GB1397179A - Turbomolecular vacuum pump - Google Patents

Turbomolecular vacuum pump

Info

Publication number
GB1397179A
GB1397179A GB2890673A GB2890673A GB1397179A GB 1397179 A GB1397179 A GB 1397179A GB 2890673 A GB2890673 A GB 2890673A GB 2890673 A GB2890673 A GB 2890673A GB 1397179 A GB1397179 A GB 1397179A
Authority
GB
United Kingdom
Prior art keywords
pump
stage
increase
chord
blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2890673A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of GB1397179A publication Critical patent/GB1397179A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

1397179 Turbomolecular pumps LEYBOLDHERAEUS-VERWALTUNG GmbH 18 June 1973 [19 June 1972] 28906/73 Heading FIC The stagger of the rotor and stator blades of at least one stage of a turbomolecular pump (desirably at the high vacuum end of the pump) increases continuously or in steps radially outwards in such a way that the compression ratio in that stage remains substantially constant at different radii. This overcomes the tendency for the increase of peripheral velocity of the rotor with increasing radius to produce a corresponding increase in the compression ratio and a resultant radially inward conpensatory flow which would impair the pumping efficiency. The blade chord may also increase with radius to provide an approximately constant blade overlap and pitchto-chord ratio. The pitch-to-chord ratio may be greater than 1 in at least one stage at the high vacuum end of the pump, at least near the blade tips.
GB2890673A 1972-06-19 1973-06-18 Turbomolecular vacuum pump Expired GB1397179A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2229724A DE2229724B2 (en) 1972-06-19 1972-06-19 Turbo molecular pump

Publications (1)

Publication Number Publication Date
GB1397179A true GB1397179A (en) 1975-06-11

Family

ID=5848074

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2890673A Expired GB1397179A (en) 1972-06-19 1973-06-18 Turbomolecular vacuum pump

Country Status (5)

Country Link
US (1) US3826588A (en)
CH (1) CH564692A5 (en)
DE (1) DE2229724B2 (en)
FR (1) FR2190184A5 (en)
GB (1) GB1397179A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2128687A (en) * 1982-10-13 1984-05-02 Rolls Royce Rotor or stator blade for an axial flow compressor

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2518201C3 (en) * 1975-04-24 1979-03-15 Battelle-Institut E.V., 6000 Frankfurt Device for separating gas mixtures into components of different molecular masses
US4422822A (en) * 1980-08-11 1983-12-27 Norman Milleron Rotating fiber array molecular driver and molecular momentum transfer device constructed therewith
DE3317868A1 (en) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln FRICTION PUMP
DE3507274A1 (en) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar DISC WITH SHOVELS HIGH STABILITY FOR TURBOMOLECULAR PUMPS
GB2226603B (en) * 1988-02-26 1992-07-29 Nikolai Mikhailovich Novikov Turbomolecular vacuum pump
JPH0261387A (en) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd Turbomolecular pump
IT1238201B (en) * 1989-11-03 1993-07-09 Varian Spa METHOD OF MANUFACTURE BY ELECTROEROSION OF A IMPELLER OR A ROTOR TO ONE OR MORE IMPELLERS OF A TURBO PUMP, PARTICULARLY OF A TURBOMOLECULAR PUMP, AND PRODUCTS SO OBTAINED.
IT1241177B (en) * 1990-02-16 1993-12-29 Varian Spa STATOR FOR TURBOMOLECULAR PUMP.
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower
JPH1089284A (en) * 1996-09-12 1998-04-07 Seiko Seiki Co Ltd Turbo-molecular pump
JP3092063B2 (en) * 1998-06-17 2000-09-25 セイコー精機株式会社 Turbo molecular pump
JP4104098B2 (en) * 1999-03-31 2008-06-18 エドワーズ株式会社 Vacuum pump
DE10046506A1 (en) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbo-molecular vacuum pump has part of blades thickened in region of pressure side edge
CN102007298B (en) * 2008-02-15 2014-04-30 株式会社岛津制作所 Turbomolecular pump
JP5369591B2 (en) 2008-10-03 2013-12-18 株式会社島津製作所 Turbo molecular pump
EP2757266B1 (en) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotary vacuum pump
JP6241223B2 (en) * 2013-03-13 2017-12-06 株式会社島津製作所 Vacuum pump
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
JP7052752B2 (en) * 2019-01-30 2022-04-12 株式会社島津製作所 Turbo molecular pump

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2035063C3 (en) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Impeller for a turbo molecular pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2128687A (en) * 1982-10-13 1984-05-02 Rolls Royce Rotor or stator blade for an axial flow compressor
US4671738A (en) * 1982-10-13 1987-06-09 Rolls-Royce Plc Rotor or stator blades for an axial flow compressor

Also Published As

Publication number Publication date
FR2190184A5 (en) 1974-01-25
DE2229724A1 (en) 1974-01-10
US3826588A (en) 1974-07-30
DE2229724B2 (en) 1980-06-04
CH564692A5 (en) 1975-07-31

Similar Documents

Publication Publication Date Title
GB1397179A (en) Turbomolecular vacuum pump
GB1266585A (en)
ES434508A1 (en) Side-channel ring compressor
FR2310481A1 (en) Ultrahigh speed turbomolecular pump with electric motor - having cover with projecting cone circumferential ribs and blades acting as stators
GB1339986A (en) Multistage centrifugal pumps
GB1495708A (en) Blade for a centrifugal pump impeller
ES421859A1 (en) Centrifugal pump
YU51998A (en) Pump impeller
GB1323546A (en) Turbine pumps
ES238389U (en) Impeller for centrifugal pumps
GB1516876A (en) Rotary pumps
GB1407314A (en) Water turbines and or pumping apparatus incorporating siad turbines
GB1373177A (en) Multistage compressors
GB733533A (en) Improvements in or relating to centrifugal blowers, compressors, pumps and the like
GB1011718A (en) Hydraulic turbines or pumps
FR2282058A1 (en) Centrifugal compressor impeller - has radial blades inclined to rear base of impeller and non-radial outflow
GB1277416A (en) Improvements in or relating to vaned and bladed rotors
GB793143A (en) Improvements relating to axial-flow compressors
GB936175A (en) Improvements in or relating to rotary high-vacuum pumps
GB1308541A (en) Centrifugal pump
GB1330150A (en) Impeller assemblies for high vacuum pumps
GB567890A (en) Improvements in or relating to centrifugal compressors and centrifugal pumps with closed rotor wheels
GB978683A (en) Variable output regulator for centrifugal pumps
GB594537A (en) Improvements in centrifugal type impellers for compressors and the like
GB609971A (en) Improvements in and relating to centrifugal compressors

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee