GB1308971A - Electron beam deflection apparatus - Google Patents

Electron beam deflection apparatus

Info

Publication number
GB1308971A
GB1308971A GB1174970A GB1174970A GB1308971A GB 1308971 A GB1308971 A GB 1308971A GB 1174970 A GB1174970 A GB 1174970A GB 1174970 A GB1174970 A GB 1174970A GB 1308971 A GB1308971 A GB 1308971A
Authority
GB
United Kingdom
Prior art keywords
insulator
membrane
coil
scanning
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1174970A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1308971A publication Critical patent/GB1308971A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Details Of Television Scanning (AREA)
GB1174970A 1969-03-17 1970-03-11 Electron beam deflection apparatus Expired GB1308971A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019369 1969-03-17

Publications (1)

Publication Number Publication Date
GB1308971A true GB1308971A (en) 1973-03-07

Family

ID=12020326

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1174970A Expired GB1308971A (en) 1969-03-17 1970-03-11 Electron beam deflection apparatus

Country Status (4)

Country Link
US (1) US3634684A (enrdf_load_stackoverflow)
DE (1) DE2012431B2 (enrdf_load_stackoverflow)
FR (1) FR2034981A1 (enrdf_load_stackoverflow)
GB (1) GB1308971A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3787696A (en) * 1972-03-15 1974-01-22 Etec Corp Scanning electron microscope electron-optical column construction
FR2520553A1 (fr) * 1982-01-22 1983-07-29 Cameca Appareil d'optique electronique comportant des elements en graphite pyrolytique
FR2597259A1 (fr) * 1986-04-15 1987-10-16 Thomson Csf Dispositif a faisceau electronique pour projeter l'image d'un objet sur un echantillon
JP3117950B2 (ja) * 1998-05-21 2000-12-18 セイコーインスツルメンツ株式会社 荷電粒子装置
US7863563B2 (en) * 2007-03-08 2011-01-04 International Business Machines Corporation Carbon tube for electron beam application
EP3333877A1 (en) * 2016-12-07 2018-06-13 JEOL Ltd. Liner tube and electron microscope
EP3338857B1 (en) * 2016-12-21 2021-08-11 RaySearch Laboratories AB System and method for determining a treatment plan for active ion beam treatment
EP3591685A1 (en) * 2018-07-06 2020-01-08 FEI Company Electron microscope with improved imaging resolution

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB516620A (en) * 1938-06-02 1940-01-08 Francois Joseph Gerard Van Den Improvements in cathode ray tubes
US2213176A (en) * 1939-06-06 1940-08-27 Rca Corp Television transmitting tube
US2959705A (en) * 1952-09-18 1960-11-08 American Optical Corp Shielded tube and method of making the same

Also Published As

Publication number Publication date
US3634684A (en) 1972-01-11
FR2034981A1 (enrdf_load_stackoverflow) 1970-12-18
DE2012431A1 (de) 1970-09-24
DE2012431B2 (de) 1974-02-21

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee