JPS5019519B1 - - Google Patents

Info

Publication number
JPS5019519B1
JPS5019519B1 JP47013666A JP1366672A JPS5019519B1 JP S5019519 B1 JPS5019519 B1 JP S5019519B1 JP 47013666 A JP47013666 A JP 47013666A JP 1366672 A JP1366672 A JP 1366672A JP S5019519 B1 JPS5019519 B1 JP S5019519B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47013666A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5019519B1 publication Critical patent/JPS5019519B1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP47013666A 1971-02-09 1972-02-09 Pending JPS5019519B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE762681A BE762681A (nl) 1971-02-09 1971-02-09 Inrichting voor het opdampen van een metalen deklaag op een langwerpig substraat met behulp van tenminste een elektronenkanon.

Publications (1)

Publication Number Publication Date
JPS5019519B1 true JPS5019519B1 (ja) 1975-07-08

Family

ID=3857695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47013666A Pending JPS5019519B1 (ja) 1971-02-09 1972-02-09

Country Status (9)

Country Link
US (1) US3777704A (ja)
JP (1) JPS5019519B1 (ja)
BE (1) BE762681A (ja)
DE (1) DE2204467A1 (ja)
FR (1) FR2124467B1 (ja)
GB (1) GB1344432A (ja)
IT (1) IT948377B (ja)
LU (1) LU64738A1 (ja)
NL (1) NL151138B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4153005A (en) * 1977-07-06 1979-05-08 United Technologies Corporation Multiple electron beam vacuum vapor deposition apparatus
US4815309A (en) * 1986-03-18 1989-03-28 Sumitomo Electric Industries, Ltd. Method of producing an electrical conductor
DE3634598C2 (de) * 1986-10-10 1994-06-16 Leybold Ag Verfahren und Vorrichtung zum reaktiven Aufdampfen von Metallverbindungen
EP0392082B1 (en) * 1989-04-14 1996-01-31 Katayama Special Industries, Ltd. Method for manufacturing a metallic porous sheet
JPH089774B2 (ja) * 1990-06-25 1996-01-31 三菱電機株式会社 薄膜形成装置
AT400040B (de) * 1993-06-02 1995-09-25 Andritz Patentverwaltung Verfahren und vorrichtung zur beschichtung von metallsubstraten, insbesondere stahl- oder aluminiumbblechen in bandform
DE102013104086B3 (de) * 2013-04-23 2014-10-23 Von Ardenne Anlagentechnik Gmbh Elektronenstrahl-Verdampfungsanordnung und Verfahren zum Elektronenstrahl-Verdampfen
DE102013107454B4 (de) * 2013-07-15 2020-02-06 VON ARDENNE Asset GmbH & Co. KG Elektronenstrahlprozessanordnung, mobile Auswertevorrichtung, Verfahren zum Betreiben eines Elektronenstrahlverdampfers; und Verfahren zum Kalibrieren einer Elektronenstrahlprozessanordnung
JP7058499B2 (ja) * 2017-12-08 2022-04-22 住友化学株式会社 蒸着源、電子ビーム真空蒸着装置及び電子デバイスの製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3432335A (en) * 1966-03-15 1969-03-11 Lokomotivbau Elektrotech Cyclically moving electron beam for uniform vapor deposited coating
US3502499A (en) * 1967-05-22 1970-03-24 Texas Instruments Inc Cladding method and apparatus
US3576670A (en) * 1969-02-19 1971-04-27 Gulf Energy & Environ Systems Method for making a superconducting material

Also Published As

Publication number Publication date
IT948377B (it) 1973-05-30
BE762681A (nl) 1971-07-16
DE2204467A1 (de) 1972-09-14
GB1344432A (en) 1974-01-23
FR2124467B1 (ja) 1977-04-01
NL7201042A (ja) 1972-08-11
LU64738A1 (ja) 1972-07-03
FR2124467A1 (ja) 1972-09-22
NL151138B (nl) 1976-10-15
US3777704A (en) 1973-12-11

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