GB1344432A - Apparatus for vaporizing metal - Google Patents

Apparatus for vaporizing metal

Info

Publication number
GB1344432A
GB1344432A GB611572A GB611572A GB1344432A GB 1344432 A GB1344432 A GB 1344432A GB 611572 A GB611572 A GB 611572A GB 611572 A GB611572 A GB 611572A GB 1344432 A GB1344432 A GB 1344432A
Authority
GB
United Kingdom
Prior art keywords
crucible
beams
metal
feb
pass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB611572A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bekaert NV SA
Original Assignee
Bekaert NV SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert NV SA filed Critical Bekaert NV SA
Publication of GB1344432A publication Critical patent/GB1344432A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB611572A 1971-02-09 1972-02-09 Apparatus for vaporizing metal Expired GB1344432A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE762681A BE762681A (nl) 1971-02-09 1971-02-09 Inrichting voor het opdampen van een metalen deklaag op een langwerpig substraat met behulp van tenminste een elektronenkanon.

Publications (1)

Publication Number Publication Date
GB1344432A true GB1344432A (en) 1974-01-23

Family

ID=3857695

Family Applications (1)

Application Number Title Priority Date Filing Date
GB611572A Expired GB1344432A (en) 1971-02-09 1972-02-09 Apparatus for vaporizing metal

Country Status (9)

Country Link
US (1) US3777704A (cg-RX-API-DMAC10.html)
JP (1) JPS5019519B1 (cg-RX-API-DMAC10.html)
BE (1) BE762681A (cg-RX-API-DMAC10.html)
DE (1) DE2204467A1 (cg-RX-API-DMAC10.html)
FR (1) FR2124467B1 (cg-RX-API-DMAC10.html)
GB (1) GB1344432A (cg-RX-API-DMAC10.html)
IT (1) IT948377B (cg-RX-API-DMAC10.html)
LU (1) LU64738A1 (cg-RX-API-DMAC10.html)
NL (1) NL151138B (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2248340A (en) * 1990-06-25 1992-04-01 Mitsubishi Electric Corp Thin film deposition apparatus
EP3722453A4 (en) * 2017-12-08 2021-08-25 Sumitomo Chemical Co., Ltd. VAPOR SEPARATION SOURCE, ELECTRON BEAM VACUUM DEPOSITORY DEVICE, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4153005A (en) * 1977-07-06 1979-05-08 United Technologies Corporation Multiple electron beam vacuum vapor deposition apparatus
US4815309A (en) * 1986-03-18 1989-03-28 Sumitomo Electric Industries, Ltd. Method of producing an electrical conductor
DE3634598C2 (de) * 1986-10-10 1994-06-16 Leybold Ag Verfahren und Vorrichtung zum reaktiven Aufdampfen von Metallverbindungen
EP0392082B1 (en) * 1989-04-14 1996-01-31 Katayama Special Industries, Ltd. Method for manufacturing a metallic porous sheet
AT400040B (de) * 1993-06-02 1995-09-25 Andritz Patentverwaltung Verfahren und vorrichtung zur beschichtung von metallsubstraten, insbesondere stahl- oder aluminiumbblechen in bandform
DE102013104086B3 (de) * 2013-04-23 2014-10-23 Von Ardenne Anlagentechnik Gmbh Elektronenstrahl-Verdampfungsanordnung und Verfahren zum Elektronenstrahl-Verdampfen
DE102013107454B4 (de) * 2013-07-15 2020-02-06 VON ARDENNE Asset GmbH & Co. KG Elektronenstrahlprozessanordnung, mobile Auswertevorrichtung, Verfahren zum Betreiben eines Elektronenstrahlverdampfers; und Verfahren zum Kalibrieren einer Elektronenstrahlprozessanordnung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3432335A (en) * 1966-03-15 1969-03-11 Lokomotivbau Elektrotech Cyclically moving electron beam for uniform vapor deposited coating
US3502499A (en) * 1967-05-22 1970-03-24 Texas Instruments Inc Cladding method and apparatus
US3576670A (en) * 1969-02-19 1971-04-27 Gulf Energy & Environ Systems Method for making a superconducting material

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2248340A (en) * 1990-06-25 1992-04-01 Mitsubishi Electric Corp Thin film deposition apparatus
US5180477A (en) * 1990-06-25 1993-01-19 Mitsubishi Denki Kabushiki Kaisha Thin film deposition apparatus
GB2248340B (en) * 1990-06-25 1994-09-28 Mitsubishi Electric Corp Thin film deposition apparatus
EP3722453A4 (en) * 2017-12-08 2021-08-25 Sumitomo Chemical Co., Ltd. VAPOR SEPARATION SOURCE, ELECTRON BEAM VACUUM DEPOSITORY DEVICE, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

Also Published As

Publication number Publication date
US3777704A (en) 1973-12-11
BE762681A (nl) 1971-07-16
FR2124467B1 (cg-RX-API-DMAC10.html) 1977-04-01
LU64738A1 (cg-RX-API-DMAC10.html) 1972-07-03
NL7201042A (cg-RX-API-DMAC10.html) 1972-08-11
DE2204467A1 (de) 1972-09-14
FR2124467A1 (cg-RX-API-DMAC10.html) 1972-09-22
NL151138B (nl) 1976-10-15
IT948377B (it) 1973-05-30
JPS5019519B1 (cg-RX-API-DMAC10.html) 1975-07-08

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee