GB1291353A - Improvements in or relating to apparatus incorporating high-vacuum pumping systems - Google Patents

Improvements in or relating to apparatus incorporating high-vacuum pumping systems

Info

Publication number
GB1291353A
GB1291353A GB45759/70A GB4575970A GB1291353A GB 1291353 A GB1291353 A GB 1291353A GB 45759/70 A GB45759/70 A GB 45759/70A GB 4575970 A GB4575970 A GB 4575970A GB 1291353 A GB1291353 A GB 1291353A
Authority
GB
United Kingdom
Prior art keywords
vacuum
stage
vacuum pumping
evacuating
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB45759/70A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691950328 external-priority patent/DE1950328C3/en
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1291353A publication Critical patent/GB1291353A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Abstract

1291353 Electron microscopes SIEMENS AG 25 Sept 1970 [30 Sept 1969] 45759/70 Heading H1D [Also in Division F1] A high-vacuum pumping system employs high-vacuum and backing pumps for evacuation of high-vacuum chambers and other compartments in apparatus such as an electron microscope as shown in Fig. 1. The system includes a molecular pump having a main section 13 for evacuating the column 1 of the electron microscope, and an auxiliary section 20 for evacuating an airlock compartment 3 for the introduction of specimens and a compartment 6 of an exsiccator for photographic material. The two sections 13, 20 employ a common shaft which passes through a vacuumtight partition 21. Both compartments 3, 6 have air-supply valves 10, 11. The discharge conduits 22, 23 of the main and auxiliary sections 13, 20 are connected through valves (36, 37), Fig. 2 (not shown), to a high-vacuum stage (30) and a rough-vacuum stage (31) respectively of a backing pump, the discharge of the highvacuum stage being in permanent connection with the inlet of the rough-vacuum stage.
GB45759/70A 1969-09-30 1970-09-25 Improvements in or relating to apparatus incorporating high-vacuum pumping systems Expired GB1291353A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691950328 DE1950328C3 (en) 1969-09-30 Corpuscular beam device, in particular an electron microscope, with a pump system consisting of high and backing pumps

Publications (1)

Publication Number Publication Date
GB1291353A true GB1291353A (en) 1972-10-04

Family

ID=5747450

Family Applications (1)

Application Number Title Priority Date Filing Date
GB45759/70A Expired GB1291353A (en) 1969-09-30 1970-09-25 Improvements in or relating to apparatus incorporating high-vacuum pumping systems

Country Status (4)

Country Link
US (1) US3668393A (en)
JP (1) JPS4814626B1 (en)
GB (1) GB1291353A (en)
NL (1) NL7010108A (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2337226A1 (en) * 1973-07-21 1975-02-06 Maschf Augsburg Nuernberg Ag VACUUM PUMP WITH A RUNNER MOUNTED INSIDE THEIR HOUSING
JPS50139331U (en) * 1974-05-02 1975-11-17
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
JPS5620654Y2 (en) * 1975-11-17 1981-05-15
US4139774A (en) * 1977-02-09 1979-02-13 Hitachi, Ltd. Apparatus for irradiating a specimen by an electron beam
JP2607572B2 (en) * 1987-12-23 1997-05-07 株式会社日立製作所 Analysis device and method using charged particles
DE4213763B4 (en) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Process for evacuating a vacuum chamber and a high vacuum chamber, and high vacuum system for carrying it out
US6238177B1 (en) * 1999-01-08 2001-05-29 Fantom Technologies Inc. Prandtl layer turbine
DE19930952A1 (en) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vacuum pump
JP2005042709A (en) * 2003-07-10 2005-02-17 Ebara Corp Vacuum pump
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
FR2869369B1 (en) * 2004-04-21 2006-07-21 Alcatel Sa VACUUM PUMP MULTI-STAGE, AND PUMPING INSTALLATION COMPRISING SUCH A PUMP
US20060216149A1 (en) * 2004-10-26 2006-09-28 Wilson Erich A Fluid Flow Channels in Bladeless Compressors, Turbines and Pumps
US20060291997A1 (en) * 2004-10-26 2006-12-28 Wilson Erich A Fluid Flow Chambers and Bridges in Bladeless Compressors, Turbines and Pumps
US7478990B2 (en) * 2005-10-25 2009-01-20 Wilson Erich A Bracket/spacer optimization in bladeless turbines, compressors and pumps

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3483373A (en) * 1966-07-28 1969-12-09 Siemens Ag Airlock assembly for corpuscular ray devices
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump

Also Published As

Publication number Publication date
DE1950328B2 (en) 1976-09-23
JPS4814626B1 (en) 1973-05-09
US3668393A (en) 1972-06-06
DE1950328A1 (en) 1971-04-01
NL7010108A (en) 1971-04-01

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees