GB1332004A - Vacuum pump having rotor and stator construction - Google Patents

Vacuum pump having rotor and stator construction

Info

Publication number
GB1332004A
GB1332004A GB4786070A GB4786070A GB1332004A GB 1332004 A GB1332004 A GB 1332004A GB 4786070 A GB4786070 A GB 4786070A GB 4786070 A GB4786070 A GB 4786070A GB 1332004 A GB1332004 A GB 1332004A
Authority
GB
United Kingdom
Prior art keywords
degrees
blades
blade
stages
segments
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4786070A
Inventor
Ascher H Shapiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sargent Welch Scientific Co
Original Assignee
Sargent Welch Scientific Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sargent Welch Scientific Co filed Critical Sargent Welch Scientific Co
Publication of GB1332004A publication Critical patent/GB1332004A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

1332004 Molecular pumps SARGENTWELCH SCIENTIFIC CO 8 Oct 1970 [27 Oct 1969] 47860/70 Heading F1C A multi-stage molecular vacuum pump comprises rotor discs formed integrally with blades 94, as by means of a milling cutter of stepped configuration providing three segments A, B, C in each blade with angled faces 114, 116, 118 each parallel to the opposing angled faces 120, 122, 124 of the next blade, there being an unobstructed line of sight through the space between the segments A of each pair of adjacent blades in a direction parallel to the axis of rotation. As shown, such a line of sight occurs also for the segments B but to a lesser extent. The blade angle is 20 degrees to 50 degrees, preferably about 40 degrees. The corresponding stator discs are of similar form but of opposite hand. This configuration, giving high volumetric flow, is used for the initial stages. For the intermediate stages, a smaller blade angle, 15 degrees to 30 degrees, preferably about 20 degrees, is used, and the blades may overlap in all segments A, B, C. For the final stages, the blade angle is 5 degrees to 20 degrees, preferably about 10 degrees, with considerable overlap between adjacent blades, e.g. to the extent of about half the blade chord, this configuration giving a high pressure rise per stage. The blades of the final stages are short, with only a single segment, the hub to tip ratio being higher than in the previous stages, ranging from 0À75 to 0À95 instead of 0À4 to 0À8, with a preferred value of 0À9 instead of about 0À5 to 0À6. Since the volumetric flow is small in the final stages, the blades can be thicker than in the previous stages, the thickness being, say, about half the inter-blade spacing.
GB4786070A 1969-10-27 1970-10-08 Vacuum pump having rotor and stator construction Expired GB1332004A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86984869A 1969-10-27 1969-10-27

Publications (1)

Publication Number Publication Date
GB1332004A true GB1332004A (en) 1973-10-03

Family

ID=25354369

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4786070A Expired GB1332004A (en) 1969-10-27 1970-10-08 Vacuum pump having rotor and stator construction

Country Status (8)

Country Link
US (1) US3644051A (en)
BE (1) BE757354A (en)
CA (1) CA954487A (en)
CH (1) CH532199A (en)
DE (1) DE2046693A1 (en)
FR (1) FR2065419A5 (en)
GB (1) GB1332004A (en)
NL (1) NL7014593A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0426233A1 (en) * 1989-11-03 1991-05-08 VARIAN S.p.A. A process for manufacturing an impeller or a rotor having one or more blades for a turbine pump by means of electrical discharge machining, and articles so obtained
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades
US11286779B2 (en) 2020-06-03 2022-03-29 Honeywell International Inc. Characteristic distribution for rotor blade of booster rotor

