EP3091235A1 - Rotor disc - Google Patents

Abstract

The invention relates to a rotor disk for a plurality of separate, stacked, mounted on a rotor shaft rotor disks or exactly a separate, on a rotor shaft (14) mounted rotor disk (12) comprising rotor of a vacuum pump, in particular a turbomolecular pump, wherein the rotor disk a plurality of in Circumferentially distributed blades (16) arranged, each having a radially inwardly extending from the outside thickness profile, and wherein at least one blade has a thickness profile with at least one two sections (18, 20) of the blade (16) separating step (22) having.

Description

The present invention relates to a rotor disk for a rotor of a vacuum pump and to a method for producing such a rotor disk.

An exemplary turbomolecular vacuum pump comprises a rotor with a rotor shaft on which a plurality of rotor disks are arranged axially offset or on which exactly one rotor disk is arranged. A respective rotor disk has a plurality of blades arranged distributed in the circumferential direction. In order to obtain vacuum performance values, e.g. Suction capacity and compression ratio, which are as constant as possible over the radial extent of each blade, it is known, the blades each tapered radially outward, i. conical, to execute. That the blade is radially thicker inside and gradually thinner radially outward. The production of a rotor disk with such shaped blades is expensive and it is costly machine tools and tools necessary.

It is an object of the invention to simplify the manufacture of a rotor disk for a rotor of a vacuum pump.

The object is achieved by a rotor disk with the features of claim 1, and in particular by the fact that at least one blade has a thickness profile with at least one two sections of the blade separating step.

A rotor disk according to the invention can be produced particularly easily. Because if a stepped thickness profile is allowed, the trajectories of a machining tool and the type of tool itself can be clear be simplified. For example, in one possible embodiment of the invention, the blade can thereby be produced by merely one-dimensional processing steps, ie a tool is moved only along a straight path in one processing step. As a result, it is possible to replace, for example, an otherwise completely three-dimensional machining path, which requires complicated and costly machining machines with many processing degrees of freedom.

In the prior art, it is believed that a rotor disk with continuously shaped - not stepped - blades provides the best vacuum performance, similar to e.g. Turbines are the case. According to the invention, however, it has been recognized that a stepped blade reduces the performance of a vacuum pump over a continuously formed, if at all, small extent. In contrast, there is a considerable simplification of the manufacturing process of a rotor disk according to the invention, which significantly reduces the manufacturing costs.

The invention therefore means a departure from the idea that only rotor disks with continuously or steadily tapering blades could achieve sufficient vacuum performance values, with the overcoming of this prejudice according to the invention entailing considerable savings potential in the manufacture of the rotor disks.

The number of stages according to the invention is basically arbitrary. By a larger number of stages, for example, a shape of the blade that tapers radially outward, at least theoretically, can be approximated to a somewhat ideal shape. In principle, the inventive advantage of easy manufacturability is still ensured, even if a larger number of stages is associated with a greater manufacturing outlay.

Preferably, all blades of the rotor disk are made identical, but this is not mandatory.

In one embodiment, the thickness profile is defined by opposing flat sides of the blade. A flat side may have at least one of its normal axial, i. have parallel to a rotational axis of the rotor disc, component. A respective flat side differs from a narrow side of the blade, which is e.g. extends perpendicular to the axis of rotation. Narrow side and flat side differ from at least one end face of a blade, which may constitute a boundary of the blade in the radial direction radially outward. However, transitions between flat sides, narrow sides and the front side are not necessarily unsteady, that is, for example, as sharp edges, executed, such an embodiment according to the invention but is possible.

In another embodiment, the step is formed on one of the flat sides and between a radially inner thicker portion and a radially outer thinner portion of the blade. Thus, in this embodiment, the blade has a thickness which decreases radially outward, this decrease not being continuous but being stepped.

In at least one of the sections, at least one of the flat sides may be flat. This further simplifies the manufacturing process.

The thickness is constant in particular over a radial extent of the respective section. This, too, further simplifies the manufacturing process, e.g. when machining a degree of freedom of the machine can be omitted.

The two sections of the blade can each have a parallelogram-shaped cross-section. The cross section may also be of a parallelogram shape differ. The cross section may, for example, be rectangular, trapezoidal or irregularly triangular or polygonal and / or have round boundary lines. A cross-section here is to be understood as a section through the blade perpendicular to a radius of the rotor disk.

In one embodiment, the blade is inclined relative to an at least substantially perpendicular to a rotation axis extending plane, each section having an angle of attack and the angle of attack of the radially inner portion is greater than the angle of attack of the radially outer portion. In other words, the blade may be "twisted" in itself, whereby a continuous "in-itself twisting" can be approximated and replaced by a stepped one in order to further simplify the manufacturing process and still ensure sufficiently good performance of the vacuum pump. As the angle of attack is considered in the context of this disclosure, the angle with respect to a plane perpendicular to the axis of rotation.

In one embodiment, the step comprises at least one chamfer and / or rounding. As a result, sharp edges can be avoided and / or the stability of the blade can be improved.

The object is also achieved by a vacuum pump, in particular turbomolecular pump, with at least one multiple, superimposed, mounted on a rotor shaft rotor disks or exactly a separate, mounted on a rotor shaft rotor disk rotor in which at least one rotor disk is formed in accordance with the invention.

The object is further achieved by a method for producing a rotor disk for a vacuum pump, in particular a turbomolecular pump, with at least one plurality of separate, superposed, mounted on a rotor shaft rotor disks or exactly one separate, on a rotor shaft rotors comprising rotor disc, or for producing such a vacuum pump, in particular turbomolecular pump, wherein the rotor disc is produced in one piece from a disk made of solid material, and wherein on the disc by material removal a plurality of circumferentially distributed arranged blades is formed, and wherein at least one Scoop is provided with a radially inwardly extending from the outside thickness profile having at least one two sections of the blade separating stage.

The disk may in particular be designed as a circular or cylindrical disk and may, alternatively or additionally, already before the formation of the blade have a central, in particular circular opening, which may be e.g. the implementation of a rotor shaft is used. The material removal may involve machining such as e.g. Sawing or milling include, but can also be performed differently.

In one embodiment, to form a respective blade with a tool, at least one machining operation is carried out, which involves that the tool is driven into the disk with a radial component. In this embodiment, it is possible to provide only a single axis of movement of the tool, wherein for the formation of a plurality of blades simply the disc relative to the tool, in particular about its axis of rotation, needs to be rotated. The processing in this case requires only two degrees of freedom, whereby a machine for the production is particularly cost.

Alternatively or additionally, with the tool with an axial component corresponding to an angle of attack of the blade can be passed through the disc. Again, the disc can be easily rotated to produce the next blade. If, according to one embodiment, the tool comprises at least one circular saw blade, this results in the advantage that the Machining reason, so the area corresponding to a radial machining depth, can be formed straight.

The tool may comprise a double or twin tool with two simultaneously effective, spaced apart individual tools. The individual tools may e.g. rotate, be coupled with each other, be torsionally rigid or rotatably connected to each other, be connected via a transmission, have parallel axes of rotation and / or have coincident axes of rotation. A tool, in particular a single tool, can e.g. a saw, a saw blade, a milling cutter, a double saw, a twin saw and / or the like in each case in single or multiple include. The distance of the individual tools can determine a thickness of a respective section of the blade, wherein for the production of sections of different thickness the distance can be adjustable and / or tools can be kept at different distances between the individual tools.

In one embodiment, the individual tools are arranged in parallel to produce blade sections with over their radial extent of constant thickness. "Parallel" may be e.g. refer to an optionally present rotation axis of the respective individual tool, to a working surface of the individual tool and / or to an extension direction or plane of the individual tool. A machine for carrying out the method according to the invention is thereby further simplified.

In a further development, a plurality of machining operations are carried out in chronological succession to form the individual sections of a respective blade, wherein the machining operations differ from one another with regard to a radial machining depth. In this case, a step of the thickness profile can be formed at a respective radial machining depth or by a respective radial machining depth. The machining operations can be alternative or additionally differ in a distance between individual tools. For example, a machining process can be assigned to each section of the blade.

In addition, different tools and / or different settings of a tool can be used for the individual machining operations. Differences may e.g. exist in a kind, a number of teeth, a diameter and / or a distance of the individual tools.

In one embodiment, a double or twin tool with two simultaneously effective, spaced-apart individual tools is used for the individual machining operations, wherein the distance for the individual machining operations is set differently. The manufacturing process can thereby be accelerated. For example, For example, a respective machining operation can first be carried out for a plurality of, in particular for all, blades of the rotor disk, before a further machining operation is carried out for the respective blades.

In a further embodiment, different orientations of the tool relative to an at least substantially perpendicular plane to a rotation axis are selected for generating different angles of incidence for the individual sections of a respective blade for the individual machining operations. Thus, the angle of attack does not depend on the tool itself, but only on its orientation. In other words, the tool can be adjusted to the particular desired angle of attack.

The method can be further improved, for example, according to the above-mentioned embodiments of the device, and vice versa, the rotor disk and the vacuum pump can be manufactured or developed according to the embodiments of the method described here.

The invention also relates to a rotor of a vacuum pump, in particular a turbomolecular pump, with a rotor shaft to which either a separate, inventively designed rotor disc is attached, or at the plurality of separate, superimposed, each inventively designed rotor discs are mounted. In particular, but not only, when the rotor comprises only one rotor disk, a pumping step of a molecular pumping stage may be applied to the turbomolecular pump stage of the vacuum pump comprising the rotor in the pumping direction. of the Holweck type. At the same time, the rotor shaft of the turbomolecular pumping stage may simultaneously constitute a wave of the molecular pumping stage, i. the turbomolecular pumping stage and the molecular pumping stage then have a common shaft in such an embodiment.

Further embodiments are given in the dependent claims, the description and the figures.

Fig. 1

zeigt eine erfindungsgemäße Vakuumpumpe in einem Querschnitt.

Fig. 2

zeigt eine erfindungsgemäße Rotorscheibe in einer isometrischen Ansicht.

Fig. 3

zeigt die Rotorscheibe von Fig. 2 in einer Draufsicht.

Fig. 4

zeigt die Rotorscheibe von Fig. 2 in einer Schnittansicht.

Fig. 5

zeigt Abschnitte einer erfindungsgemäßen Rotorschaufel mit unterschiedlichen Anstellwinkeln.

Fig. 6

zeigt einen Bearbeitungsvorgang zum Ausbilden einer Rotorschaufel gemäß der Erfindung.

Fig. 7

zeigt einen weiteren Bearbeitungsvorgang zum Ausbilden eines Abschnitts der Rotorschaufel gemäß der Erfindung.

Fig. 8

zeigt ein Werkzeug, welches erfindungsgemäß in einer dem Anstellwinkel einer Schaufel entsprechenden Orientierung arbeitet.

The invention will now be described by way of example only with reference to the drawings.

Fig. 1

shows a vacuum pump according to the invention in a cross section.

Fig. 2

shows a rotor disk according to the invention in an isometric view.

Fig. 3

shows the rotor disk of Fig. 2 in a top view.

Fig. 4

shows the rotor disk of Fig. 2 in a sectional view.

Fig. 5

shows sections of a rotor blade according to the invention with different angles of attack.

Fig. 6

shows a machining operation for forming a rotor blade according to the invention.

Fig. 7

shows another machining operation for forming a portion of the rotor blade according to the invention.

Fig. 8

shows a tool which according to the invention operates in a direction corresponding to the angle of attack of a blade orientation.

In the Fig. 1 The vacuum pump shown as a turbomolecular pump 10 comprises a pump inlet 34 surrounded by an inlet flange 32 and a plurality of pumping stages for delivering the gas present at the pump inlet 34 to a pump outlet 35. The turbomolecular pump 10 comprises a stator having a static housing 36 and one in the housing 36 arranged rotor with a about a rotation axis R rotatably mounted rotor shaft 14th

The turbomolecular pump 10 comprises a plurality of pump-connected in series with each other in series turbomolecular pumping stages having a plurality of the rotor shaft 14 connected turbomolecular rotor disks 12 and a plurality of axially disposed between the rotor disks 12 and fixed in the housing 16 turbomolecular stator disks 38 by spacer rings 40 in a desired axial Distance from each other. The rotor disks 12 and stator disks 38 provide in a scooping region 42 an axial pumping action directed in the direction of the pumping direction P.

The turbomolecular pump 10 also comprises three Holweck pump stages, which are arranged one inside the other in the radial direction and pump-connected with one another in series. The rotor-side part of the Holweck pump stages comprises two on the rotor shaft 14 fixed and carried by this cylinder jacket Holweck rotor sleeves 46, 48 which are coaxial with the axis of rotation R oriented and nested. Furthermore, two cylindrical jacket-shaped Holweck stator sleeves 50, 52 are provided, which are also oriented coaxially to the rotation axis R and nested in one another. The pump-active surfaces of the Holweck pump stages are in each case formed by the radial lateral surfaces which lie opposite one another with the formation of a narrow radial Holweck gap, namely in each case a Holweck rotor sleeve 46, 48 and a Holweck stator sleeve 50, 52. In each case, one of the pump-active surfaces is smooth, in the present case, for example, the Holweck rotor sleeve 46 and 48, wherein the opposite pump-active surface of the respective Holweck stator 50 and 52 structuring with helical about the axis of rotation R around in the axial direction extending grooves, in which the gas is driven by the rotation of the rotor and thereby pumped.

The rotatable mounting of the rotor shaft 14 is effected by a rolling bearing 54 in the region of the pump outlet 35 and a permanent magnet bearing 56 in the region of the pump inlet 34.

The permanent magnet bearing 56 includes a rotor-side bearing half 60 and a stator bearing half 58, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings, the magnetic rings facing each other with formation of a radial bearing gap.

Within the permanent magnet bearing 56, an emergency or backup bearing 62 is provided, which is designed as an unlubricated roller bearing and runs empty in normal operation of the vacuum pump without touching and only with an excessive radial deflection of the rotor with respect to the stator engages to a form a radial stop for the rotor, which prevents a collision of the rotor-side structures with the stator-side structures.

In the region of the rolling bearing 54, a conical injection nut 64 is provided on the rotor shaft 14 with an outer diameter increasing towards the rolling bearing 54, which is provided with a scraper of a plurality with a working medium, such as e.g. a lubricant, soaked absorbent disks 66 in operative resource storage is in sliding contact. In operation, the resource is transferred by capillary action from the resource reservoir via the scraper to the rotating spray nut 64 and due to the centrifugal force along the spray nut 64 in the direction of increasing outer diameter of the spray nut 64 to the rolling bearing 54 promoted where it is e.g. fulfills a lubricating function.

The turbomolecular pump 10 includes a drive motor 68 for rotatably driving the rotor whose rotor is formed by the rotor shaft 14. A control unit, not shown, controls the drive motor 68.

A respective rotor disk 12 comprises a plurality of circumferentially distributed blades 16, of which in the sectional view of Fig. 1 two blades 16 of the rotor disk 12 are visible. A respective blade 16 has two stages 22 (only one stage 22 is in Fig. 1 visible) separating two sections of the blade 16. The steps 22 of the blades 16 of the rotor disks 12 are in this example all arranged at the same distance from the axis of rotation R, but also different distances are conceivable. The steps 22 also extend parallel to the axis of rotation R, whereby a different course, for example obliquely to the axis of rotation, is possible.

Fig. 2 shows a rotor disk 12, for example, for use in a turbomolecular pump 10 according to Fig. 1 , The rotor disk 12 includes a plurality of circumferentially arranged distributed vanes 16 which spring radially inward on a rotor hub 27 and extend radially outward.

A respective blade 16 comprises two narrow sides 23 which bound the blade 16 in the axial direction and extend perpendicular to the axis of rotation R. The blade 16 also comprises two flat sides 24 and a radially outwardly facing end face 25.

Each blade 16 comprises two radially successive sections 18, 20 defined by steps 22 formed on the flat sides 24. The radially inner portion 18 is made thicker than the radially outer portion 20. The result of the steps 22 is that the blade 16 is narrowed to a certain extent radially outward and thus approximates a continuously outwardly tapered shape, as is known from the prior art Technique is known.

A respective section 18, 22 has two flat and mutually parallel flat sides 24. A perpendicular to a radius of the rotor disk 12 extending cross section of a respective section 18, 20 has the shape of a parallelogram, since the blades 16 are inclined and the narrow sides 23 of the blades 16 in a plane perpendicular to the axis of rotation R level (see also Fig. 5 ).

The blades 16 are thus aligned obliquely with respect to a plane perpendicular to the axis of rotation R and have to this level an angle of attack which is greater in the radially inner portion 18 than in the radially outer portion 20. The angular ratios of the blades 16 are in Fig. 5 explained in more detail.

In Fig. 3 is the rotor disk 12 of the Fig. 2 shown in a plan view. The blades 16 are with their separated by the steps 22 sections 18, 20 on the Circumference evenly distributed. The blades 16 are also made identical.

In Fig. 4 is the rotor disk 12 in a sectional view taken along in FIG Fig. 3 indicated section plane S shown. The opposite narrow sides 23 of the blades 16 are aligned parallel to each other and perpendicular to the axis of rotation R.

Fig. 5 illustrates the relative orientation of a radially inner portion 18 to a radially outer portion 20th Fig. 5 represents a simplified side view of a blade 16 from radially outside.

The radially inner portion 18 has a greater thickness than the radially outer portion 20. In addition, the radially inner portion 18 has an angle of attack A1 which is measured with respect to a plane perpendicular to the axis of rotation R and parallel to a narrow side 23 of the blade 16 and which is greater than an angle A2 of the radially outer portion 20. The sections 18 20 are separated by steps 22, of which in each case a step surface substantially parallel to the image plane is visible.

The radially outer portion 20 is shown as a parallelogram which is narrower than a parallelogram representing the radially inner portion 18. The sections 18, 20 terminate in a tangential direction, ie in the image to the right or left, in each case at a common point. As a result, a maximum difference between the angles of attack A1 and A2 of the sections 18, 20 is achieved, which in turn leads to an advantageous overlap ratio of the rotor disk 16. In addition, it is thus possible to form the blade 16 by two linear machining operations.

Different angles of attack A1, A2 of the two sections 18, 20 are not mandatory, i. the angles of attack A1, A2 of the two sections can also be the same size.

An inventive method for producing a rotor disk 12 is based on the Fig. 6 to 8 explained in more detail. The 6 and 7 are each a plan view of a disc parallel to the axis of rotation of the disc, while Fig. 8 is a view in the radial direction and thus perpendicular to the axis of rotation of the disc.

In Fig. 6 is shown as a two saw blades 28 comprehensive double tool in a disc 26, which serves as a semi-finished product for producing a rotor disc 12, retracted in the radial direction or is driven through this in the axial direction. The saw blades 28 in this case have a maximum radial machining depth, which corresponds to a radially inner end of a blade 16 and thus a blade ground. The saw blades 28 have a distance from each other which corresponds to a thickness of the radially inner portion 18. The saw blades 28 may be rotatably mounted on a common drive shaft or driven independently.

After the in Fig. 6 illustrated machining operation, which is hereinafter referred to as the first machining operation, a second machining operation, as in Fig. 7 is illustrated. In Fig. 7 has a double tool on two saw blades 28 which have a distance from each other which is smaller than the distance between the saw blades 28 according to Fig. 6 , Due to the smaller distance between the saw blades 28, a smaller thickness is imparted to a second, radially outer portion 20 of the blade 16. To form the radially outer portion 20, the second machining operation has a radial machining depth which is smaller than in the first machining operation. As a result, a radially outer portion 20 is formed, which is thinner than the radially inner portion 18, which is effectively "left" by the second machining operation. Between the sections 18, 20 remain two stages 22, namely a step 22 on each flat side 24, which separate the sections 18, 20 in the radial direction.

The 6 and 7 serve insofar merely to illustrate a manufacturing concept according to the invention, as the sections 18, 20 thus produced parallel to the axis of rotation of the disc extending flat sides, ie have an angle of attack of 90 °.

As in a manufacturing method according to the 6 and 7 a blade 16 can be produced with an angle of attack A2 of less than 90 ° of a radially outer section 20 used here by way of example Fig. 8 , Two saw blades 28 are arranged parallel and at a distance from one another which corresponds to the thickness of the radially outer portion 20. The saw blades 28 are aligned according to the desired angle of attack A2 of the radially outer portion 20 to the axis of rotation of the disc 26 and to a plane perpendicular to the axis of rotation plane. In order to form the radially outer portion 20, the saw blades 28, which are arranged for example on a common drive shaft, in the processing direction Q passed through the disc 26 or retracted perpendicular to the image plane, with a maximum radial machining depth is maintained or achieved.

The tool can in principle during the machining operation in addition to a radial, ie in Fig. 8 perpendicular to the image plane, axis, in particular continuously rotated, while the tool is retracted into the disc 26 or driven through by this. It is also possible that the tool is not rotated over certain radial distances, which thus alternately straight sections and entangled or to one, in particular small, angle-wound sections arise. However, each linear tool movements are preferred.

The in Fig. 8 shown processing corresponds to a second processing operation according to Fig. 7 , A first machining operation for forming a radially inner portion 18 can be carried out analogously to this second machining operation, wherein the saw blades 28, however, at an angle A1, for example according to Fig. 5 , aligned and, for example, are driven along a correspondingly steeper machining direction Q through the disk 26. The distance of the saw blades 28 to each other corresponds to the thickness of the radially inner portion 18th

It can be seen from the exemplary manufacturing method described for a rotor disk 12 of a turbomolecular pump 10 that two particularly simple machining operations are sufficient to produce the blades 16 of rotor disks 12 for powerful turbomolecular pumps 10. A respective one of the described machining operations has only a linear travel of the tool. Between the machining operations, only the distance of the saw blades 28 and their angular orientation with respect to the disc 26 must be adjusted in order subsequently to perform a merely linear machining in the second machining operation. It may be advantageous to perform the first machining operation for all blades 16 of the respective rotor disk 12 before the second machining operation is carried out for all blades 16. Between a first machining operation for a first blade 16 and a first machining operation for a second blade 16, the disk 26 can be rotated about the axis of rotation R relative to the tool, but alternatively the tool can be guided around the disk 26. Also, the orientation of the tool according to an angle A1, A2 can be adjusted by a corresponding alignment of the disc 26 and / or by aligning the tool. -.-.-.

LIST OF REFERENCE NUMBERS

10

Turbo molecular pump

12

rotor disc

14

rotor shaft

16

shovel

18

radially inner section

20

radially outer section

22

step

23

narrow side

24

flat side

25

front

26

disc

27

rotor hub

28

sawblade

32

inlet flange

34

pump inlet

35

pump outlet

36

casing

38

stator

40

spacer

42

adding area

46

Holweck rotor sleeve

48

Holweck rotor sleeve

50

Holweck stator

52

Holweck stator

54

roller bearing

56

Permanent magnetic bearings

58

stator-side permanent magnet half bearing

60

Rotor-side permanent magnet half bearing

62

safety bearing

64

spray mother

66

absorbent disc

68

drive motor

A1

angle of attack

A2

angle of attack

P

pumping direction

Q

machining direction

R

axis of rotation

S

cutting plane

Claims (15)

Rotor disk (12) for a rotor, comprising a plurality of separate rotor disks (12) arranged on top of one another, or exactly one separate rotor disk (12) mounted on a rotor shaft (14), of a vacuum pump, in particular a turbomolecular pump (10). .
wherein the rotor disk (12) comprises a plurality of circumferentially distributed blades (16), each having a radially inwardly extending from the inside thickness profile, and
wherein at least one blade (16) has a thickness profile with at least one two sections (18, 20) of the blade (16) separating step (22). Rotor disc (12) according to claim 1,
characterized in that
the thickness profile is defined by opposing flat sides of the blade (16). Rotor disc (12) according to claim 1 or 2,
characterized in that
the step (22) is formed on one of the flat sides and between a radially inner thicker section (18) and a radially outer thinner section (20) of the blade (16). Rotor disc (12) according to one of the preceding claims,
characterized in that
the thickness is constant over a radial extent of the respective section (18, 20). Rotor disc (12) according to one of the preceding claims,
characterized in that
the blade (16) is inclined relative to an at least substantially perpendicular to a rotation axis (R) extending plane, each section (18, 20) has an angle and the angle of attack (A1) of the radially inner portion (18) is greater as the angle of attack (A2) of the radially outer portion (20). Rotor disc (12) according to one of the preceding claims,
characterized in that
the step (22) comprises at least one chamfer and / or rounding. Vacuum pump, in particular turbomolecular pump (10), with at least one plurality of separate, superimposed, on a rotor shaft (14) mounted rotor discs (12) or exactly a separate, on a rotor shaft (14) mounted rotor disc (12) comprising rotor, wherein at least one Rotor disc (12) is designed according to one of the preceding claims. Method for producing a rotor disk (12) for a vacuum pump, in particular a turbomolecular pump (10), having at least one plurality of separate rotor disks (12) arranged one above the other, mounted on a rotor shaft (14) or exactly one separate rotor shaft (14) attached rotor disk (12) comprising rotor, or for the production such a vacuum pump, in particular turbomolecular pump (10),
the rotor disk (12) being made in one piece from a disk (26) made of solid material, and
wherein on the disc (26) by material removal, a plurality of circumferentially distributed blades (16) is formed, and wherein at least one blade (16) is provided with a radially inwardly extending from the outside thickness profile, the at least one two sections (18, 20) of the blade (16) separating step (22). Method according to claim 8,
characterized in that
for forming a respective blade (22) with a tool (28), at least one machining operation is carried out, which involves moving the tool (28) with a radial component into the disc (26) and / or with an axial component corresponding to one Angle of attack (A1, A2) of the blade (16) is passed through the disc (26). Method according to claim 8 or 9,
characterized in that
the tool comprises a double or twin tool with two simultaneously effective, spaced apart individual tools (28). Method according to claim 10,
characterized in that
for generating blade sections (18, 20) over the radial extent of constant thickness, the individual tools (28) are arranged in parallel. Method according to one of claims 8 to 11,
characterized in that
for forming the individual sections (18, 20) of a respective blade (16) a plurality of machining operations are carried out successively in time, wherein the machining operations differ from one another with respect to a radial machining depth. Method according to claim 12,
characterized in that
for the individual machining operations different tools and / or different settings of a tool can be used. Method according to claim 12 or 13,
characterized in that
for the individual machining operations in each case a double or twin tool with two simultaneously effective, at a distance from each other arranged individual tools (28) is used, wherein the distance for the individual machining operations is set differently. Method according to one of claims 8 to 14,
characterized in that
for generating different angles of incidence (A1, A2) for the individual sections (18, 20) of a respective blade (16) for the individual machining operations different orientations of the tool relative to an at least substantially perpendicular to a rotation axis (R) extending plane can be selected.

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