972-09-12 |
BE780292A (fr) | 1972-07-03 |
FR2128796A1 (enrdf_load_stackoverflow) | 1972-10-20 |
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