GB1336288A - Semiconductor device and apparatus and process for its manufacture - Google Patents
Semiconductor device and apparatus and process for its manufactureInfo
- Publication number
- GB1336288A GB1336288A GB3201872A GB3201872A GB1336288A GB 1336288 A GB1336288 A GB 1336288A GB 3201872 A GB3201872 A GB 3201872A GB 3201872 A GB3201872 A GB 3201872A GB 1336288 A GB1336288 A GB 1336288A
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- plate
- conductor
- semi
- july
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 6
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 8
- 150000004767 nitrides Chemical class 0.000 abstract 6
- 239000002184 metal Substances 0.000 abstract 4
- 229910052751 metal Inorganic materials 0.000 abstract 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- 239000012298 atmosphere Substances 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 2
- 239000010453 quartz Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 229910001220 stainless steel Inorganic materials 0.000 abstract 2
- 239000010935 stainless steel Substances 0.000 abstract 2
- 229910004298 SiO 2 Inorganic materials 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 239000012299 nitrogen atmosphere Substances 0.000 abstract 1
- 238000000206 photolithography Methods 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/60—Capacitors
- H10D1/62—Capacitors having potential barriers
- H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5004271A JPS517545B1 (enrdf_load_stackoverflow) | 1971-07-07 | 1971-07-07 | |
| JP5078671A JPS517547B1 (enrdf_load_stackoverflow) | 1971-07-09 | 1971-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1336288A true GB1336288A (en) | 1973-11-07 |
Family
ID=26390489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3201872A Expired GB1336288A (en) | 1971-07-07 | 1972-07-07 | Semiconductor device and apparatus and process for its manufacture |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE2233541C3 (enrdf_load_stackoverflow) |
| FR (1) | FR2144851B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1336288A (enrdf_load_stackoverflow) |
| NL (1) | NL155986B (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4056642A (en) * | 1976-05-14 | 1977-11-01 | Data General Corporation | Method of fabricating metal-semiconductor interfaces |
| US4079037A (en) * | 1976-11-26 | 1978-03-14 | Dow Corning Corporation | Alkenyloxy silicon compositions |
| DE3206421A1 (de) * | 1982-02-23 | 1983-09-01 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen von schichten aus hochschmelzenden metallen bzw. metallverbindungen durch abscheidung aus der dampfphase |
-
1972
- 1972-07-06 FR FR7224529A patent/FR2144851B1/fr not_active Expired
- 1972-07-07 DE DE2233541A patent/DE2233541C3/de not_active Expired
- 1972-07-07 NL NL7209496.A patent/NL155986B/xx not_active IP Right Cessation
- 1972-07-07 GB GB3201872A patent/GB1336288A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL155986B (nl) | 1978-02-15 |
| FR2144851A1 (enrdf_load_stackoverflow) | 1973-02-16 |
| NL7209496A (enrdf_load_stackoverflow) | 1973-01-09 |
| DE2233541C3 (de) | 1980-01-31 |
| DE2233541B2 (de) | 1976-01-22 |
| DE2233541A1 (de) | 1973-01-18 |
| FR2144851B1 (enrdf_load_stackoverflow) | 1978-04-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PE20 | Patent expired after termination of 20 years |