JPS4814626B1 - - Google Patents

Info

Publication number
JPS4814626B1
JPS4814626B1 JP45085170A JP8517070A JPS4814626B1 JP S4814626 B1 JPS4814626 B1 JP S4814626B1 JP 45085170 A JP45085170 A JP 45085170A JP 8517070 A JP8517070 A JP 8517070A JP S4814626 B1 JPS4814626 B1 JP S4814626B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45085170A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691950328 external-priority patent/DE1950328C3/de
Application filed filed Critical
Publication of JPS4814626B1 publication Critical patent/JPS4814626B1/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP45085170A 1969-09-30 1970-09-30 Pending JPS4814626B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691950328 DE1950328C3 (de) 1969-09-30 Korpuskularstrahlgerät, insbesondere Elektronenmikroskop, mit einer aus Hoch- und Vorvakuumpumpen bestehenden Pumpenanlage

Publications (1)

Publication Number Publication Date
JPS4814626B1 true JPS4814626B1 (ja) 1973-05-09

Family

ID=5747450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45085170A Pending JPS4814626B1 (ja) 1969-09-30 1970-09-30

Country Status (4)

Country Link
US (1) US3668393A (ja)
JP (1) JPS4814626B1 (ja)
GB (1) GB1291353A (ja)
NL (1) NL7010108A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50139331U (ja) * 1974-05-02 1975-11-17
JPS5620654Y2 (ja) * 1975-11-17 1981-05-15
JP2007507659A (ja) * 2003-09-30 2007-03-29 ザ ビーオーシー グループ ピーエルシー 真空ポンプ

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2337226A1 (de) * 1973-07-21 1975-02-06 Maschf Augsburg Nuernberg Ag Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
US4139774A (en) * 1977-02-09 1979-02-13 Hitachi, Ltd. Apparatus for irradiating a specimen by an electron beam
JP2607572B2 (ja) * 1987-12-23 1997-05-07 株式会社日立製作所 荷電粒子を用いる分析装置および方法
DE4213763B4 (de) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
US6238177B1 (en) * 1999-01-08 2001-05-29 Fantom Technologies Inc. Prandtl layer turbine
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
FR2869369B1 (fr) 2004-04-21 2006-07-21 Alcatel Sa Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe
US20060216149A1 (en) * 2004-10-26 2006-09-28 Wilson Erich A Fluid Flow Channels in Bladeless Compressors, Turbines and Pumps
US20060291997A1 (en) * 2004-10-26 2006-12-28 Wilson Erich A Fluid Flow Chambers and Bridges in Bladeless Compressors, Turbines and Pumps
US7478990B2 (en) * 2005-10-25 2009-01-20 Wilson Erich A Bracket/spacer optimization in bladeless turbines, compressors and pumps

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3483373A (en) * 1966-07-28 1969-12-09 Siemens Ag Airlock assembly for corpuscular ray devices
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50139331U (ja) * 1974-05-02 1975-11-17
JPS5620654Y2 (ja) * 1975-11-17 1981-05-15
JP2007507659A (ja) * 2003-09-30 2007-03-29 ザ ビーオーシー グループ ピーエルシー 真空ポンプ
JP4806636B2 (ja) * 2003-09-30 2011-11-02 エドワーズ リミテッド 真空ポンプ

Also Published As

Publication number Publication date
DE1950328B2 (de) 1976-09-23
US3668393A (en) 1972-06-06
GB1291353A (en) 1972-10-04
NL7010108A (ja) 1971-04-01
DE1950328A1 (de) 1971-04-01

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