EP3091235B1 - Rotor disc - Google Patents
Rotor disc Download PDFInfo
- Publication number
- EP3091235B1 EP3091235B1 EP15166269.9A EP15166269A EP3091235B1 EP 3091235 B1 EP3091235 B1 EP 3091235B1 EP 15166269 A EP15166269 A EP 15166269A EP 3091235 B1 EP3091235 B1 EP 3091235B1
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- EP
- European Patent Office
- Prior art keywords
- blade
- rotor
- disk
- tool
- accordance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000003754 machining Methods 0.000 claims description 59
- 238000004519 manufacturing process Methods 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 3
- 239000011343 solid material Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000005086 pumping Methods 0.000 description 6
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 230000002745 absorbent Effects 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
Definitions
- the present invention relates to a rotor disk for a rotor of a vacuum pump according to the preamble of claim 1 and a method for producing such a rotor disk according to the preamble of claim 7.
- An exemplary turbomolecular vacuum pump comprises a rotor with a rotor shaft on which a plurality of rotor disks are axially offset or on which exactly one rotor disk is arranged.
- Each rotor disk has a plurality of blades arranged distributed in the circumferential direction.
- Vacuum performance values e.g. To ensure the pumping speed and the compression ratio, which are as constant as possible over the radial extension of a respective blade, it is known to respectively taper the blades radially outwards, i.e. conical to execute. I.e. the blade is thicker radially on the inside and gradually becomes thinner on the radially outside.
- the production of a rotor disk with blades shaped in this way is complex and expensive machine tools and tools are necessary.
- step-shaped blades are generally known, the thickness profile of which has one or more steps (cf. US 3,623,826 ; DE 20 46 693 A1 ; DE 29 23 632 A1 and EP 0 965 761 A1 ).
- a rotor disk with the features of claim 1, and in particular in that at least one blade has a thickness profile with at least one step separating two sections of the blade.
- the blade is inclined relative to a plane running at least substantially perpendicular to an axis of rotation, each section having an angle of attack and the angle of attack of the radially inner section being greater than the angle of attack of the radially outer section.
- the blade can be "twisted in itself", whereby a continuous "in-itself twist” can be approximated and replaced by a stepped one in order to further simplify the manufacturing process and still ensure sufficiently good performance values of the vacuum pump.
- the angle of attack is considered to be the angle with respect to a plane running perpendicular to the axis of rotation.
- a rotor disk according to the invention is particularly easy to manufacture. Because if a graded thickness profile is allowed, the trajectories of a machining tool and the type of tool itself can be significantly simplified. E.g. In this way, in one possible embodiment of the invention, the blade can be produced by only one-dimensional machining steps, i.e. a tool is only moved along a straight line in one machining step. This allows e.g. replace an otherwise completely three-dimensional machining path, which requires complex and cost-intensive processing machines with many degrees of machining freedom.
- the invention therefore means a departure from the idea that only rotor disks with continuously or continuously tapering blades could achieve sufficient vacuum performance values, the overcoming of this prejudice according to the invention having considerable savings potential in the manufacture of the rotor disks.
- the number of stages is arbitrary.
- a larger number of levels can e.g. a radially outward tapering shape of the blade, which is at least theoretically ideal to a certain extent, is increasingly approximated.
- the advantage according to the invention of simple manufacturability is still ensured, even if a larger number of stages is associated with a greater manufacturing outlay.
- All blades of the rotor disk are preferably of identical design, but this is not mandatory.
- the thickness profile is defined by opposite flat sides of the blade.
- a flat side can have at least one of its normals an axial component, ie a component parallel to an axis of rotation of the rotor disk.
- a respective flat side differs from a narrow side of the blade, which extends, for example, perpendicular to the axis of rotation.
- the narrow side and flat side differ from at least one end face of a blade, which can represent a limitation of the blade in the radial direction to the radially outside.
- transitions between flat sides, narrow sides and the end face are not necessarily discontinuous, for example as sharp edges, but such an embodiment is possible according to the invention.
- the step is formed on one of the flat sides and between a radially inner thicker section and a radially outer thinner section of the blade.
- the blade therefore has a thickness that decreases radially towards the outside, this decrease not being continuous, but stepped.
- At least one of the flat sides can be flat in at least one of the sections. This further simplifies the manufacturing process.
- the thickness is constant in particular over a radial extension of the respective section. This also simplifies the manufacturing process, since e.g. a degree of freedom of the machine can be eliminated during processing.
- the two sections of the blade can each have a parallelogram cross section.
- the cross-section can also deviate from a parallelogram shape.
- the cross section can e.g. be rectangular, trapezoidal or irregularly triangular or polygonal and / or have round boundary lines.
- a cross section here means a section through the blade perpendicular to a radius of the rotor disk.
- the step comprises at least one chamfer and / or rounding. This can avoid sharp edges and / or improve the stability of the blade.
- a vacuum pump in particular a turbomolecular pump, with at least one of several separate rotor disks arranged one above the other, attached to a rotor shaft, or exactly one separate one on one Detached rotor shaft attached rotor disk solved rotor, in which at least one rotor disk is formed in the inventive manner.
- the disk can in particular be designed as a circular or cylindrical disk and, alternatively or additionally, can have a central, in particular circular opening, which is used, for example, to pass through a rotor shaft before the blade is formed.
- the removal of material can include machining, such as sawing or milling, but can also be carried out differently.
- different orientations of the tool relative to an at least substantially perpendicular to a plane of rotation are selected to generate different angles of attack for the individual sections of a respective blade for the individual machining operations.
- the angle of attack therefore does not depend on the tool itself, but only on its orientation. In other words, the tool can be set to the desired angle of attack.
- At least one machining operation is carried out, which comprises the tool being inserted into the disk with a radial component.
- the disc simply having to be rotated relative to the tool, in particular about its axis of rotation, in order to form a plurality of blades.
- machining requires only two degrees of freedom, which makes a machine for production particularly economical.
- the tool can be moved through the disk with an axial component corresponding to an angle of attack of the blade.
- the disk can easily be turned to produce the next blade.
- the tool comprises at least one circular saw blade, this has the advantage that the machining base, that is to say the region which corresponds to a radial machining depth, can be made straight.
- the tool can comprise a double or twin tool with two simultaneously active single tools arranged at a distance from one another.
- the individual tools can, for example, rotate, be coupled to one another, be connected to one another in a rotationally rigid or rotationally fixed manner, be connected via a gear, have parallel axes of rotation and / or have coincident axes of rotation.
- a tool, in particular a single tool can comprise, for example, a saw, a saw blade, a milling cutter, a double saw, a twin saw and / or the like in each case in one or a plurality.
- the distance between the individual tools can determine a thickness of a respective section of the blade, wherein the distance can be adjustable for producing sections of different thicknesses and / or tools can be kept at different distances between the individual tools.
- the individual tools are arranged in parallel in order to produce blade sections with a constant thickness over their radial extent.
- Parallel can e.g. refer to an optionally existing axis of rotation of the respective individual tool, to a processing surface of the individual tool and / or to an extension direction or plane of the individual tool.
- machining operations are carried out in succession in order to form the individual sections of a respective blade, the machining operations differing from one another with regard to a radial machining depth.
- a step of the thickness profile can be formed at a respective radial machining depth or through a respective radial machining depth.
- the machining processes can alternatively or additionally differ in the distance between individual tools.
- Each section of the blade can e.g. a processing operation must be assigned.
- Different tools and / or different settings of a tool can be used for the individual machining processes. Differences can e.g. consist of a type, a number of teeth, a diameter and / or a distance between the individual tools.
- a double or twin tool with two simultaneously active individual tools arranged at a distance from one another is used for the individual machining processes, the distance being set differently for the individual machining processes.
- This can speed up the manufacturing process. For example, a respective machining operation can only be carried out for a plurality of the blades, in particular for all of them of the rotor disk are carried out before a further machining operation is carried out for the blades in question.
- the method can be further improved, for example, in accordance with the above-mentioned embodiments of the device, and conversely, the rotor disk and the vacuum pump can be manufactured or developed in accordance with the embodiments of the method described here.
- An example also relates to a rotor of a vacuum pump, in particular a turbomolecular pump, with a rotor shaft to which either a separate rotor disk designed according to the invention is attached, or to which a plurality of separate rotor disks arranged one above the other, each designed according to the invention, are attached.
- a molecular pump stage e.g., in the pumping direction
- the rotor shaft of the turbomolecular pump stage can simultaneously form a shaft of the molecular pump stage, i.e. in such an embodiment, the turbomolecular pump stage and the molecular pump stage then have a common shaft.
- the vacuum pump shown as a turbomolecular pump 10 comprises a pump inlet 34 surrounded by an inlet flange 32 and several pump stages for conveying the gas present at the pump inlet 34 to a pump outlet 35.
- the turbomolecular pump 10 comprises a stator with a static housing 36 and one in the housing 36 arranged rotor with a rotor shaft 14 rotatably mounted about an axis of rotation R.
- the turbomolecular pump 10 comprises a plurality of turbomolecular pump stages connected in series with one another with effective pumping, with a plurality of turbomolecular rotor disks 12 connected to the rotor shaft 14 and a plurality of turbomolecular stator disks 38 arranged in the axial direction between the rotor disks 12 and fixed in the housing 16, which are spaced 40 in a desired axial direction Are kept apart.
- the rotor disks 12 and stator disks 38 provide an axial pumping action directed in the direction of the pumping direction P in a scoop area 42.
- the turbomolecular pump 10 also comprises three Holweck pump stages which are arranged one inside the other in the radial direction and have a pumping effect and are connected in series with one another.
- the rotor-side part of the Holweck pump stages comprises two on the rotor shaft 14 attached and supported by this cylindrical jacket-shaped Holweck rotor sleeves 46, 48, which are oriented coaxially to the axis of rotation R and nested one inside the other.
- two cylindrical jacket-shaped Holweck stator sleeves 50, 52 are provided, which are also oriented coaxially to the axis of rotation R and are nested inside one another.
- the pump-active surfaces of the Holweck pump stages are each formed by the radial lateral surfaces opposite one another with the formation of a narrow radial Holweck gap, namely a Holweck rotor sleeve 46, 48 and a Holweck stator sleeve 50, 52, respectively.
- one of the pump-active surfaces is smooth, in the present case, for example, that of the Holweck rotor sleeve 46 or 48, the opposite pump-active surface of the respective Holweck stator sleeve 50 or 52 being structured with a helix around the axis of rotation R in the axial direction has extending grooves in which the gas is propelled by the rotation of the rotor and thereby pumped.
- the rotatable mounting of the rotor shaft 14 is effected by a roller bearing 54 in the area of the pump outlet 35 and a permanent magnet bearing 56 in the area of the pump inlet 34.
- the permanent magnet bearing 56 comprises a bearing half 60 on the rotor side and a bearing half 58 on the stator side, each of which comprises a ring stack of a plurality of permanent magnetic rings stacked one on top of the other in the axial direction, the magnetic rings lying opposite one another to form a radial bearing gap.
- an emergency or catch bearing 62 is provided, which is designed as an unlubricated rolling bearing and runs empty during normal operation of the vacuum pump without contact and only comes into engagement with an excessive radial deflection of the rotor relative to the stator to form a radial stop for the rotor, which prevents a collision of the rotor-side structures with the stator-side structures.
- a conical injection nut 64 with an external diameter increasing towards the roller bearing 54 is provided on the rotor shaft 14, which is connected to a scraper by a plurality of devices such as e.g. a lubricant, impregnated absorbent discs 66 comprising operating fluid storage is in sliding contact.
- the operating medium is transferred by capillary action from the operating medium storage via the wiper to the rotating injection nut 64 and, as a result of the centrifugal force along the injection nut 64, is conveyed in the direction of the increasing outer diameter of the injection nut 64 to the roller bearing 54, where it is e.g. fulfills a lubricating function.
- the turbomolecular pump 10 comprises a drive motor 68 for rotatingly driving the rotor, the rotor of which is formed by the rotor shaft 14.
- a control unit (not shown) controls the drive motor 68.
- a respective rotor disk 12 comprises a plurality of blades 16 arranged distributed in the circumferential direction, of which in the sectional view of FIG Fig. 1 two blades 16 of the rotor disk 12 are visible.
- a respective blade 16 has two steps 22 (only one step 22 is shown in FIG Fig. 1 visible), which separate two sections of the blade 16.
- the steps 22 of the blades 16 of the rotor disks 12 are all arranged at the same distance from the axis of rotation R, although different distances are also conceivable.
- the steps 22 also run parallel to the axis of rotation R, a different course, for example obliquely to the axis of rotation, is also possible.
- Fig. 2 shows a rotor disk 12 for example for use in a turbomolecular pump 10 according to FIG Fig. 1 .
- the rotor disk 12 comprises a plurality of circumferentially distributed blades 16, which originate radially on the inside of a rotor hub 27 and extend radially outwards.
- a respective blade 16 comprises two narrow sides 23, which limit the blade 16 in the axial direction and extend perpendicular to the axis of rotation R.
- the blade 16 also comprises two flat sides 24 and an end face 25 pointing radially outwards.
- Each blade 16 comprises two sections 18, 20 which follow one another in the radial direction and which are defined by steps 22 formed on the flat sides 24.
- the radially inner section 18 is made thicker than the radially outer section 20.
- the steps 22 therefore have the consequence that the blade 16 is, as it were, narrower towards the radially outward and thus approximates a continuously tapered outward shape, as is known from the prior art Technology is known.
- a respective section 18, 22 has two flat and parallel flat sides 24.
- a cross section of a respective section 18, 20 perpendicular to a radius of the rotor disk 12 has the shape of a parallelogram, since the blades 16 are inclined and the narrow sides 23 of the blades 16 lie in a plane running perpendicular to the axis of rotation R (see also Fig. 5 ).
- the blades 16 are thus oriented obliquely with respect to a plane perpendicular to the axis of rotation R and have an angle of attack to this plane which is greater in the radially inner section 18 than in the radially outer section 20.
- the angular relationships of the blades 16 are shown in FIG Fig. 5 explained in more detail.
- Fig. 3 is the rotor disk 12 of the Fig. 2 shown in a top view.
- the blades 16 are with their sections 18, 20 separated by the steps 22 over the The circumference is evenly distributed.
- the blades 16 are also identical.
- Fig. 4 is the rotor disk 12 in a sectional view along the in Fig. 3 indicated cutting plane S shown.
- the opposite narrow sides 23 of the blades 16 are aligned parallel to one another and perpendicular to the axis of rotation R.
- Fig. 5 illustrates the relative orientation of a radially inner section 18 to a radially outer section 20.
- Fig. 5 represents a simplified side view of a blade 16 from the radially outside.
- the radially inner section 18 has a greater thickness than the radially outer section 20.
- the radially inner section 18 has an angle of attack A1, which is measured with respect to a plane perpendicular to the axis of rotation R and parallel to a narrow side 23 of the blade 16, and which is greater than an angle of attack A2 of the radially outer section 20.
- the sections 18 , 20 are separated by steps 22, each of which shows a step surface that is essentially parallel to the image plane.
- the radially outer section 20 is shown as a parallelogram, which is narrower than a parallelogram representing the radially inner section 18.
- Sections 18, 20 each end in a tangential direction, ie in the image on the right or left, at a common point. This achieves a maximum difference between the angles of attack A1 and A2 of the sections 18, 20, which in turn leads to an advantageous overlap ratio of the rotor disk 16.
- angles of incidence A1, A2 of the two sections 18, 20 are not mandatory, i.e. the angles of attack A1, A2 of the two sections can also be the same size.
- FIG 6 to 8 A method according to the invention for producing a rotor disk 12 is shown in FIG 6 to 8 explained in more detail.
- the 6 and 7 are each a top view of a disc parallel to the axis of rotation of the disc, while Fig. 8 is a view in the radial direction and thus perpendicular to the axis of rotation of the disc.
- a double tool comprising two saw blades 28 is inserted in a disk 26, which serves as a semi-finished product for producing a rotor disk 12, in the radial direction or is passed through it in the axial direction.
- the saw blades 28 have a maximum radial machining depth, which corresponds to a radially inner end of a blade 16 and thus a blade base.
- the saw blades 28 are at a distance from one another which corresponds to a thickness of the radially inner section 18.
- the saw blades 28 can be attached in a rotationally fixed manner on a common drive shaft or can also be driven independently of one another.
- the illustrated machining process which is referred to below as the first machining process, can be a second machining process as described in FIG Fig. 7 is illustrated.
- a double tool has two saw blades 28 which are at a distance from one another which is smaller than the distance between the saw blades 28 according to FIG Fig. 6 .
- the smaller distance between the saw blades 28 here gives a second, radially outer section 20 of the blade 16 a smaller thickness.
- the second machining operation has a radial machining depth that is smaller than in the first machining operation.
- a radially outer section 20 is thereby formed, which is thinner than the radially inner section 18, which is "left" as it were by the second machining operation.
- the 6 and 7 serve only to illustrate a manufacturing concept according to the invention, since the sections 18, 20 thus produced have flat sides running parallel to the axis of rotation of the disk, ie have an angle of attack of 90 °.
- a blade 16 with a setting angle A2 of less than 90 ° of a radially outer section 20 used here as an example can be produced Fig. 8 .
- Two saw blades 28 are arranged parallel and at a distance from one another which corresponds to the thickness of the radially outer section 20.
- the saw blades 28 are oriented according to the desired angle of attack A2 of the radially outer section 20 to the axis of rotation of the disk 26 or to a plane running perpendicular to the axis of rotation.
- the saw blades 28 which are arranged, for example, on a common drive shaft, are passed through the disk 26 in the machining direction Q or retracted perpendicularly to the image plane, a maximum radial machining depth being maintained or achieved.
- the tool can also be turned radially, ie in Fig. 8 axis perpendicular to the image plane, in particular continuously rotated, while the tool is inserted into or moved through the disk 26. It is also possible that the tool is not rotated over certain radial distances, so that alternating straight sections and entangled or around one, in particular small, angular sections are created. However, linear tool movements are preferred in each case.
- the in Fig. 8 The machining process shown corresponds to a second machining process in accordance with Fig. 7 .
- a first machining operation for forming a radially inner section 18 can be carried out analogously to this second machining operation, the saw blades 28, however, at an angle of attack A1, for example in accordance with FIG Fig. 5 , aligned and, for example, are driven through the disk 26 along a correspondingly steeper machining direction Q.
- the distance between the saw blades 28 corresponds to the thickness of the radially inner section 18.
- the manufacturing method for a rotor disk 12 of a turbomolecular pump 10 described by way of example shows that two particularly simple machining operations are sufficient to produce the blades 16 of rotor disks 12 for powerful turbomolecular pumps 10.
- Each of the machining processes described here only has a linear travel path of the tool. Between the machining processes, only the distance of the saw blades 28 and their angular orientation with respect to the disk 26 have to be set, in order to subsequently carry out only linear machining in the second machining process. It can be advantageous to carry out the first machining process for all blades 16 of the respective rotor disk 12 before the second machining process is carried out for all blades 16.
- the disk 26 can be rotated relative to the tool about the axis of rotation R, but alternatively the tool can also be guided around the disk 26.
- the orientation of the tool according to an angle of incidence A1, A2 can also be adjusted by appropriately aligning the disk 26 and / or by aligning the tool.
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Description
Die vorliegende Erfindung betrifft eine Rotorscheibe für einen Rotor einer Vakuumpumpe gemäß dem Oberbegriff des Anspruchs 1 und ein Verfahren zur Herstellung einer derartigen Rotorscheibe gemäß dem Oberbegriff des Anspruchs 7.The present invention relates to a rotor disk for a rotor of a vacuum pump according to the preamble of
Eine beispielhafte Turbomolekular-Vakuumpumpe umfasst einen Rotor mit einer Rotorwelle, auf der mehrere Rotorscheiben axial versetzt angeordnet sind oder auf der genau eine Rotorscheibe angeordnet ist. Eine jeweilige Rotorscheibe weist eine Mehrzahl von in Umfangsrichtung verteilt angeordneten Schaufeln auf. Um vakuumtechnische Leistungswerte, wie z.B. Saugvermögen und Kompressionsverhältnis, zu gewährleisten, die über die radiale Erstreckung einer jeweiligen Schaufel möglichst konstant sind, ist es bekannt, die Schaufeln jeweils nach radial außen verjüngt, d.h. konisch, auszuführen. D.h. die Schaufel ist radial innen dicker und wird nach radial außen allmählich dünner. Die Herstellung einer Rotorscheibe mit derart geformten Schaufeln ist aufwendig und es sind kostenintensive Werkzeugmaschinen und Werkzeuge notwendig.An exemplary turbomolecular vacuum pump comprises a rotor with a rotor shaft on which a plurality of rotor disks are axially offset or on which exactly one rotor disk is arranged. Each rotor disk has a plurality of blades arranged distributed in the circumferential direction. Vacuum performance values, e.g. To ensure the pumping speed and the compression ratio, which are as constant as possible over the radial extension of a respective blade, it is known to respectively taper the blades radially outwards, i.e. conical to execute. I.e. the blade is thicker radially on the inside and gradually becomes thinner on the radially outside. The production of a rotor disk with blades shaped in this way is complex and expensive machine tools and tools are necessary.
Des Weiteren sind stufenförmig ausgebildete Schaufeln grundsätzlich bekannt, deren Dickenprofil eine oder mehrere Stufen aufweist (vgl.
Es ist eine Aufgabe der Erfindung, die Herstellung einer Rotorscheibe für einen Rotor einer Vakuumpumpe zu vereinfachen.It is an object of the invention to simplify the manufacture of a rotor disk for a rotor of a vacuum pump.
Die Aufgabe wird durch eine Rotorscheibe mit den Merkmalen des Anspruchs 1 gelöst, und insbesondere dadurch, dass wenigstens eine Schaufel ein Dickenprofil mit zumindest einer zwei Abschnitte der Schaufel trennenden Stufe aufweist. Erfindungsgemäß ist die Schaufel relativ zu einer zumindest im Wesentlichen senkrecht zu einer Rotationsachse verlaufenden Ebene schräg gestellt, wobei jeder Abschnitt einen Anstellwinkel aufweist und der Anstellwinkel des radial inneren Abschnitts größer ist als der Anstellwinkel des radial äußeren Abschnitts. Die Schaufel kann also mit anderen Worten "in sich verdreht" sein, wobei eine kontinuierliche "In-Sich-Verdrehung" durch eine gestufte angenähert und ersetzt werden kann, um den Herstellungsprozess weiter zu vereinfachen und dennoch ausreichend gute Leistungswerte der Vakuumpumpe zu gewährleisten. Als Anstellwinkel wird im Rahmen dieser Offenbarung der Winkel bezüglich einer zur Rotationsachse senkrecht verlaufenden Ebene betrachtet.The object is achieved by a rotor disk with the features of
Eine erfindungsgemäße Rotorscheibe lässt sich besonders einfach herstellen. Denn wenn ein gestuftes Dickenprofil zugelassen wird, können die Bewegungsbahnen eines Bearbeitungswerkzeugs und die Art des Werkzeugs selbst deutlich vereinfach werden. Z.B. kann dadurch die Schaufel bei einer möglichen Ausführungsform der Erfindung durch lediglich eindimensionale Bearbeitungsschritte hergestellt werden, d.h. ein Werkzeug wird in einem Bearbeitungsschritt nur entlang einer geraden Strecke verfahren. Dadurch lässt sich z.B. eine sonst vollständig dreidimensionale Bearbeitungsbahn ersetzen, welche aufwendige und kostenintensive Bearbeitungsmaschinen mit vielen Bearbeitungsfreiheitsgraden erfordert.A rotor disk according to the invention is particularly easy to manufacture. Because if a graded thickness profile is allowed, the trajectories of a machining tool and the type of tool itself can be significantly simplified. E.g. In this way, in one possible embodiment of the invention, the blade can be produced by only one-dimensional machining steps, i.e. a tool is only moved along a straight line in one machining step. This allows e.g. replace an otherwise completely three-dimensional machining path, which requires complex and cost-intensive processing machines with many degrees of machining freedom.
Im Stand der Technik wird davon ausgegangen, dass eine Rotorscheibe mit kontinuierlich geformten - also nicht gestuften - Schaufeln die beste vakuumtechnische Performance liefert, ähnlich wie dies z.B. bei Turbinen der Fall ist. Erfindungsgemäß wurde jedoch erkannt, dass eine gestufte Schaufel die Performance einer Vakuumpumpe gegenüber einer kontinuierlich geformten wenn überhaupt nur in geringem Umfang verringert. Dagegen steht eine erhebliche Vereinfachung des Herstellungsvorgangs einer erfindungsgemäßen Rotorscheibe, wodurch sich die Herstellungskosten deutlich verringern.In the prior art, it is assumed that a rotor disk with continuously shaped - that is, not stepped - blades delivers the best vacuum performance, similar to the case with turbines, for example. According to the invention, however, it was recognized that a stepped blade has the performance of a vacuum pump compared to a continuously shaped, if any only reduced to a small extent. In contrast, there is a considerable simplification of the manufacturing process of a rotor disk according to the invention, which significantly reduces the manufacturing costs.
Die Erfindung bedeutet daher eine Abkehr von der Vorstellung, nur Rotorscheiben mit kontinuierlich oder stetig verjüngenden Schaufeln könnten ausreichende vakuumtechnische Leistungswerte erreichen, wobei die erfindungsgemäße Überwindung dieses Vorurteils erhebliches Einsparpotential bei der Herstellung der Rotorscheiben mit sich bringt.The invention therefore means a departure from the idea that only rotor disks with continuously or continuously tapering blades could achieve sufficient vacuum performance values, the overcoming of this prejudice according to the invention having considerable savings potential in the manufacture of the rotor disks.
Die Anzahl der Stufen ist erfindungsgemäß grundsätzlich beliebig. Durch eine größere Anzahl von Stufen kann z.B. eine sich nach radial außen verjüngende, zumindest bei theoretischer Betrachtung gewissermaßen ideale Form der Schaufel immer weiter angenähert werden. Dabei wird grundsätzlich weiterhin der erfindungsgemäße Vorteil der einfachen Herstellbarkeit gewährleistet, auch wenn eine größere Anzahl von Stufen mit einem größeren Herstellungsaufwand verbunden ist.In principle, the number of stages is arbitrary. A larger number of levels can e.g. a radially outward tapering shape of the blade, which is at least theoretically ideal to a certain extent, is increasingly approximated. In principle, the advantage according to the invention of simple manufacturability is still ensured, even if a larger number of stages is associated with a greater manufacturing outlay.
Bevorzugt sind alle Schaufeln der Rotorscheibe identisch ausgeführt, wobei dies aber nicht zwingend ist.All blades of the rotor disk are preferably of identical design, but this is not mandatory.
Bei einer Ausführungsform ist das Dickenprofil durch gegenüberliegende Flachseiten der Schaufel definiert. Eine Flachseite kann zumindest mit einer ihrer Normalen eine axiale, d.h. zu einer Rotationsachse der Rotorscheibe parallele, Komponente aufweisen. Eine jeweilige Flachseite unterscheidet sich von einer Schmalseite der Schaufel, welche sich z.B. senkrecht zur Rotationsachse erstreckt. Schmalseite und Flachseite unterscheiden sich von zumindest einer Stirnseite einer Schaufel, die eine Begrenzung der Schaufel in radialer Richtung nach radial außen darstellen kann. Dabei sind Übergänge zwischen Flachseiten, Schmalseiten und der Stirnseite aber nicht notwendigerweise unstetig, also zum Beispiel als scharfe Kanten, ausgeführt, wobei eine solche Ausgestaltung erfindungsgemäß aber möglich ist.In one embodiment, the thickness profile is defined by opposite flat sides of the blade. A flat side can have at least one of its normals an axial component, ie a component parallel to an axis of rotation of the rotor disk. A respective flat side differs from a narrow side of the blade, which extends, for example, perpendicular to the axis of rotation. The narrow side and flat side differ from at least one end face of a blade, which can represent a limitation of the blade in the radial direction to the radially outside. However, transitions between flat sides, narrow sides and the end face are not necessarily discontinuous, for example as sharp edges, but such an embodiment is possible according to the invention.
Bei einer weiteren Ausführungsform ist die Stufe an einer der Flachseiten und zwischen einem radial inneren dickeren Abschnitt und einem radial äußeren dünneren Abschnitt der Schaufel ausgebildet. Die Schaufel weist bei dieser Ausführungsform also eine nach radial außen abnehmende Dicke auf, wobei diese Abnahme nicht kontinuierlich, sondern gestuft ist.In a further embodiment, the step is formed on one of the flat sides and between a radially inner thicker section and a radially outer thinner section of the blade. In this embodiment, the blade therefore has a thickness that decreases radially towards the outside, this decrease not being continuous, but stepped.
In wenigstens einem der Abschnitte kann zumindest eine der Flachseiten eben sein. Dadurch wird der Herstellungsvorgang weiter vereinfacht.At least one of the flat sides can be flat in at least one of the sections. This further simplifies the manufacturing process.
Die Dicke ist insbesondere über eine radiale Erstreckung des jeweiligen Abschnitts konstant. Auch hierdurch wird der Herstellungsvorgang weiter vereinfacht, da z.B. bei der Bearbeitung ein Freiheitsgrad der Maschine entfallen kann.The thickness is constant in particular over a radial extension of the respective section. This also simplifies the manufacturing process, since e.g. a degree of freedom of the machine can be eliminated during processing.
Die beiden Abschnitte der Schaufel können jeweils einen parallelogrammförmigen Querschnitt aufweisen. Der Querschnitt kann aber auch von einer Parallelogrammform abweichen. Der Querschnitt kann z.B. rechteckig, trapezförmig oder unregelmäßig drei- oder mehreckig sein und/oder runde Begrenzungslinien aufweisen. Unter einem Querschnitt ist hier ein Schnitt durch die Schaufel senkrecht zu einem Radius der Rotorscheibe zu verstehen.The two sections of the blade can each have a parallelogram cross section. The cross-section can also deviate from a parallelogram shape. The cross section can e.g. be rectangular, trapezoidal or irregularly triangular or polygonal and / or have round boundary lines. A cross section here means a section through the blade perpendicular to a radius of the rotor disk.
Bei einem Ausführungsbeispiel umfasst die Stufe zumindest eine Fase und/oder Rundung. Dadurch können scharfe Kanten vermieden und/oder die Stabilität der Schaufel verbessert werden.In one embodiment, the step comprises at least one chamfer and / or rounding. This can avoid sharp edges and / or improve the stability of the blade.
Die Aufgabe wird auch durch eine Vakuumpumpe, insbesondere Turbomolekularpumpe, mit zumindest einem mehrere separate, übereinander angeordnete, an einer Rotorwelle angebrachte Rotorscheiben oder genau eine separate, an einer Rotorwelle angebrachte Rotorscheibe umfassenden Rotor gelöst, bei der wenigstens eine Rotorscheibe in erfindungsgemäßer Weise ausgebildet ist.The object is also achieved by a vacuum pump, in particular a turbomolecular pump, with at least one of several separate rotor disks arranged one above the other, attached to a rotor shaft, or exactly one separate one on one Detached rotor shaft attached rotor disk solved rotor, in which at least one rotor disk is formed in the inventive manner.
Die Aufgabe wird ferner gelöst durch ein Verfahren gemäß Anspruch 7 zur Herstellung einer Rotorscheibe für eine Vakuumpumpe, insbesondere eine Turbomolekularpumpe, mit zumindest einem mehrere separate, übereinander angeordnete, an einer Rotorwelle angebrachte Rotorscheiben oder genau eine separate, an einer Rotorwelle angebrachte Rotorscheibe umfassenden Rotor, oder zur Herstellung einer solchen Vakuumpumpe, insbesondere Turbomolekularpumpe, wobei die Rotorscheibe einstückig aus einer aus Vollmaterial bestehenden Scheibe hergestellt wird, und wobei an der Scheibe durch Materialwegnahme eine Mehrzahl von in Umfangsrichtung verteilt angeordneten Schaufeln ausgebildet wird, und wobei zumindest eine Schaufel mit einem in radialer Richtung von innen nach außen verlaufenden Dickenprofil versehen wird, das zumindest eine zwei Abschnitte der Schaufel trennende Stufe aufweist.
Die Scheibe kann insbesondere als Kreis- bzw. Zylinderscheibe ausgeführt sein und kann alternativ oder zusätzlich bereits vor Ausbilden der Schaufel eine zentrale, insbesondere kreisförmige Öffnung aufweisen, die z.B. der Durchführung einer Rotorwelle dient. Die Materialwegnahme kann spanende Bearbeitung, wie z.B. Sägen oder Fräsen umfassen, kann aber auch anders ausgeführt werden. Erfindungsgemäß werden zur Erzeugung unterschiedlicher Anstellwinkel für die einzelnen Abschnitte einer jeweiligen Schaufel für die einzelnen Bearbeitungsvorgänge unterschiedliche Orientierungen des Werkzeugs relativ zu einer zumindest im Wesentlichen senkrecht zu einer Rotationsachse verlaufenden Ebene gewählt. Somit hängt der Anstellwinkel nicht vom Werkzeug selbst, sondern nur von dessen Ausrichtung ab. Mit anderen Worten kann das Werkzeug auf den jeweils gewünschten Anstellwinkel eingestellt werden.The object is further achieved by a method according to claim 7 for producing a rotor disk for a vacuum pump, in particular a turbomolecular pump, with at least one separate rotor disk arranged on top of one another and attached to a rotor shaft, or exactly a separate rotor comprising rotor disk attached to a rotor shaft, or for the manufacture of such a vacuum pump, in particular a turbomolecular pump, wherein the rotor disk is produced in one piece from a disk made of solid material, and wherein a plurality of blades arranged in a circumferential direction are formed on the disk by material removal, and wherein at least one blade with a radial one Direction from the inside outward thickness profile is provided, which has at least one step separating two sections of the blade.
The disk can in particular be designed as a circular or cylindrical disk and, alternatively or additionally, can have a central, in particular circular opening, which is used, for example, to pass through a rotor shaft before the blade is formed. The removal of material can include machining, such as sawing or milling, but can also be carried out differently. According to the invention, different orientations of the tool relative to an at least substantially perpendicular to a plane of rotation are selected to generate different angles of attack for the individual sections of a respective blade for the individual machining operations. The angle of attack therefore does not depend on the tool itself, but only on its orientation. In other words, the tool can be set to the desired angle of attack.
Bei einer Ausführungsform wird zum Ausbilden einer jeweiligen Schaufel mit einem Werkzeug wenigstens ein Bearbeitungsvorgang durchgeführt, der umfasst, dass mit dem Werkzeug mit einer radialen Komponente in die Scheibe eingefahren wird. Bei dieser Ausführungsform ist es möglich, nur eine einzige Bewegungsachse des Werkzeugs vorzusehen, wobei zur Ausbildung mehrerer Schaufeln einfach die Scheibe gegenüber dem Werkzeug, insbesondere um ihre Rotationsachse, verdreht zu werden braucht. Die Bearbeitung erfordert in diesem Fall also nur zwei Freiheitsgrade, wodurch eine Maschine zur Herstellung besonders kostengünstig ist.In one embodiment, in order to form a respective blade with a tool, at least one machining operation is carried out, which comprises the tool being inserted into the disk with a radial component. In this embodiment, it is possible to provide only a single axis of movement of the tool, the disc simply having to be rotated relative to the tool, in particular about its axis of rotation, in order to form a plurality of blades. In this case, machining requires only two degrees of freedom, which makes a machine for production particularly economical.
Alternativ oder zusätzlich kann mit dem Werkzeug mit einer axialen Komponente entsprechend einem Anstellwinkel der Schaufel durch die Scheibe durchgefahren werden. Auch hierbei lässt sich die Scheibe einfach zur Herstellung der jeweils nächsten Schaufel verdrehen. Falls gemäß einer Ausführungsform das Werkzeug zumindest ein Kreissägeblatt umfasst, ergibt sich hierbei der Vorteil, dass der Bearbeitungsgrund, also der Bereich, der einer radialen Bearbeitungstiefe entspricht, gerade ausgebildet werden kann.Alternatively or additionally, the tool can be moved through the disk with an axial component corresponding to an angle of attack of the blade. Here, too, the disk can easily be turned to produce the next blade. If, according to one embodiment, the tool comprises at least one circular saw blade, this has the advantage that the machining base, that is to say the region which corresponds to a radial machining depth, can be made straight.
Das Werkzeug kann ein Doppel- oder Zwillingswerkzeug mit zwei gleichzeitig wirksamen, unter einem Abstand zueinander angeordneten Einzelwerkzeugen umfassen. Die Einzelwerkzeuge können z.B. sich drehen, miteinander gekoppelt sein, drehstarr bzw. drehfest miteinander verbunden sein, über ein Getriebe verbunden sein, parallele Drehachsen aufweisen und/oder zusammenfallende Drehachsen aufweisen. Ein Werkzeug, insbesondere ein Einzelwerkzeug, kann z.B. eine Säge, ein Sägeblatt, einen Fräser, eine Doppelsäge, eine Zwillingssäge und/oder dergleichen jeweils in Ein- oder Mehrzahl umfassen. Der Abstand der Einzelwerkzeuge kann eine Dicke eines jeweiligen Abschnitts der Schaufel bestimmen, wobei zur Herstellung von unterschiedlich dicken Abschnitten der Abstand verstellbar sein kann und/oder Werkzeuge mit unterschiedlichem Abstand zwischen den Einzelwerkzeugen vorgehalten werden können.The tool can comprise a double or twin tool with two simultaneously active single tools arranged at a distance from one another. The individual tools can, for example, rotate, be coupled to one another, be connected to one another in a rotationally rigid or rotationally fixed manner, be connected via a gear, have parallel axes of rotation and / or have coincident axes of rotation. A tool, in particular a single tool, can comprise, for example, a saw, a saw blade, a milling cutter, a double saw, a twin saw and / or the like in each case in one or a plurality. The distance between the individual tools can determine a thickness of a respective section of the blade, wherein the distance can be adjustable for producing sections of different thicknesses and / or tools can be kept at different distances between the individual tools.
Bei einem Ausführungsbeispiel sind zur Erzeugung von Schaufelabschnitten mit über deren radiale Erstreckung konstanter Dicke die Einzelwerkzeuge parallel angeordnet. "Parallel" kann sich dabei z.B. auf eine gegebenenfalls vorhandene Drehachse des jeweiligen Einzelwerkzeugs, auf eine Bearbeitungsfläche des Einzelwerkzeugs und/oder auf eine Erstreckungsrichtung oder -ebene des Einzelwerkzeugs beziehen. Eine Maschine zur Durchführung des erfindungsgemäßen Verfahrens wird dadurch weiter vereinfacht.In one embodiment, the individual tools are arranged in parallel in order to produce blade sections with a constant thickness over their radial extent. "Parallel" can e.g. refer to an optionally existing axis of rotation of the respective individual tool, to a processing surface of the individual tool and / or to an extension direction or plane of the individual tool. A machine for performing the method according to the invention is thereby further simplified.
In einer Weiterbildung werden zum Ausbilden der einzelnen Abschnitte einer jeweiligen Schaufel mehrere Bearbeitungsvorgänge zeitlich nacheinander durchgeführt, wobei sich die Bearbeitungsvorgänge hinsichtlich einer radialen Bearbeitungstiefe voneinander unterscheiden. Dabei kann eine Stufe des Dickenprofils bei einer jeweiligen radialen Bearbeitungstiefe oder durch eine jeweilige radiale Bearbeitungstiefe ausgebildet werden. Die Bearbeitungsvorgänge können sich alternativ oder zusätzlich in einem Abstand zwischen Einzelwerkzeugen unterscheiden. Jedem Abschnitt der Schaufel kann z.B. ein Bearbeitungsvorgang zugeordnet sein.In a further development, several machining operations are carried out in succession in order to form the individual sections of a respective blade, the machining operations differing from one another with regard to a radial machining depth. A step of the thickness profile can be formed at a respective radial machining depth or through a respective radial machining depth. The machining processes can alternatively or additionally differ in the distance between individual tools. Each section of the blade can e.g. a processing operation must be assigned.
Außerdem können für die einzelnen Bearbeitungsvorgänge unterschiedliche Werkzeuge und/oder unterschiedliche Einstellungen eines Werkzeugs verwendet werden. Unterschiede können z.B. in einer Art, einer Zähnezahl, einem Durchmesser und/oder einem Abstand der Einzelwerkzeuge bestehen.In addition, different tools and / or different settings of a tool can be used for the individual machining processes. Differences can e.g. consist of a type, a number of teeth, a diameter and / or a distance between the individual tools.
