FR2190184A5 - - Google Patents

Info

Publication number
FR2190184A5
FR2190184A5 FR7322024A FR7322024A FR2190184A5 FR 2190184 A5 FR2190184 A5 FR 2190184A5 FR 7322024 A FR7322024 A FR 7322024A FR 7322024 A FR7322024 A FR 7322024A FR 2190184 A5 FR2190184 A5 FR 2190184A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7322024A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Application granted granted Critical
Publication of FR2190184A5 publication Critical patent/FR2190184A5/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
FR7322024A 1972-06-19 1973-06-15 Expired FR2190184A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2229724A DE2229724B2 (en) 1972-06-19 1972-06-19 Turbo molecular pump

Publications (1)

Publication Number Publication Date
FR2190184A5 true FR2190184A5 (en) 1974-01-25

Family

ID=5848074

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7322024A Expired FR2190184A5 (en) 1972-06-19 1973-06-15

Country Status (5)

Country Link
US (1) US3826588A (en)
CH (1) CH564692A5 (en)
DE (1) DE2229724B2 (en)
FR (1) FR2190184A5 (en)
GB (1) GB1397179A (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2518201C3 (en) * 1975-04-24 1979-03-15 Battelle-Institut E.V., 6000 Frankfurt Device for separating gas mixtures into components of different molecular masses
US4422822A (en) * 1980-08-11 1983-12-27 Norman Milleron Rotating fiber array molecular driver and molecular momentum transfer device constructed therewith
GB2128687B (en) * 1982-10-13 1986-10-29 Rolls Royce Rotor or stator blade for an axial flow compressor
DE3317868A1 (en) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln FRICTION PUMP
DE3507274A1 (en) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar DISC WITH SHOVELS HIGH STABILITY FOR TURBOMOLECULAR PUMPS
JPH02503702A (en) * 1988-02-26 1990-11-01 ノヴィコフ　ニコライ　ミハイロヴィチ turbo molecular vacuum pump
JPH0261387A (en) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd Turbomolecular pump
IT1238201B (en) * 1989-11-03 1993-07-09 Varian Spa METHOD OF MANUFACTURE BY ELECTROEROSION OF A IMPELLER OR A ROTOR TO ONE OR MORE IMPELLERS OF A TURBO PUMP, PARTICULARLY OF A TURBOMOLECULAR PUMP, AND PRODUCTS SO OBTAINED.
IT1241177B (en) * 1990-02-16 1993-12-29 Varian Spa STATOR FOR TURBOMOLECULAR PUMP.
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower
JPH1089284A (en) * 1996-09-12 1998-04-07 Seiko Seiki Co Ltd Turbo-molecular pump
JP3092063B2 (en) * 1998-06-17 2000-09-25 セイコー精機株式会社 Turbo molecular pump
JP4104098B2 (en) * 1999-03-31 2008-06-18 エドワーズ株式会社 Vacuum pump
DE10046506A1 (en) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbo-molecular vacuum pump has part of blades thickened in region of pressure side edge
JP5445143B2 (en) * 2008-02-15 2014-03-19 株式会社島津製作所 Turbo molecular pump
JP5369591B2 (en) 2008-10-03 2013-12-18 株式会社島津製作所 Turbo molecular pump
EP2757266B1 (en) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotary vacuum pump
JP6241223B2 (en) * 2013-03-13 2017-12-06 株式会社島津製作所 Vacuum pump
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
JP7052752B2 (en) * 2019-01-30 2022-04-12 株式会社島津製作所 Turbo molecular pump

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2035063C3 (en) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Impeller for a turbo molecular pump

Also Published As

Publication number Publication date
DE2229724A1 (en) 1974-01-10
US3826588A (en) 1974-07-30
CH564692A5 (en) 1975-07-31
DE2229724B2 (en) 1980-06-04
GB1397179A (en) 1975-06-11

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Legal Events

Date Code Title Description
ST Notification of lapse