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2035063C3 (en) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Impeller for a turbo molecular pump
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
FR2355177A1 (en) * 1975-06-17 1978-01-13 Bradbury Inventions Pty Ltd Multi-stage axial flow turbine - has stator blades at 45 degrees in opposition to blades on rotor
US4025225A (en) * 1975-08-04 1977-05-24 Robert R. Reed Disc pump or turbine
DE2923632A1 (en) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg METHOD FOR PRODUCING A VAN RING FOR THE ROTOR OF A TUBOMOLECULAR PUMP AND A ROTOR EQUIPPED WITH VAN RINGS OF THIS TYPE
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE3722164C2 (en) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolecular pump
DE3728154C2 (en) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Multi-stage molecular pump
US5358373A (en) 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JP3079367B2 (en) * 1997-10-03 2000-08-21 セイコー精機株式会社 Turbo molecular pump
JP3092063B2 (en) * 1998-06-17 2000-09-25 セイコー精機株式会社 Turbo molecular pump
WO2000042291A1 (en) * 1999-01-08 2000-07-20 Fantom Technologies Inc. Friction turbine
US6261052B1 (en) 1999-01-08 2001-07-17 Fantom Technologies Inc. Prandtl layer turbine
US6224325B1 (en) * 1999-01-08 2001-05-01 Wayne Ernest Conrad Prandtl layer turbine
US6174127B1 (en) * 1999-01-08 2001-01-16 Fantom Technologies Inc. Prandtl layer turbine
US6238177B1 (en) 1999-01-08 2001-05-29 Fantom Technologies Inc. Prandtl layer turbine
DE19930952A1 (en) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vacuum pump
US6250071B1 (en) 1999-08-27 2001-06-26 Schmoll & Halquiss Housing for a disk propulsion system and a method of using the same
US6368078B1 (en) * 2000-11-27 2002-04-09 John F. Palumbo Bladeless turbocharger
EP1249612B1 (en) 2001-03-15 2004-01-28 VARIAN S.p.A. Method of manufacturing a stator stage for a turbine pump
DE10150015A1 (en) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Multiple chamber plant used for degassing, coating or etching substrates comprises an evacuating system connected to chambers
DE102004012713A1 (en) † 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbo molecular pump
US7251260B2 (en) * 2004-08-24 2007-07-31 Coherent, Inc. Wavelength-locked fiber-coupled diode-laser bar
US20060291997A1 (en) * 2004-10-26 2006-12-28 Wilson Erich A Fluid Flow Chambers and Bridges in Bladeless Compressors, Turbines and Pumps
US20060216149A1 (en) * 2004-10-26 2006-09-28 Wilson Erich A Fluid Flow Channels in Bladeless Compressors, Turbines and Pumps
CN2752494Y (en) * 2004-11-04 2006-01-18 梁和胜 Blowing machine
US20070258824A1 (en) * 2005-02-01 2007-11-08 1134934 Alberta Ltd. Rotor for viscous or abrasive fluids
US7478990B2 (en) * 2005-10-25 2009-01-20 Wilson Erich A Bracket/spacer optimization in bladeless turbines, compressors and pumps
CN2856502Y (en) * 2005-11-04 2007-01-10 梁和胜 Fan
JP5369591B2 (en) * 2008-10-03 2013-12-18 株式会社島津製作所 Turbo molecular pump
TWI424121B (en) * 2010-12-10 2014-01-21 Prosol Corp Turbo molecular pump with improved blade structures
GB2498816A (en) * 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP3091235B1 (en) * 2015-05-04 2020-03-11 Pfeiffer Vacuum Gmbh Rotor disc

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL281280A (en) *
US1668462A (en) * 1924-05-09 1928-05-01 Richard W Oswald Disk fan wheel
CH227403A (en) * 1942-04-07 1943-06-15 Sulzer Ag Multi-stage turbo machine.
US2706451A (en) * 1948-10-20 1955-04-19 Mayer-Ortiz Carlos Axial flow pump
US2774307A (en) * 1952-02-19 1956-12-18 Heinrich Schloz Rotary pump
US2803945A (en) * 1954-05-04 1957-08-27 Werner I Staaf Gas turbine construction
US2918208A (en) * 1956-02-02 1959-12-22 Becker Willi Molecular pump
GB885954A (en) * 1960-03-08 1962-01-03 Arthur Pfeiffer G M B H Improvements in or relating to molecular pumps
US3138318A (en) * 1961-05-15 1964-06-23 Snecma Turbo-molecular vacuum pump
FR1297182A (en) * 1961-05-15 1962-06-29 Snecma Turbomolecular vacuum pump
FR84320E (en) * 1963-06-05 1965-01-22 Snecma Turbomolecular Vacuum Pumps Improvements

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0426233A1 (en) * 1989-11-03 1991-05-08 VARIAN S.p.A. A process for manufacturing an impeller or a rotor having one or more blades for a turbine pump by means of electrical discharge machining, and articles so obtained
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades
US11286779B2 (en) 2020-06-03 2022-03-29 Honeywell International Inc. Characteristic distribution for rotor blade of booster rotor

Also Published As

Publication number Publication date
BE757354A (en) 1971-03-16
DE2046693A1 (en) 1971-05-06
FR2065419A5 (en) 1971-07-23
NL7014593A (en) 1971-04-29
CH532199A (en) 1972-12-31
US3644051A (en) 1972-02-22
CA954487A (en) 1974-09-10

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee