GB1328707A - Semiconductive transducer - Google Patents
Semiconductive transducerInfo
- Publication number
- GB1328707A GB1328707A GB2218371A GB2218371A GB1328707A GB 1328707 A GB1328707 A GB 1328707A GB 2218371 A GB2218371 A GB 2218371A GB 2218371 A GB2218371 A GB 2218371A GB 1328707 A GB1328707 A GB 1328707A
- Authority
- GB
- United Kingdom
- Prior art keywords
- deposited
- layer
- substrate
- sno
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 abstract 8
- 229910006404 SnO 2 Inorganic materials 0.000 abstract 7
- 229910004298 SiO 2 Inorganic materials 0.000 abstract 6
- 230000004048 modification Effects 0.000 abstract 3
- 238000012986 modification Methods 0.000 abstract 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 abstract 2
- 230000004888 barrier function Effects 0.000 abstract 2
- 238000000197 pyrolysis Methods 0.000 abstract 2
- 206010034972 Photosensitivity reaction Diseases 0.000 abstract 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 239000002131 composite material Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000009977 dual effect Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 230000036211 photosensitivity Effects 0.000 abstract 1
- 229910052697 platinum Inorganic materials 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 238000010008 shearing Methods 0.000 abstract 1
- 229910000077 silane Inorganic materials 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/50—Devices controlled by mechanical forces, e.g. pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1970114087U JPS5124857Y1 (enrdf_load_stackoverflow) | 1970-11-16 | 1970-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1328707A true GB1328707A (en) | 1973-08-30 |
Family
ID=14628747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2218371A Expired GB1328707A (en) | 1970-11-16 | 1971-04-19 | Semiconductive transducer |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS5124857Y1 (enrdf_load_stackoverflow) |
| GB (1) | GB1328707A (enrdf_load_stackoverflow) |
-
1970
- 1970-11-16 JP JP1970114087U patent/JPS5124857Y1/ja not_active Expired
-
1971
- 1971-04-19 GB GB2218371A patent/GB1328707A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5124857Y1 (enrdf_load_stackoverflow) | 1976-06-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |