GB1342560A - Method for evaporation of metal and a device for carrying out the method - Google Patents

Method for evaporation of metal and a device for carrying out the method

Info

Publication number
GB1342560A
GB1342560A GB1770172A GB1342560DA GB1342560A GB 1342560 A GB1342560 A GB 1342560A GB 1770172 A GB1770172 A GB 1770172A GB 1342560D A GB1342560D A GB 1342560DA GB 1342560 A GB1342560 A GB 1342560A
Authority
GB
United Kingdom
Prior art keywords
cathode
metal
evaporable
evaporated
magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1770172A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OTHERS
Original Assignee
OTHERS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OTHERS filed Critical OTHERS
Publication of GB1342560A publication Critical patent/GB1342560A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

1342560 Electric arc evaporation of metal L P SABLEV J I DOLOTOV L I GETMAN V N GORBUNOV E G GOLDINER K T KIRSHFELD and V V USOV 17 April 1972 17701/72 Heading C7F [Also in Division H1] A device for arc evaporation of metal com- prises a vacuum chamber 45, a cathode 7 therein made of the metal to be evaporated, said cathode having a surface 36 which is to be evaporated ("evaporable") and one 9 which is not ("non-evaporable"), an anode 45, an electromagnet 42 for creating a field having lines of force at an acute angle to surface 9, and a sensor adapted to "sense" the cathode spot when it wanders on to non-evaporable surface 9 and to cause a magnetic field to be produced (or an increased field if one is already present) by the magnet 42 to return the cathode spot to evaporable surface 36. After evacuation, and with cooling water passing through 48, 47, and 49 to cool cathode 7, power source 23 is energized to cause current to flow through 22, magnet coil 16, 21, cooling bed 46, cathode 7, movable electrode 56, 57, 58, 59, anode housing 45 and 24, so that armature 14 is pulled into coil 16 and an arc is struck between 56 and 36, being subsequently maintained between the anode and cathode. If cathode spot 36 strays from evaporable surface 36 to non-evaporable surface 9, current then flows along the circuit cathode 7, cover 41 (acting as sensor) 43, magnet 42, 44, 45, 24, 23, 22, 16, 21, 7, whereby magnet 42 is energized to create a field which drives cathode spot 37 back to surface 36. The evaporated metal coats substrates 39, or a metal such as Ti may be evaporated to exert a gettering action Fig. 1, (not shown).
GB1770172A 1972-03-22 1972-04-17 Method for evaporation of metal and a device for carrying out the method Expired GB1342560A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US23708372A 1972-03-22 1972-03-22

Publications (1)

Publication Number Publication Date
GB1342560A true GB1342560A (en) 1974-01-03

Family

ID=22892269

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1770172A Expired GB1342560A (en) 1972-03-22 1972-04-17 Method for evaporation of metal and a device for carrying out the method

Country Status (4)

Country Link
US (1) US3783231A (en)
DE (1) DE2214590B2 (en)
FR (1) FR2182747B1 (en)
GB (1) GB1342560A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2140040A (en) * 1983-05-09 1984-11-21 Vac Tec Syst Evaporation arc stabilization
GB2148329A (en) * 1983-09-12 1985-05-30 Vac Tec Syst Improved method and apparatus for evaporation arc stabilization including initial target cleaning
GB2150947A (en) * 1983-12-07 1985-07-10 Vac Tec Syst Evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
FR2568896A1 (en) * 1984-08-13 1986-02-14 Vac Tec Syst IMPROVED APPARATUS AND METHOD FOR ELECTRIC ARC EVAPORATION OF LARGE SURFACE TARGETS
GB2234265A (en) * 1989-07-13 1991-01-30 Technologitchen Instutute Vakk Electroarcing vapour deposition apparatus

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1040631A1 (en) * 1980-06-25 1983-09-07 Предприятие П/Я В-8851 Vacuum arc apparatus
DE3152736C2 (en) * 1981-02-23 1984-04-05 Leonid Pavlovič Sablev Self-consuming cathode for an arc metal evaporator
US4512867A (en) * 1981-11-24 1985-04-23 Andreev Anatoly A Method and apparatus for controlling plasma generation in vapor deposition
US4448799A (en) * 1983-04-21 1984-05-15 Multi-Arc Vacuum Systems Inc. Arc-initiating trigger apparatus and method for electric arc vapor deposition coating systems
US4559121A (en) * 1983-09-12 1985-12-17 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization for permeable targets
US4622452A (en) * 1983-07-21 1986-11-11 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition electrode apparatus
US4559125A (en) * 1983-09-12 1985-12-17 Vac-Tec Systems, Inc. Apparatus for evaporation arc stabilization during the initial clean-up of an arc target
US4556471A (en) * 1983-10-14 1985-12-03 Multi-Arc Vacuum Systems Inc. Physical vapor deposition apparatus
US4600489A (en) * 1984-01-19 1986-07-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
WO1985003954A1 (en) * 1984-03-02 1985-09-12 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
US4929322A (en) * 1985-09-30 1990-05-29 Union Carbide Corporation Apparatus and process for arc vapor depositing a coating in an evacuated chamber
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture
US4839245A (en) * 1985-09-30 1989-06-13 Union Carbide Corporation Zirconium nitride coated article and method for making same
CH671238A5 (en) * 1986-11-06 1989-08-15 Vni Instrument Inst
US5215640A (en) * 1987-02-03 1993-06-01 Balzers Ag Method and arrangement for stabilizing an arc between an anode and a cathode particularly for vacuum coating devices
ATE80184T1 (en) * 1987-06-29 1992-09-15 Hauzer Holding METHOD AND DEVICE FOR COATING HOLES IN OBJECTS.
JPH0214851A (en) * 1988-06-30 1990-01-18 Nippon Sheet Glass Co Ltd Production of multi-colored type heat radiation shielding sheet
US4943325A (en) * 1988-10-19 1990-07-24 Black & Veatch, Engineers-Architects Reflector assembly
US4936960A (en) * 1989-01-03 1990-06-26 Advanced Energy Industries, Inc. Method and apparatus for recovery from low impedance condition during cathodic arc processes
US5037522B1 (en) * 1990-07-24 1996-07-02 Vergason Technology Inc Electric arc vapor deposition device
CA2065581C (en) 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
US5380421A (en) * 1992-11-04 1995-01-10 Gorokhovsky; Vladimir I. Vacuum-arc plasma source
JPH08505437A (en) * 1992-12-30 1996-06-11 ナウチノ−プロイズボドストヴェノーエ・プレドプリェティエ・“ノヴァテク” Equipment for vacuum plasma treatment of substrates
US5480527A (en) * 1994-04-25 1996-01-02 Vapor Technologies, Inc. Rectangular vacuum-arc plasma source
WO1996031899A1 (en) 1995-04-07 1996-10-10 Advanced Energy Industries, Inc. Adjustable energy quantum thin film plasma processing system
US5656091A (en) * 1995-11-02 1997-08-12 Vacuum Plating Technology Corporation Electric arc vapor deposition apparatus and method
US5895559A (en) * 1996-04-08 1999-04-20 Christy; Ronald Cathodic arc cathode
DE19724996C1 (en) * 1997-06-13 1998-09-03 Fraunhofer Ges Forschung Plasma-activated electron beam vapour deposition
US6036828A (en) * 1997-08-30 2000-03-14 United Technologies Corporation Apparatus for steering the arc in a cathodic arc coater
US6009829A (en) * 1997-08-30 2000-01-04 United Technologies Corporation Apparatus for driving the arc in a cathodic arc coater
US5972185A (en) * 1997-08-30 1999-10-26 United Technologies Corporation Cathodic arc vapor deposition apparatus (annular cathode)
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus
IL127236A0 (en) 1997-11-26 1999-09-22 Vapor Technologies Inc Apparatus for sputtering or arc evaporation
US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
US5997705A (en) * 1999-04-14 1999-12-07 Vapor Technologies, Inc. Rectangular filtered arc plasma source
US6936145B2 (en) * 2002-02-28 2005-08-30 Ionedge Corporation Coating method and apparatus
US20040261311A1 (en) * 2003-06-13 2004-12-30 Mike Mattlage Fishing hook
CH696828A5 (en) * 2003-11-18 2007-12-14 Oerlikon Trading Ag Igniter.
US7867366B1 (en) 2004-04-28 2011-01-11 Alameda Applied Sciences Corp. Coaxial plasma arc vapor deposition apparatus and method
US8038858B1 (en) 2004-04-28 2011-10-18 Alameda Applied Sciences Corp Coaxial plasma arc vapor deposition apparatus and method
RU2279938C2 (en) * 2004-09-06 2006-07-20 Елена Евгеньевна Никитина Method of and device for transporting long-length articles through vacuum chamber
US7498587B2 (en) * 2006-05-01 2009-03-03 Vapor Technologies, Inc. Bi-directional filtered arc plasma source
US20090065045A1 (en) * 2007-09-10 2009-03-12 Zenith Solar Ltd. Solar electricity generation system
US9893223B2 (en) 2010-11-16 2018-02-13 Suncore Photovoltaics, Inc. Solar electricity generation system
US9153422B2 (en) 2011-08-02 2015-10-06 Envaerospace, Inc. Arc PVD plasma source and method of deposition of nanoimplanted coatings

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US507419A (en) * 1893-10-24 Electric heating and welding apparatus
US3555347A (en) * 1967-07-10 1971-01-12 Gen Electric Self aligning electron beam welder
US3576438A (en) * 1969-04-28 1971-04-27 Bell Telephone Labor Inc Focus monitor for electron microscope including an auxiliary electron gun and focusing lens

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2140040A (en) * 1983-05-09 1984-11-21 Vac Tec Syst Evaporation arc stabilization
GB2148329A (en) * 1983-09-12 1985-05-30 Vac Tec Syst Improved method and apparatus for evaporation arc stabilization including initial target cleaning
GB2150947A (en) * 1983-12-07 1985-07-10 Vac Tec Syst Evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
FR2568896A1 (en) * 1984-08-13 1986-02-14 Vac Tec Syst IMPROVED APPARATUS AND METHOD FOR ELECTRIC ARC EVAPORATION OF LARGE SURFACE TARGETS
DE3528677A1 (en) * 1984-08-13 1986-02-20 Vac-Tec Systems, Inc., Boulder, Col. DEVICE AND METHOD FOR ARC EVAPORATION
GB2163458A (en) * 1984-08-13 1986-02-26 Vac Tec Syst Controlling arc spot in arc evaporation
GB2234265A (en) * 1989-07-13 1991-01-30 Technologitchen Instutute Vakk Electroarcing vapour deposition apparatus

Also Published As

Publication number Publication date
FR2182747A1 (en) 1973-12-14
DE2214590A1 (en) 1973-10-04
DE2214590B2 (en) 1976-07-01
US3783231A (en) 1974-01-01
FR2182747B1 (en) 1976-06-11

Similar Documents

Publication Publication Date Title
GB1342560A (en) Method for evaporation of metal and a device for carrying out the method
US3878085A (en) Cathode sputtering apparatus
BR0116951A (en) Arc evaporator
JPS5952957B2 (en) Cathode part of magnetron type sputtering equipment
US3202794A (en) Permanent magnet transverse electron beam evaporation source
GB1106690A (en) Improvements in or relating to detection apparatus
JP2007023377A (en) Sputtering target
NO118026B (en)
GB976113A (en) Method and device for pumping a gas by the interaction of electric and magnetic fields
JPS57157511A (en) Opposite target type sputtering device
GB841214A (en) Improvements relating to electromagnetic relays
GB1351582A (en) Ion source
US2834846A (en) Relay switch
JPS6433909A (en) Electromagnet
GB1228207A (en)
JPS5881969A (en) Sputter source of magnetron sputtering
JPH01132765A (en) Magnetron sputtering device
US3527975A (en) Mercury vapor electron generator
GB1256336A (en) Electrical relay
GB1339910A (en) Alloy deposition by liquid phase sputtering
ES354769A1 (en) Method of manufacturing anisotropic permanent magnets
JPH04354868A (en) Target for magnetron sputtering device
JPS6089571A (en) Magnetron type sputtering device
GB1240212A (en) Sealed magnetic contact unit
FR2079408A3 (en) Separation electrode for metals

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee