GB1308971A - Electron beam deflection apparatus - Google Patents
Electron beam deflection apparatusInfo
- Publication number
- GB1308971A GB1308971A GB1174970A GB1174970A GB1308971A GB 1308971 A GB1308971 A GB 1308971A GB 1174970 A GB1174970 A GB 1174970A GB 1174970 A GB1174970 A GB 1174970A GB 1308971 A GB1308971 A GB 1308971A
- Authority
- GB
- United Kingdom
- Prior art keywords
- insulator
- membrane
- coil
- scanning
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title abstract 3
- 239000012528 membrane Substances 0.000 abstract 5
- 239000012212 insulator Substances 0.000 abstract 4
- 239000004033 plastic Substances 0.000 abstract 2
- 229920003023 plastic Polymers 0.000 abstract 2
- 229910001369 Brass Inorganic materials 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 239000010951 brass Substances 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000011888 foil Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000000615 nonconductor Substances 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
Abstract
1308971 Electron beam deflecting apparatus NIHON DENSHI KK 11 March 1970 [17 March 1969] 11749/70 Heading H1D Electron beam deflection apparatus, particularly scanning apparatus, such as a scanning electron microscope, comprises at least one deflection coil in the evacuated volume to generate a deflection field with at least one component at right angles to the beam path, and an electrical insulator between the coil and beam path with an electrically conductive membrane of thickness 500 to 10<SP>5</SP> (e.g. 10<SP>3</SP> ) on the inner surface of the insulator. The insulator may be glass, e.g. quartz glass, or a plastics material and the membrane Au or Cr, Cu, Ti or Al for instance, pasted or evaporated on the insulator. The construction ensures electrons do not strike the coil, the membrane eliminating charging of insulator 13 while the membrane thickness reduces eddy currents at high scanning frequencies such as 15À75 kHz and as in TV scanning. Coil supporter 12 may be plastic, member 13 supported by brass or other non- magnetic members 15, 16 with intervening Ag foil 17 and end plates 18, 19. In Fig. 1 (not shown), membrane (5) is connected to metal plates (6), (7), the latter being earthed.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019369 | 1969-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1308971A true GB1308971A (en) | 1973-03-07 |
Family
ID=12020326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1174970A Expired GB1308971A (en) | 1969-03-17 | 1970-03-11 | Electron beam deflection apparatus |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3634684A (en) |
| DE (1) | DE2012431B2 (en) |
| FR (1) | FR2034981A1 (en) |
| GB (1) | GB1308971A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3787696A (en) * | 1972-03-15 | 1974-01-22 | Etec Corp | Scanning electron microscope electron-optical column construction |
| FR2520553A1 (en) * | 1982-01-22 | 1983-07-29 | Cameca | ELECTRONIC OPTICAL APPARATUS COMPRISING PYROLYTIC GRAPHITE ELEMENTS |
| FR2597259A1 (en) * | 1986-04-15 | 1987-10-16 | Thomson Csf | ELECTRONIC BEAM DEVICE FOR PROJECTING THE IMAGE OF AN OBJECT ON A SAMPLE |
| JP3117950B2 (en) * | 1998-05-21 | 2000-12-18 | セイコーインスツルメンツ株式会社 | Charged particle device |
| US7863563B2 (en) * | 2007-03-08 | 2011-01-04 | International Business Machines Corporation | Carbon tube for electron beam application |
| EP3333877A1 (en) * | 2016-12-07 | 2018-06-13 | JEOL Ltd. | Liner tube and electron microscope |
| EP3338857B1 (en) * | 2016-12-21 | 2021-08-11 | RaySearch Laboratories AB | System and method for determining a treatment plan for active ion beam treatment |
| EP3591685A1 (en) * | 2018-07-06 | 2020-01-08 | FEI Company | Electron microscope with improved imaging resolution |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB516620A (en) * | 1938-06-02 | 1940-01-08 | Francois Joseph Gerard Van Den | Improvements in cathode ray tubes |
| US2213176A (en) * | 1939-06-06 | 1940-08-27 | Rca Corp | Television transmitting tube |
| US2959705A (en) * | 1952-09-18 | 1960-11-08 | American Optical Corp | Shielded tube and method of making the same |
-
1970
- 1970-03-06 FR FR7008138A patent/FR2034981A1/fr not_active Withdrawn
- 1970-03-11 GB GB1174970A patent/GB1308971A/en not_active Expired
- 1970-03-16 DE DE2012431A patent/DE2012431B2/en active Pending
- 1970-03-17 US US20199A patent/US3634684A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE2012431A1 (en) | 1970-09-24 |
| DE2012431B2 (en) | 1974-02-21 |
| FR2034981A1 (en) | 1970-12-18 |
| US3634684A (en) | 1972-01-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |