GB1342560A - Method for evaporation of metal and a device for carrying out the method - Google Patents

Method for evaporation of metal and a device for carrying out the method

Info

Publication number
GB1342560A
GB1342560A GB1770172A GB1342560DA GB1342560A GB 1342560 A GB1342560 A GB 1342560A GB 1770172 A GB1770172 A GB 1770172A GB 1342560D A GB1342560D A GB 1342560DA GB 1342560 A GB1342560 A GB 1342560A
Authority
GB
United Kingdom
Prior art keywords
cathode
metal
evaporable
evaporated
magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1770172A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OTHERS
Original Assignee
OTHERS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OTHERS filed Critical OTHERS
Publication of GB1342560A publication Critical patent/GB1342560A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
GB1770172A 1972-03-22 1972-04-17 Method for evaporation of metal and a device for carrying out the method Expired GB1342560A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US23708372A 1972-03-22 1972-03-22

Publications (1)

Publication Number Publication Date
GB1342560A true GB1342560A (en) 1974-01-03

Family

ID=22892269

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1770172A Expired GB1342560A (en) 1972-03-22 1972-04-17 Method for evaporation of metal and a device for carrying out the method

Country Status (4)

Country Link
US (1) US3783231A (en:Method)
DE (1) DE2214590B2 (en:Method)
FR (1) FR2182747B1 (en:Method)
GB (1) GB1342560A (en:Method)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2140040A (en) * 1983-05-09 1984-11-21 Vac Tec Syst Evaporation arc stabilization
GB2148329A (en) * 1983-09-12 1985-05-30 Vac Tec Syst Improved method and apparatus for evaporation arc stabilization including initial target cleaning
GB2150947A (en) * 1983-12-07 1985-07-10 Vac Tec Syst Evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
FR2568896A1 (fr) * 1984-08-13 1986-02-14 Vac Tec Syst Appareil et procede ameliores pour l'evaporation a l'arc electrique de cibles de grande surface
GB2234265A (en) * 1989-07-13 1991-01-30 Technologitchen Instutute Vakk Electroarcing vapour deposition apparatus

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1040631A1 (ru) * 1980-06-25 1983-09-07 Предприятие П/Я В-8851 Вакуумно-дуговое устройство
JPS6011103B2 (ja) * 1981-02-23 1985-03-23 レオニド パフロヴイツチ サブレフ 電弧金属蒸発装置用の消耗性陰極
US4512867A (en) * 1981-11-24 1985-04-23 Andreev Anatoly A Method and apparatus for controlling plasma generation in vapor deposition
US4448799A (en) * 1983-04-21 1984-05-15 Multi-Arc Vacuum Systems Inc. Arc-initiating trigger apparatus and method for electric arc vapor deposition coating systems
US4559121A (en) * 1983-09-12 1985-12-17 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization for permeable targets
US4622452A (en) * 1983-07-21 1986-11-11 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition electrode apparatus
US4559125A (en) * 1983-09-12 1985-12-17 Vac-Tec Systems, Inc. Apparatus for evaporation arc stabilization during the initial clean-up of an arc target
US4556471A (en) * 1983-10-14 1985-12-03 Multi-Arc Vacuum Systems Inc. Physical vapor deposition apparatus
US4600489A (en) * 1984-01-19 1986-07-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
WO1985003954A1 (en) * 1984-03-02 1985-09-12 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
US4839245A (en) * 1985-09-30 1989-06-13 Union Carbide Corporation Zirconium nitride coated article and method for making same
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture
US4929322A (en) * 1985-09-30 1990-05-29 Union Carbide Corporation Apparatus and process for arc vapor depositing a coating in an evacuated chamber
CH671238A5 (en:Method) * 1986-11-06 1989-08-15 Vni Instrument Inst
US5215640A (en) * 1987-02-03 1993-06-01 Balzers Ag Method and arrangement for stabilizing an arc between an anode and a cathode particularly for vacuum coating devices
EP0298157B1 (en) * 1987-06-29 1992-09-02 Hauzer Holding B.V. Method and device for coating cavities of objects
JPH0214851A (ja) * 1988-06-30 1990-01-18 Nippon Sheet Glass Co Ltd 多色系熱線遮へい板の製造方法
US4943325A (en) * 1988-10-19 1990-07-24 Black & Veatch, Engineers-Architects Reflector assembly
US4936960A (en) * 1989-01-03 1990-06-26 Advanced Energy Industries, Inc. Method and apparatus for recovery from low impedance condition during cathodic arc processes
US5037522B1 (en) * 1990-07-24 1996-07-02 Vergason Technology Inc Electric arc vapor deposition device
CA2065581C (en) 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
US5380421A (en) * 1992-11-04 1995-01-10 Gorokhovsky; Vladimir I. Vacuum-arc plasma source
DE69225002T2 (de) * 1992-12-30 1998-09-03 N Proizv Predprijatie Novatech Anlage zum vakuum-plasma-behandlen von werkstücken
US5480527A (en) * 1994-04-25 1996-01-02 Vapor Technologies, Inc. Rectangular vacuum-arc plasma source
WO1996031899A1 (en) * 1995-04-07 1996-10-10 Advanced Energy Industries, Inc. Adjustable energy quantum thin film plasma processing system
US5656091A (en) * 1995-11-02 1997-08-12 Vacuum Plating Technology Corporation Electric arc vapor deposition apparatus and method
US5895559A (en) * 1996-04-08 1999-04-20 Christy; Ronald Cathodic arc cathode
DE19724996C1 (de) * 1997-06-13 1998-09-03 Fraunhofer Ges Forschung Verfahren zum plasmaaktivierten Elektronenstrahlverdampfen und Einrichtung zur Durchführung des Verfahrens
US6009829A (en) * 1997-08-30 2000-01-04 United Technologies Corporation Apparatus for driving the arc in a cathodic arc coater
US5972185A (en) * 1997-08-30 1999-10-26 United Technologies Corporation Cathodic arc vapor deposition apparatus (annular cathode)
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus
US6036828A (en) * 1997-08-30 2000-03-14 United Technologies Corporation Apparatus for steering the arc in a cathodic arc coater
AU9410498A (en) 1997-11-26 1999-06-17 Vapor Technologies, Inc. Apparatus for sputtering or arc evaporation
US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
US5997705A (en) * 1999-04-14 1999-12-07 Vapor Technologies, Inc. Rectangular filtered arc plasma source
US6936145B2 (en) * 2002-02-28 2005-08-30 Ionedge Corporation Coating method and apparatus
US20040261311A1 (en) * 2003-06-13 2004-12-30 Mike Mattlage Fishing hook
CH696828A5 (de) * 2003-11-18 2007-12-14 Oerlikon Trading Ag Zündvorrichtung.
US7867366B1 (en) 2004-04-28 2011-01-11 Alameda Applied Sciences Corp. Coaxial plasma arc vapor deposition apparatus and method
US8038858B1 (en) 2004-04-28 2011-10-18 Alameda Applied Sciences Corp Coaxial plasma arc vapor deposition apparatus and method
RU2279938C2 (ru) * 2004-09-06 2006-07-20 Елена Евгеньевна Никитина Способ транспортировки длинномерных объектов через вакуумную камеру и устройство для его осуществления
US7498587B2 (en) * 2006-05-01 2009-03-03 Vapor Technologies, Inc. Bi-directional filtered arc plasma source
US20090065045A1 (en) * 2007-09-10 2009-03-12 Zenith Solar Ltd. Solar electricity generation system
US9893223B2 (en) 2010-11-16 2018-02-13 Suncore Photovoltaics, Inc. Solar electricity generation system
US9153422B2 (en) 2011-08-02 2015-10-06 Envaerospace, Inc. Arc PVD plasma source and method of deposition of nanoimplanted coatings

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US507419A (en) * 1893-10-24 Electric heating and welding apparatus
US3555347A (en) * 1967-07-10 1971-01-12 Gen Electric Self aligning electron beam welder
US3576438A (en) * 1969-04-28 1971-04-27 Bell Telephone Labor Inc Focus monitor for electron microscope including an auxiliary electron gun and focusing lens

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2140040A (en) * 1983-05-09 1984-11-21 Vac Tec Syst Evaporation arc stabilization
GB2148329A (en) * 1983-09-12 1985-05-30 Vac Tec Syst Improved method and apparatus for evaporation arc stabilization including initial target cleaning
GB2150947A (en) * 1983-12-07 1985-07-10 Vac Tec Syst Evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
FR2568896A1 (fr) * 1984-08-13 1986-02-14 Vac Tec Syst Appareil et procede ameliores pour l'evaporation a l'arc electrique de cibles de grande surface
DE3528677A1 (de) * 1984-08-13 1986-02-20 Vac-Tec Systems, Inc., Boulder, Col. Vorrichtung und verfahren zur lichtbogenverdampfung
GB2163458A (en) * 1984-08-13 1986-02-26 Vac Tec Syst Controlling arc spot in arc evaporation
GB2234265A (en) * 1989-07-13 1991-01-30 Technologitchen Instutute Vakk Electroarcing vapour deposition apparatus

Also Published As

Publication number Publication date
DE2214590B2 (de) 1976-07-01
US3783231A (en) 1974-01-01
DE2214590A1 (de) 1973-10-04
FR2182747A1 (en:Method) 1973-12-14
FR2182747B1 (en:Method) 1976-06-11

Similar Documents

Publication Publication Date Title
GB1342560A (en) Method for evaporation of metal and a device for carrying out the method
US4166018A (en) Sputtering process and apparatus
DE60105856D1 (de) Lichtbogenverdampfer mit kraftvoller magnetführung für targets mit grosser oberfläche
JPS5952957B2 (ja) マグネトロン型スパッタ装置のカソ−ド部
GB1358411A (en) Sputtering
GB1106690A (en) Improvements in or relating to detection apparatus
US3202794A (en) Permanent magnet transverse electron beam evaporation source
US3161802A (en) Sputtering cathode type glow discharge device vacuum pump
GB1467487A (en) X-ray tubes
FR2321181A1 (fr) Relais sensible a collage sans aimant
GB976113A (en) Method and device for pumping a gas by the interaction of electric and magnetic fields
JPS57157511A (en) Opposite target type sputtering device
JP2007023377A (ja) スパッタリングターゲット
GB1351582A (en) Ion source
JPS5743986A (en) Film forming apparatus
GB1228207A (en:Method)
JPH01132765A (ja) マグネトロンスパッタ装置
JPS5813622B2 (ja) マグネトロン型スパッタ装置
GB2209769A (en) Sputter coating
US3527975A (en) Mercury vapor electron generator
JPH0633454B2 (ja) スパツタリング装置
ES354769A1 (es) Metodo de fabricacion de imanes permanentes anisotropicos.
JPS62149868A (ja) 強磁性体の高速スパツタリング方法
JPH04354868A (ja) マグネトロン型スパッタ装置用ターゲット
GB621011A (en) Improvements relating to magnetic devices

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee