NL7010108A - - Google Patents
Info
- Publication number
- NL7010108A NL7010108A NL7010108A NL7010108A NL7010108A NL 7010108 A NL7010108 A NL 7010108A NL 7010108 A NL7010108 A NL 7010108A NL 7010108 A NL7010108 A NL 7010108A NL 7010108 A NL7010108 A NL 7010108A
- Authority
- NL
- Netherlands
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19691950328 DE1950328C3 (de) | 1969-09-30 | Korpuskularstrahlgerät, insbesondere Elektronenmikroskop, mit einer aus Hoch- und Vorvakuumpumpen bestehenden Pumpenanlage |
Publications (1)
Publication Number | Publication Date |
---|---|
NL7010108A true NL7010108A (xx) | 1971-04-01 |
Family
ID=5747450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7010108A NL7010108A (xx) | 1969-09-30 | 1970-07-08 |
Country Status (4)
Country | Link |
---|---|
US (1) | US3668393A (xx) |
JP (1) | JPS4814626B1 (xx) |
GB (1) | GB1291353A (xx) |
NL (1) | NL7010108A (xx) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2337226A1 (de) * | 1973-07-21 | 1975-02-06 | Maschf Augsburg Nuernberg Ag | Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer |
JPS50139331U (xx) * | 1974-05-02 | 1975-11-17 | ||
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
JPS5620654Y2 (xx) * | 1975-11-17 | 1981-05-15 | ||
US4139774A (en) * | 1977-02-09 | 1979-02-13 | Hitachi, Ltd. | Apparatus for irradiating a specimen by an electron beam |
JP2607572B2 (ja) * | 1987-12-23 | 1997-05-07 | 株式会社日立製作所 | 荷電粒子を用いる分析装置および方法 |
DE4213763B4 (de) * | 1992-04-27 | 2004-11-25 | Unaxis Deutschland Holding Gmbh | Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung |
US6238177B1 (en) * | 1999-01-08 | 2001-05-29 | Fantom Technologies Inc. | Prandtl layer turbine |
DE19930952A1 (de) * | 1999-07-05 | 2001-01-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP2005042709A (ja) * | 2003-07-10 | 2005-02-17 | Ebara Corp | 真空ポンプ |
GB0322889D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0329839D0 (en) * | 2003-12-23 | 2004-01-28 | Boc Group Plc | Vacuum pump |
FR2869369B1 (fr) | 2004-04-21 | 2006-07-21 | Alcatel Sa | Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe |
US20060216149A1 (en) * | 2004-10-26 | 2006-09-28 | Wilson Erich A | Fluid Flow Channels in Bladeless Compressors, Turbines and Pumps |
US20060291997A1 (en) * | 2004-10-26 | 2006-12-28 | Wilson Erich A | Fluid Flow Chambers and Bridges in Bladeless Compressors, Turbines and Pumps |
US7478990B2 (en) * | 2005-10-25 | 2009-01-20 | Wilson Erich A | Bracket/spacer optimization in bladeless turbines, compressors and pumps |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3483373A (en) * | 1966-07-28 | 1969-12-09 | Siemens Ag | Airlock assembly for corpuscular ray devices |
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
-
1970
- 1970-07-08 NL NL7010108A patent/NL7010108A/xx unknown
- 1970-09-25 GB GB45759/70A patent/GB1291353A/en not_active Expired
- 1970-09-28 US US75883A patent/US3668393A/en not_active Expired - Lifetime
- 1970-09-30 JP JP45085170A patent/JPS4814626B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE1950328B2 (de) | 1976-09-23 |
US3668393A (en) | 1972-06-06 |
JPS4814626B1 (xx) | 1973-05-09 |
GB1291353A (en) | 1972-10-04 |
DE1950328A1 (de) | 1971-04-01 |