Bei einer Ausführungsform wird für die einzelnen Bearbeitungsvorgänge jeweils ein Doppel- oder Zwillingswerkzeug mit zwei gleichzeitig wirksamen, unter einem Abstand zueinander angeordneten Einzelwerkzeugen verwendet, wobei der Abstand für die einzelnen Bearbeitungsvorgänge unterschiedlich eingestellt wird. Das Herstellungsverfahren lässt sich dadurch beschleunigen. Z.B. kann ein jeweiliger Bearbeitungsvorgang erst für eine Mehrzahl der, insbesondere für alle, Schaufeln der Rotorscheibe durchgeführt werden, bevor ein weiterer Bearbeitungsvorgang für die betreffenden Schaufeln durchgeführt wird.In one embodiment, a double or twin tool with two simultaneously active individual tools arranged at a distance from one another is used for the individual machining processes, the distance being set differently for the individual machining processes. This can speed up the manufacturing process. For example, a respective machining operation can only be carried out for a plurality of the blades, in particular for all of them of the rotor disk are carried out before a further machining operation is carried out for the blades in question.
Das Verfahren kann z.B. entsprechend den vorstehend genannten Ausführungsformen der Vorrichtung weiter verbessert werden, und umgekehrt können die Rotorscheibe und die Vakuumpumpe entsprechend den hier beschriebenen Ausführungsformen des Verfahrens hergestellt bzw. weitergebildet werden.The method can be further improved, for example, in accordance with the above-mentioned embodiments of the device, and conversely, the rotor disk and the vacuum pump can be manufactured or developed in accordance with the embodiments of the method described here.
Ein Beispiel betrifft auch einen Rotor einer Vakuumpumpe, insbesondere einer Turbomolekularpumpe, mit einer Rotorwelle, an der entweder genau eine separate, erfindungsgemäß ausgebildete Rotorscheibe angebracht ist, oder an der mehrere separate, übereinander angeordnete, jeweils erfindungsgemäß ausgebildete Rotorscheiben angebracht sind. Insbesondere - aber nicht nur - dann, wenn der Rotor nur genau eine Rotorscheibe umfasst, kann sich an die den Rotor umfassende Turbomolekularpumpstufe der Vakuumpumpe in Pumprichtung eine Molekularpumpstufe z.B. vom Holweck-Typ anschließen. Dabei kann die Rotorwelle der Turbomolekularpumpstufe gleichzeitig eine Welle der Molekularpumpstufe bilden, d.h. die Turbomolekularpumpstufe und die Molekularpumpstufe besitzen in einem solchen Ausführungsbeispiel dann eine gemeinsame Welle.An example also relates to a rotor of a vacuum pump, in particular a turbomolecular pump, with a rotor shaft to which either a separate rotor disk designed according to the invention is attached, or to which a plurality of separate rotor disks arranged one above the other, each designed according to the invention, are attached. In particular - but not only - when the rotor comprises only one rotor disk, a molecular pump stage, e.g., in the pumping direction, can be added to the turbomolecular pump stage of the vacuum pump, of the Holweck type. The rotor shaft of the turbomolecular pump stage can simultaneously form a shaft of the molecular pump stage, i.e. in such an embodiment, the turbomolecular pump stage and the molecular pump stage then have a common shaft.
Weitere Ausführungsformen sind in den abhängigen Ansprüchen, der Beschreibung und den Figuren angegeben.Further embodiments are specified in the dependent claims, the description and the figures.
Die Erfindung wird nachfolgend lediglich beispielhaft unter Bezugnahme auf die Zeichnung erläutert.
- Fig. 1
- zeigt eine erfindungsgemäße Vakuumpumpe in einem Querschnitt.
- Fig. 2
- zeigt eine erfindungsgemäße Rotorscheibe in einer isometrischen Ansicht.
- Fig. 3
- zeigt die Rotorscheibe von
Fig. 2 in einer Draufsicht. - Fig. 4
- zeigt die Rotorscheibe von
Fig. 2 in einer Schnittansicht. - Fig. 5
- zeigt Abschnitte einer erfindungsgemäßen Rotorschaufel mit unterschiedlichen Anstellwinkeln.
- Fig. 6
- zeigt einen Bearbeitungsvorgang zum Ausbilden einer Rotorschaufel gemäß der Erfindung.
- Fig. 7
- zeigt einen weiteren Bearbeitungsvorgang zum Ausbilden eines Abschnitts der Rotorschaufel gemäß der Erfindung.
- Fig. 8
- zeigt ein Werkzeug, welches erfindungsgemäß in einer dem Anstellwinkel einer Schaufel entsprechenden Orientierung arbeitet.
- Fig. 1
- shows a vacuum pump according to the invention in a cross section.
- Fig. 2
- shows an inventive rotor disk in an isometric view.
- Fig. 3
- shows the rotor disc of
Fig. 2 in a top view. - Fig. 4
- shows the rotor disc of
Fig. 2 in a sectional view. - Fig. 5
- shows sections of a rotor blade according to the invention with different angles of attack.
- Fig. 6
- shows a machining process for forming a rotor blade according to the invention.
- Fig. 7
- shows a further machining process for forming a portion of the rotor blade according to the invention.
- Fig. 8
- shows a tool which works according to the invention in an orientation corresponding to the angle of attack of a blade.
Die in
Die Turbomolekularpumpe 10 umfasst mehrere pumpwirksam miteinander in Serie geschaltete turbomolekulare Pumpstufen mit mehreren mit der Rotorwelle 14 verbundenen turbomolekularen Rotorscheiben 12 und mehreren in axialer Richtung zwischen den Rotorscheiben 12 angeordneten und in dem Gehäuse 16 festgelegten turbomolekularen Statorscheiben 38, die durch Distanzringe 40 in einem gewünschten axialen Abstand zueinander gehalten sind. Die Rotorscheiben 12 und Statorscheiben 38 stellen in einem Schöpfbereich 42 eine in Richtung der Pumprichtung P gerichtete axiale Pumpwirkung bereit.The
Die Turbomolekularpumpe 10 umfasst zudem drei in radialer Richtung ineinander angeordnete und pumpwirksam miteinander in Serie geschaltete Holweck-Pumpstufen. Der rotorseitige Teil der Holweck-Pumpstufen umfasst zwei an der Rotorwelle 14 befestigte und von dieser getragene zylindermantelförmige Holweck-Rotorhülsen 46, 48, die koaxial zu der Rotationsachse R orientiert und ineinander geschachtelt sind. Ferner sind zwei zylindermantelförmige Holweck-Statorhülsen 50, 52 vorgesehen, die ebenfalls koaxial zu der Rotationsachse R orientiert und ineinander geschachtelt sind. Die pumpaktiven Oberflächen der Holweck-Pumpstufen sind jeweils durch die einander unter Ausbildung eines engen radialen Holweck-Spalts gegenüberliegenden radialen Mantelflächen, nämlich jeweils einer Holweck-Rotorhülse 46, 48 und einer Holweck-Statorhülse 50, 52, gebildet. Dabei ist jeweils eine der pumpaktiven Oberflächen glatt ausgebildet, im vorliegenden Fall beispielsweise die der Holweck-Rotorhülse 46 bzw. 48, wobei die gegenüberliegende pumpaktive Oberfläche der jeweiligen Holweck-Statorhülse 50 bzw. 52 eine Strukturierung mit schraubenlinienförmig um die Rotationsachse R herum in axialer Richtung verlaufenden Nuten aufweist, in denen durch die Rotation des Rotors das Gas vorangetrieben und dadurch gepumpt wird.The
Die drehbare Lagerung der Rotorwelle 14 wird durch ein Wälzlager 54 im Bereich des Pumpenauslasses 35 und ein Permanentmagnetlager 56 im Bereich des Pumpeneinlasses 34 bewirkt.The rotatable mounting of the
Das Permanentmagnetlager 56 umfasst eine rotorseitige Lagerhälfte 60 und eine statorseitige Lagerhälfte 58, die jeweils einen Ringstapel aus mehreren in axialer Richtung aufeinander gestapelten permanentmagnetischen Ringen umfassen, wobei die Magnetringe unter Ausbildung eines radialen Lagerspalts einander gegenüberliegen.The
Innerhalb des Permanentmagnetlagers 56 ist ein Not- oder Fanglager 62 vorgesehen, das als ungeschmiertes Wälzlager ausgebildet ist und im normalen Betrieb der Vakuumpumpe ohne Berührung leer läuft und erst bei einer übermäßigen radialen Auslenkung des Rotors gegenüber dem Stator in Eingriff gelangt, um einen radialen Anschlag für den Rotor zu bilden, der eine Kollision der rotorseitigen Strukturen mit den statorseitigen Strukturen verhindert.Within the
Im Bereich des Wälzlagers 54 ist an der Rotorwelle 14 eine konische Spritzmutter 64 mit einem zu dem Wälzlager 54 hin zunehmenden Außendurchmesser vorgesehen, die mit einem Abstreifer eines mehrere mit einem Betriebsmittel, wie z.B. einem Schmiermittel, getränkte saugfähige Scheiben 66 umfassenden Betriebsmittelspeichers in gleitendem Kontakt steht. Im Betrieb wird das Betriebsmittel durch kapillare Wirkung von dem Betriebsmittelspeicher über den Abstreifer auf die rotierende Spritzmutter 64 übertragen und infolge der Zentrifugalkraft entlang der Spritzmutter 64 in Richtung des größer werdenden Außendurchmessers der Spritzmutter 64 zu dem Wälzlager 54 hin gefördert, wo es z.B. eine schmierende Funktion erfüllt.In the area of the
Die Turbomolekularpumpe 10 umfasst einen Antriebsmotor 68 zum drehenden Antreiben des Rotors, dessen Läufer durch die Rotorwelle 14 gebildet ist. Eine nicht dargestellte Steuereinheit steuert den Antriebsmotor 68 an.The
Eine jeweilige Rotorscheibe 12 umfasst eine Mehrzahl von in Umfangsrichtung verteilt angeordneten Schaufeln 16, von denen in der Schnittansicht der
Eine jeweilige Schaufel 16 umfasst zwei Schmalseiten 23, die die Schaufel 16 in axialer Richtung begrenzen und sich senkrecht zu der Rotationsachse R erstrecken. Die Schaufel 16 umfasst außerdem zwei Flachseiten 24 und eine nach radial außen weisende Stirnseite 25.A
Jede Schaufel 16 umfasst zwei in radialer Richtung aufeinander folgende Abschnitte 18, 20, die durch an den Flachseiten 24 ausgebildete Stufen 22 definiert sind. Der radial innere Abschnitt 18 ist dicker ausgeführt als der radial äußere Abschnitt 20. Die Stufen 22 haben also zur Folge, dass die Schaufel 16 gewissermaßen nach radial außen hin schmaler und so einer kontinuierlich nach außen verjüngten Form angenähert wird, wie sie aus dem Stand der Technik bekannt ist.Each
Ein jeweiliger Abschnitt 18, 22 weist zwei ebene und zueinander parallele Flachseiten 24 auf. Ein senkrecht zu einem Radius der Rotorscheibe 12 verlaufender Querschnitt eines jeweiligen Abschnitts 18, 20 weist die Form eines Parallelogramms auf, da die Schaufeln 16 schräg gestellt sind und die Schmalseiten 23 der Schaufeln 16 in einer senkrecht zur Rotationsachse R verlaufenden Ebene liegen (vgl. auch
Die Schaufeln 16 sind also in Bezug auf eine zur Rotationsachse R senkrechte Ebene schräg ausgerichtet und weisen zu dieser Ebene einen Anstellwinkel auf, der im radial inneren Abschnitt 18 größer ist als im radial äußeren Abschnitt 20. Die Winkelverhältnisse der Schaufeln 16 sind in
In
In
Der radial innere Abschnitt 18 weist eine größere Dicke als der radial äußere Abschnitt 20 auf. Außerdem weist der radial innere Abschnitt 18 einen Anstellwinkel A1 auf, der in Bezug auf eine zur Rotationsachse R senkrechte und zu einer Schmalseite 23 der Schaufel 16 parallele Ebene gemessen wird und der größer ist als ein Anstellwinkel A2 des radial äußeren Abschnitts 20. Die Abschnitte 18, 20 sind durch Stufen 22 getrennt, von denen jeweils eine zur Bildebene im Wesentlichen parallele Stufenfläche sichtbar ist.The radially
Der radial äußere Abschnitt 20 ist als ein Parallelogramm dargestellt, welches schmaler als ein den radial inneren Abschnitt 18 repräsentierendes Parallelogramm ist. Die Abschnitte 18, 20 enden in tangentialer Richtung, d.h. im Bild rechts bzw. links, in jeweils einem gemeinsamen Punkt. Dadurch wird eine maximale Differenz zwischen den Anstellwinkeln A1 und A2 der Abschnitte 18, 20 erreicht, was wiederum zu einem vorteilhaften Überlappungsverhältnis der Rotorscheibe 16 führt. Außerdem ist es somit möglich, die Schaufel 16 durch zwei lineare Bearbeitungsvorgänge auszubilden.The radially
Unterschiedliche Anstellwinkel A1, A2 der beiden Abschnitte 18, 20 sind aber nicht zwingend, d.h. die Anstellwinkel A1, A2 der beiden Abschnitte können auch gleich groß sein.Different angles of incidence A1, A2 of the two
Ein erfindungsgemäßes Verfahren zur Herstellung einer Rotorscheibe 12 wird anhand der
In
Nach dem in
Die
Wie bei einem Herstellungsverfahren gemäß den
Das Werkzeug kann grundsätzlich während des Bearbeitungsvorgangs zusätzlich um eine radiale, d.h. in
Der in
Anhand des beispielhaft beschriebenen Herstellungsverfahrens für eine Rotorscheibe 12 einer Turbomolekularpumpe 10 ist ersichtlich, dass zwei besonders einfache Bearbeitungsvorgänge ausreichen, um die Schaufeln 16 von Rotorscheiben 12 für leistungsfähige Turbomolekularpumpen 10 herzustellen. Ein jeweiliger der beschriebenen Bearbeitungsvorgänge weist dabei lediglich einen linearen Verfahrweg des Werkzeugs auf. Zwischen den Bearbeitungsvorgängen muss lediglich der Abstand der Sägeblätter 28 sowie ihre Winkelorientierung bezüglich der Scheibe 26 eingestellt werden, um anschließend im zweiten Bearbeitungsvorgang wiederum eine lediglich lineare Bearbeitung durchzuführen. Dabei kann es vorteilhaft sein, den ersten Bearbeitungsvorgang für alle Schaufeln 16 der jeweiligen Rotorscheibe 12 durchzuführen, bevor der zweite Bearbeitungsvorgang für alle Schaufeln 16 durchgeführt wird. Zwischen einem ersten Bearbeitungsvorgang für eine erste Schaufel 16 und einem ersten Bearbeitungsvorgang für eine zweite Schaufel 16 kann die Scheibe 26 um die Rotationsachse R gegenüber dem Werkzeug verdreht werden, wobei aber alternativ auch das Werkzeug um die Scheibe 26 herumgeführt werden kann. Auch die Orientierung des Werkzeugs entsprechend einem Anstellwinkel A1, A2 kann durch ein entsprechendes Ausrichten der Scheibe 26 und/oder durch Ausrichten des Werkzeugs eingestellt werden.The manufacturing method for a
- 1010th
- TurbomolekularpumpeTurbomolecular pump
- 1212th
- RotorscheibeRotor disc
- 1414
- RotorwelleRotor shaft
- 1616
- Schaufelshovel
- 1818th
- radial innerer Abschnittradially inner section
- 2020
- radial äußerer Abschnittradially outer section
- 2222
- Stufestep
- 2323
- SchmalseiteNarrow side
- 2424th
- FlachseiteFlat side
- 2525th
- StirnseiteFace
- 2626
- Scheibedisc
- 2727
- RotornabeRotor hub
- 2828
- SägeblattSaw blade
- 3232
- EinlassflanschInlet flange
- 3434
- PumpeneinlassPump inlet
- 3535
- PumpenauslassPump outlet
- 3636
- Gehäusecasing
- 3838
- StatorscheibeStator disc
- 4040
- DistanzringSpacer ring
- 4242
- SchöpfbereichScoop area
- 4646
- Holweck-RotorhülseHolweck rotor sleeve
- 4848
- Holweck-RotorhülseHolweck rotor sleeve
- 5050
- Holweck-StatorhülseHolweck stator sleeve
- 5252
- Holweck-StatorhülseHolweck stator sleeve
- 5454
- Wälzlagerroller bearing
- 5656
- PermanentmagnetlagerPermanent magnet bearings
- 5858
- statorseitige Permanentmagnetlagerhälftepermanent magnet bearing half on the stator side
- 6060
- rotorseitige Permanentmagnetlagerhälfterotor-side permanent magnet bearing half
- 6262
- FanglagerCatch camp
- 6464
- SpritzmutterSpray nut
- 6666
- saugfähige Scheibeabsorbent disc
- 6868
- AntriebsmotorDrive motor
- A1A1
- AnstellwinkelAngle of attack
- A2A2
- AnstellwinkelAngle of attack
- PP
- PumprichtungPump direction
- BearbeitungsrichtungMachining direction
- RR
- RotationsachseAxis of rotation
- SS
- SchnittebeneCutting plane
Claims (13)
- A rotor disk (12) for a rotor of a vacuum pump, in particular of a turbomolecular pump (10), comprising a plurality of separate rotor disks (12) arranged above one another and attached to a rotor shaft (14) or exactly one separate rotor disk (12) attached to a rotor shaft (14),
wherein the rotor disk (12) comprises a plurality of blades (16) which are arranged distributed in the peripheral direction and which each have a thickness profile extending from the inside to the outside in the radial direction;
wherein at least one blade (16) has a thickness profile having at least one step (22) which separates two sections (18, 20) of the blade (16);
wherein the blade (16) is inclined relative to a plane extending at least substantially perpendicular to an axis of rotation (R); and
wherein each section (18, 20) has an blade angle,
characterized in that the blade angle (A1) of the radially inner section (18) is larger than the blade angle (A2) of the radially outer section (20). - A rotor disk (12) in accordance with claim 1,
characterized in that
the thickness profile is defined by oppositely disposed flat sides of the blade (16). - A rotor disk (12) in accordance with claim 1 or claim 2,
characterized in that
the step (22) is formed at one of the flat sides and between a radially inner thicker section (18) and a radially outer thinner section (20) of the blade (16). - A rotor disk (12) in accordance with any one of the preceding claims,
characterized in that
the thickness is constant over a radial extent of the respective section (18, 20). - A rotor disk (12) in accordance with any one of the preceding claims,
characterized in that
the step (22) comprises at least one chamfer and/or rounded portion. - A vacuum pump, in particular a turbomolecular pump (10), having at least one rotor comprising a plurality of separate rotor disks (12) arranged above one another and attached to a rotor shaft (14) or exactly one separate rotor disk (12) attached to a rotor shaft (14), wherein at least one rotor disk (12) is configured in accordance with any one of the preceding claims.
- A method of manufacturing a rotor disk (12) for a vacuum pump, in particular for a turbomolecular pump (10), having at least one rotor comprising a plurality of separate rotor disks (12) arranged above one another and attached to a rotor shaft (14) or exactly one separate rotor disk (12) attached to a rotor shaft (14), or of manufacturing such a vacuum pump, in particular a turbomolecular pump (10),
wherein the rotor disk (12) is manufactured in one piece from a disk (26) comprising a solid material;
wherein a plurality of blades (16) arranged distributed in the peripheral direction are formed at the disk (26) by material removal; and
wherein at least one blade (16) is provided with a thickness profile extending from the inside to the outside in the radial direction and having at least one step (22) which separates two sections (18, 20) of the blade (16),
characterized in that
different orientations of the tool relative to a plane extending at least substantially perpendicular to an axis of rotation (R) are selected for the individual machining processes to produce different blade angles (A1, A2) for the individual sections (18, 20) of a respective blade (16) such that the blade (16) is inclined relative to a plane extending at least substantially perpendicular to an axis of rotation (R), with each section (18, 20) having an blade angle and the blade angle (A1) of the radially inner section being larger than the blade angle (A2) of the radially outer section (20). - A method in accordance with claim 7,
characterized in that
at least one machining process is carried out by a tool (28) to form a respective blade (22), said at least one machining process comprising the tool (28) being moved with a radial component into the disk (26) and/or the tool (28) being moved with an axial component in accordance with an blade angle (A1, A2) of the blade (16) through the disk (26). - A method in accordance with claim 7 or claim 8,
characterized in that
the tool comprises a double tool or twin tool having two simultaneously active individual tools (28) arranged at a spacing from one another. - A method in accordance with claim 9,
characterized in that
the individual tools (28) are arranged in parallel to produce blade sections (18, 20) having a constant thickness over their radial extent. - A method in accordance with any one of the claims 7 to 10,
characterized in that
a plurality of machining processes are carried out after one another in time to form the individual sections (18, 20) of a respective blade (16), with the machining processes differing from one another with respect to a radial machining depth. - A method in accordance with claim 11,
characterized in that
different tools and/or different settings of a tool are used for the individual machining processes. - A method in accordance with claim 11 or claim 12,
characterized in that
a respective double tool or twin tool having two simultaneously active individual tools (28) arranged at a spacing from one another is used for the individual machining processes, with the spacing being set differently for the individual machining processes.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15166269.9A EP3091235B1 (en) | 2015-05-04 | 2015-05-04 | Rotor disc |
JP2015249770A JP6148717B2 (en) | 2015-05-04 | 2015-12-22 | Rotor disk |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15166269.9A EP3091235B1 (en) | 2015-05-04 | 2015-05-04 | Rotor disc |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3091235A1 EP3091235A1 (en) | 2016-11-09 |
EP3091235B1 true EP3091235B1 (en) | 2020-03-11 |
Family
ID=53039346
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP15166269.9A Active EP3091235B1 (en) | 2015-05-04 | 2015-05-04 | Rotor disc |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP3091235B1 (en) |
JP (1) | JP6148717B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7069595B2 (en) * | 2017-08-10 | 2022-05-18 | 株式会社島津製作所 | Pump rotor and turbo molecular pump |
GB2592618A (en) * | 2020-03-03 | 2021-09-08 | Edwards Ltd | Turbine blades and methods of manufacture of turbine blades |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE757354A (en) * | 1969-10-27 | 1971-03-16 | Sargent Welch Scientific Co | TURBOMOLECULAR PUMP WITH ADVANCED STATORS AND ROTORS |
US3623826A (en) * | 1969-10-27 | 1971-11-30 | Sargent Welch Scientific Co | Turbine pump with improved rotor and seal constructions |
DE2923632A1 (en) * | 1979-06-11 | 1980-12-18 | Leybold Heraeus Gmbh & Co Kg | METHOD FOR PRODUCING A VAN RING FOR THE ROTOR OF A TUBOMOLECULAR PUMP AND A ROTOR EQUIPPED WITH VAN RINGS OF THIS TYPE |
DE3507274A1 (en) * | 1985-03-01 | 1986-09-04 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | DISC WITH SHOVELS HIGH STABILITY FOR TURBOMOLECULAR PUMPS |
JPH01237395A (en) * | 1988-03-17 | 1989-09-21 | Daikin Ind Ltd | Molecular type vacuum pump |
JPH02201100A (en) * | 1989-01-20 | 1990-08-09 | Ntn Corp | Turbo molecular pump |
JPH1089284A (en) * | 1996-09-12 | 1998-04-07 | Seiko Seiki Co Ltd | Turbo-molecular pump |
JPH10246195A (en) * | 1997-03-05 | 1998-09-14 | Ebara Corp | Turbo-molecular pump |
JP3092063B2 (en) * | 1998-06-17 | 2000-09-25 | セイコー精機株式会社 | Turbo molecular pump |
JP2000110771A (en) * | 1998-10-01 | 2000-04-18 | Mitsubishi Heavy Ind Ltd | Turbo molecular pump |
-
2015
- 2015-05-04 EP EP15166269.9A patent/EP3091235B1/en active Active
- 2015-12-22 JP JP2015249770A patent/JP6148717B2/en active Active
Non-Patent Citations (1)
Title |
---|
None * |
Also Published As
Publication number | Publication date |
---|---|
EP3091235A1 (en) | 2016-11-09 |
JP2016211535A (en) | 2016-12-15 |
JP6148717B2 (en) | 2017-06-14 |
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