GB1291353A - Improvements in or relating to apparatus incorporating high-vacuum pumping systems - Google Patents

Improvements in or relating to apparatus incorporating high-vacuum pumping systems

Info

Publication number
GB1291353A
GB1291353A GB45759/70A GB4575970A GB1291353A GB 1291353 A GB1291353 A GB 1291353A GB 45759/70 A GB45759/70 A GB 45759/70A GB 4575970 A GB4575970 A GB 4575970A GB 1291353 A GB1291353 A GB 1291353A
Authority
GB
United Kingdom
Prior art keywords
vacuum
stage
vacuum pumping
evacuating
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB45759/70A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691950328 external-priority patent/DE1950328C3/de
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of GB1291353A publication Critical patent/GB1291353A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB45759/70A 1969-09-30 1970-09-25 Improvements in or relating to apparatus incorporating high-vacuum pumping systems Expired GB1291353A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691950328 DE1950328C3 (de) 1969-09-30 Korpuskularstrahlgerät, insbesondere Elektronenmikroskop, mit einer aus Hoch- und Vorvakuumpumpen bestehenden Pumpenanlage

Publications (1)

Publication Number Publication Date
GB1291353A true GB1291353A (en) 1972-10-04

Family

ID=5747450

Family Applications (1)

Application Number Title Priority Date Filing Date
GB45759/70A Expired GB1291353A (en) 1969-09-30 1970-09-25 Improvements in or relating to apparatus incorporating high-vacuum pumping systems

Country Status (4)

Country Link
US (1) US3668393A (enrdf_load_stackoverflow)
JP (1) JPS4814626B1 (enrdf_load_stackoverflow)
GB (1) GB1291353A (enrdf_load_stackoverflow)
NL (1) NL7010108A (enrdf_load_stackoverflow)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2337226A1 (de) * 1973-07-21 1975-02-06 Maschf Augsburg Nuernberg Ag Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer
JPS50139331U (enrdf_load_stackoverflow) * 1974-05-02 1975-11-17
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
US4139774A (en) * 1977-02-09 1979-02-13 Hitachi, Ltd. Apparatus for irradiating a specimen by an electron beam
JP2607572B2 (ja) * 1987-12-23 1997-05-07 株式会社日立製作所 荷電粒子を用いる分析装置および方法
DE4213763B4 (de) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
US6238177B1 (en) * 1999-01-08 2001-05-29 Fantom Technologies Inc. Prandtl layer turbine
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
FR2869369B1 (fr) * 2004-04-21 2006-07-21 Alcatel Sa Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe
US20060291997A1 (en) * 2004-10-26 2006-12-28 Wilson Erich A Fluid Flow Chambers and Bridges in Bladeless Compressors, Turbines and Pumps
US20060216149A1 (en) * 2004-10-26 2006-09-28 Wilson Erich A Fluid Flow Channels in Bladeless Compressors, Turbines and Pumps
US7478990B2 (en) * 2005-10-25 2009-01-20 Wilson Erich A Bracket/spacer optimization in bladeless turbines, compressors and pumps

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3483373A (en) * 1966-07-28 1969-12-09 Siemens Ag Airlock assembly for corpuscular ray devices
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump

Also Published As

Publication number Publication date
DE1950328A1 (de) 1971-04-01
US3668393A (en) 1972-06-06
JPS4814626B1 (enrdf_load_stackoverflow) 1973-05-09
DE1950328B2 (de) 1976-09-23
NL7010108A (enrdf_load_stackoverflow) 1971-04-01

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees