GB1346950A - Production of schottky contacts - Google Patents

Production of schottky contacts

Info

Publication number
GB1346950A
GB1346950A GB5253571A GB5253571A GB1346950A GB 1346950 A GB1346950 A GB 1346950A GB 5253571 A GB5253571 A GB 5253571A GB 5253571 A GB5253571 A GB 5253571A GB 1346950 A GB1346950 A GB 1346950A
Authority
GB
United Kingdom
Prior art keywords
chromium
aluminium
etching
nov
thick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5253571A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1346950A publication Critical patent/GB1346950A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/59—Bond pads specially adapted therefor

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
GB5253571A 1970-11-20 1971-11-12 Production of schottky contacts Expired GB1346950A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2057204A DE2057204C3 (de) 1970-11-20 1970-11-20 Verfahren zur Herstellung von Metall-Halbleiterkontakten

Publications (1)

Publication Number Publication Date
GB1346950A true GB1346950A (en) 1974-02-13

Family

ID=5788703

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5253571A Expired GB1346950A (en) 1970-11-20 1971-11-12 Production of schottky contacts

Country Status (10)

Country Link
US (1) US3819432A (enExample)
JP (1) JPS5316671B1 (enExample)
BE (1) BE775571A (enExample)
CA (1) CA920723A (enExample)
DE (1) DE2057204C3 (enExample)
FR (1) FR2115205B1 (enExample)
GB (1) GB1346950A (enExample)
IT (1) IT940614B (enExample)
LU (1) LU64296A1 (enExample)
NL (1) NL7115929A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2360993A1 (fr) * 1976-08-03 1978-03-03 Lignes Telegraph Telephon Perfectionnement aux procedes de fabrication de diodes schottky a barriere or-silicium
US4215156A (en) * 1977-08-26 1980-07-29 International Business Machines Corporation Method for fabricating tantalum semiconductor contacts
US5254869A (en) * 1991-06-28 1993-10-19 Linear Technology Corporation Aluminum alloy/silicon chromium sandwich schottky diode

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3094489A (en) * 1959-08-31 1963-06-18 Monsanto Chemicals Method and composition for brightening aluminum
US3423205A (en) * 1964-10-30 1969-01-21 Bunker Ramo Method of making thin-film circuits
US3368124A (en) * 1965-12-09 1968-02-06 Rca Corp Semiconductor devices
US3597667A (en) * 1966-03-01 1971-08-03 Gen Electric Silicon oxide-silicon nitride coatings for semiconductor devices

Also Published As

Publication number Publication date
US3819432A (en) 1974-06-25
LU64296A1 (enExample) 1972-06-02
DE2057204A1 (de) 1972-06-08
FR2115205B1 (enExample) 1977-04-22
DE2057204B2 (de) 1974-07-11
NL7115929A (enExample) 1972-05-24
JPS5316671B1 (enExample) 1978-06-02
CA920723A (en) 1973-02-06
IT940614B (it) 1973-02-20
FR2115205A1 (enExample) 1972-07-07
BE775571A (fr) 1972-03-16
DE2057204C3 (de) 1975-02-27

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee