DE69225002T2 - Anlage zum vakuum-plasma-behandlen von werkstücken - Google Patents

Anlage zum vakuum-plasma-behandlen von werkstücken

Info

Publication number
DE69225002T2
DE69225002T2 DE69225002T DE69225002T DE69225002T2 DE 69225002 T2 DE69225002 T2 DE 69225002T2 DE 69225002 T DE69225002 T DE 69225002T DE 69225002 T DE69225002 T DE 69225002T DE 69225002 T2 DE69225002 T2 DE 69225002T2
Authority
DE
Germany
Prior art keywords
workpieces
plant
vacuum
plasma treatment
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69225002T
Other languages
English (en)
Other versions
DE69225002D1 (de
Inventor
Sergei Nikolaevich Grigoriev
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
N PROIZV PREDPRIJATIE NOVATECH
Original Assignee
N PROIZV PREDPRIJATIE NOVATECH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by N PROIZV PREDPRIJATIE NOVATECH filed Critical N PROIZV PREDPRIJATIE NOVATECH
Application granted granted Critical
Publication of DE69225002D1 publication Critical patent/DE69225002D1/de
Publication of DE69225002T2 publication Critical patent/DE69225002T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • ing And Chemical Polishing (AREA)
DE69225002T 1992-12-30 1992-12-30 Anlage zum vakuum-plasma-behandlen von werkstücken Expired - Fee Related DE69225002T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/RU1992/000261 WO1994016117A1 (en) 1992-12-30 1992-12-30 Device for the vacuum-plasma treatment of articles

Publications (2)

Publication Number Publication Date
DE69225002D1 DE69225002D1 (de) 1998-05-07
DE69225002T2 true DE69225002T2 (de) 1998-09-03

Family

ID=20129746

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69225002T Expired - Fee Related DE69225002T2 (de) 1992-12-30 1992-12-30 Anlage zum vakuum-plasma-behandlen von werkstücken

Country Status (4)

Country Link
EP (1) EP0677595B1 (de)
JP (1) JPH08505437A (de)
DE (1) DE69225002T2 (de)
WO (1) WO1994016117A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE224963T1 (de) 1997-04-14 2002-10-15 Cemecon Ceramic Metal Coatings Verfahren und vorrichtung für pvd beschichtung
US6936145B2 (en) 2002-02-28 2005-08-30 Ionedge Corporation Coating method and apparatus
EP2159820B1 (de) 2008-08-25 2018-04-11 Oerlikon Surface Solutions AG, Pfäffikon Vorrichtung zur Beschichtung durch Ablagerung physikalischer Dämpfe sowie Verfahren zur Ablagerung physikalischer Dämpfe
US10056237B2 (en) 2012-09-14 2018-08-21 Vapor Technologies, Inc. Low pressure arc plasma immersion coating vapor deposition and ion treatment
CA2846177C (en) * 2013-03-15 2019-09-17 Vapor Technologies, Inc. Low pressure arc plasma immersion coating vapor deposition and ion treatment
EP2854155B1 (de) * 2013-09-27 2017-11-08 INDEOtec SA Plasmareaktorgefäß und Anordnung sowie Verfahren zur Durchführung einer Plasmaverarbeitung
RU173070U1 (ru) * 2016-02-20 2017-08-08 Федеральное государственное бюджетное учреждение науки Физический институт им. П.Н. Лебедева Российской академии наук, (ФИАН) Приспособление для получения соединений нерастворимых друг в друге металлов

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3793179A (en) * 1971-07-19 1974-02-19 L Sablev Apparatus for metal evaporation coating
US3783231A (en) * 1972-03-22 1974-01-01 V Gorbunov Apparatus for vacuum-evaporation of metals under the action of an electric arc
DE58909180D1 (de) * 1988-03-23 1995-05-24 Balzers Hochvakuum Verfahren und Anlage zur Beschichtung von Werkstücken.
US5037522B1 (en) * 1990-07-24 1996-07-02 Vergason Technology Inc Electric arc vapor deposition device
JPH06506986A (ja) * 1991-04-29 1994-08-04 ナウチノ−プロイズボドストヴェノーエ・プレドプリェティエ・“ノヴァテク” ガス放電プラズマ中での製品の処理方法と装置
WO1992021788A1 (en) * 1991-05-31 1992-12-10 Kharkovsky Fiziko-Tekhnichesky Institut Device for electric arc application of coatings on articles under vacuum

Also Published As

Publication number Publication date
WO1994016117A1 (en) 1994-07-21
JPH08505437A (ja) 1996-06-11
EP0677595A4 (de) 1996-02-07
EP0677595B1 (de) 1998-04-01
DE69225002D1 (de) 1998-05-07
EP0677595A1 (de) 1995-10-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: 'A A A VA A A BA A

8339 Ceased/non-payment of the annual fee